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$B$3$NJ,N`$G$h$/;H$o$l(B
$B$F$$$k%-!<%o!<%I(B
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CVD8$B7o(B**
chemical vapor deposition4$B7o(B*
Supercritical Fluid Deposition3$B7o(B*
SiC3$B7o(B*
MOVPE3$B7o(B*
QMS2$B7o(B
Graphene2$B7o(B
thin film2$B7o(B
conductive oxide1$B7o(B

$B$BHV9f(B$B9V1iBjL\!?H/I=$B%-!<%o!<%I(B$B
8$BHs>=AGGvKl$NDc297A@.K!(B
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$BC:2=7>AG(B
CVD
$BDc29%W%m%;%9(B
4/10
16:03:31
92ULSI-Cu$BG[@~MQ(BCo(W)$B%P%j%dKl7A@.(BCVD/ALD$B%W%m%;%9$N:GE,@_7W(B
($BElBg1!9)!&BgM[F|;@(B) $B!{(B($B@5(B)$B@6?e(B $B=(<#(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B
CVD
amidinate
alloy
4/20
15:24:18
99SiC-CVD$B%W%m%;%9$X$N(BHCl$B%,%9E:2C8z2L(B
($BElBg1!9)(B) $B!{(B($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B $BgULg(B $BM$0l(B$B!&(B $B:4F#(B $BEP(B$B!&(B (IHI$B4pHW8&(B) $BJ]8MDM(B $B>?(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B
CVD
SiC
QMS
4/20
20:58:27
148SiC-CVD$B%W%m%;%9H?1~5!9=2r@O$N$?$a$NG.J,2r5$Aj
($BElBg1!9)(B) $B!{(B($B3X(B)$BgULg(B $BM$0l(B$B!&(B ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B (IHI$B4pHW8&(B) $BJ]8MDM(B $B>?(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B
SiC
CVD
QMS
4/23
16:31:54
210$B6bB0%U%j!<%0%i%U%'%s$N4pHD>eD>@\7A@.$H9=B$@)8f(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B>.:d(B $B>;51(B$B!&(B $B?785(B $B70(B$B!&(B ($B@5(B)$BLnED(B $BM%(B
graphene
patterned growth
metal-free
4/24
19:27:33
258Catalyst control for millimeter-tall single-walled carbon nanotubes with improved quality and areal density
($BElBg1!9)(B) $B!{(B($B3X(B)$BDD(B $BCiL@(B$B!&(B $B6b(B $BEl\F(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BLnED(B $BM%(B
single walled carbon nanotubes
chemical vapor deposition
coarsening of catalyst
4/25
14:00:09
270$BDc29$G$N%+!<%\%s%J%N%A%e!<%V$NcGL)9g@.(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BMe(B $B%L%j(B$B!&(B ($B@5(B)$BLnED(B $BM%(B
carbon nanotubes
chemical vapor deposition
low temperature growth
4/25
15:35:39
277$BD6NW3&N.BN$rMQ$$$?%9%H%m%s%A%&%`%k%F%K%&%`;@2=Kl@=Kl%a%+%K%:%`(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BE"(B $B7>J{(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B
Supercritical Fluid Deposition
Strontium ruthenium oxide (SRO)
Deposition Mechanism
4/25
16:17:41
283[$B>7BT9V1i(B]$BM-5!J,;R=$>~;@2=J*%J%N7k>=$N9g@.!$=8@Q$H5!G=2=(B
($BElKLBgB?858&(B) $B!{(B($B@5(B)$B9b8+(B $B@?0l(B
oxide nanocrystals
surface modification
synthesis, integration, and functionalization
4/25
16:57:14
288[$B>7BT9V1i(B]$B%J%N%5%$%:J*
($B9-Bg1!9)(B) $B!{(B($B@5(B)$BEgED(B $B3X(B
nanomaterial
gas phase deposition
surface formation
4/25
17:16:05
289$BD6NW3&(BCO2$B$rMQ$$$?(BTiO2$BGvKl@=KlMQA06nBN$NA*Br(B
($BElBg1!9)(B) $B!{(B($B3X(B)Zhao Yu$B!&(B ($B3X(B)Jung Kyubong$B!&(B ($B@5(B)Momose Takeshi$B!&(B ($B@5(B)Shimogaki Yukihiro
supercritical fluid deposition
thin film
titanium dioxide
4/25
17:16:22
293[$BE8K>9V1i(B]$BD6DcB;=}Hy:Y2C9)%W%m%;%9$N%J%N%W%m%;%C%7%s%0$X$NE83+(B
($BElKLBgN.BN8&(B) $B!{4(@n(B $B@?Fs(B
Damage-free
Neutral beam
Nano-material
4/25
17:33:25
400$B%W%i%:%^(BCVD$B$K$h$kJ.N.$rMQ$$$?(BSi$B@=Kl$HN.BN!&H?1~2r@O(B
($B4tIlBg1!9)(B) $B!{(B($B@5(B)$B@>ED(B $BE/(B$B!&(B $B2,K\(B $BD>$B!&(B $BCfB<(B $B$B!&(B $BEDCf(B $BD>Li(B$B!&(B $BLnB<(B $BM44u(B$B!&(B $BL6ED(B $B9@;J(B$B!&(B $B7*NS(B $B;VbCF,(B
CVD
$BGvKl(B
$B%7%j%3%s(B
4/26
15:12:29
419[$B>7BT9V1i(B]$BH>F3BN%W%i%:%^%W%m%;%9AuCV$N%7%_%e%l!<%7%g%s5;=Q(B
($BEl5~%(%l%/%H%m%s;3M|(B) $B!{EAJu(B $B0l
semiconductor manufacturing equipment
plasma processing
numerical simulation
4/26
16:50:07
484SiC-CVD$B%W%m%;%9$K$*$1$k5$AjH?1~7W;;(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BgULg(B $BM$0l(B$B!&(B ($B3X(B)$BJ!Eg(B $B9/G7(B$B!&(B (IHI$B4pHW8&(B) $BJ]8MDM(B $B>?(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B
SiC
CVD
calculation
4/26
20:26:36
498$BD6NW3&N.BN$rMQ$$$?%J%N%$%s%W%j%s%HMQ(BNi$B%b!<%k%I:n@=%W%m%;%9$N3+H/(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B@nED(B $B42?M(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B
Supercritical Fluid Deposition
Ni
nano-imprint
4/26
21:58:20
509$B%W%i%:%^(BCVD$BK!$K$h$k(BTiC$B7O9E2A(B
($B:eI\Bg1!9)(B) $B!{(B($B3X(B)$B@/2,(B $B90PR(B$B!&(B ($B:eI\Bg9)(B) $B>>K\(B $B:4OB;R(B$B!&(B ($B:eI\Bg1!9)(B) ($B@5(B)$B2,K\(B $B>0$B!&(B ($B@5(B)$BsnF#(B $B>f{J(B$B!&(B ($B@5(B)$B6aF#(B $BOBIW(B$B!&(B ($B%"%k%F%C%/%9(B) $BRy(B $BCRFW(B
film growth
chemical vapor deposition
titanium carbide
4/26
23:19:51
513$BD6NW3&Fs;@2=C:AG$rMQ$$$?(BTiO2$B!"(BBi2O3$BGvKl@.D9$NH?1~5!9=2r@O$HJ#9gKl2=(B
($B:eI\Bg1!9)(B) $B!{(B($B3X(B)$BCfED(B $B^+$B!&(B ($B3X(B)$B>.Eg(B $B>O8w(B$B!&(B ($B@5(B)$B2,K\(B $B>0$B!&(B ($B@5(B)$BsnF#(B $B>f{J(B$B!&(B ($B@5(B)$B6aF#(B $BOBIW(B$B!&(B ($BElKLBgB?858&(B) ($B@5(B)$B9b8+(B $B@?0l(B
supercritical carbon dioxide
thin film
deposition
4/27
00:16:10
553$B4pHD>eC1AX%+!<%\%s%J%N%A%e!<%V!"%_%j%a!<%?!<%9%1!<%k@.D9$NI,MW>r7o$H9=B$@)8f(B
($BElBg1!9)(B) $B!{(B($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BLnED(B $BM%(B
single-walled carbon nanotube
chemical vapor deposition
rapid growth
4/27
10:13:13
569Monolithic integration of multi-wavelength InGaN/GaN MQW LEDs via selective area MOVPE
($BElBg1!9)(B) $B!{(B($B3X(B)$B?@C+(B $BC#Li(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$B?y;3(B $B@5OB(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B
MOVPE
nitride semiconductor
LED
4/27
10:36:03
672$BHs5.6bB0;@2=J*EE6K$K$h$k6/M6EEBN%-%c%Q%7%?$N0BDj@-I>2A(B
($B:eI\Bg1!9)(B) $B!{(B($B3X(B)$B|bED(B $B`v;R(B$B!&(B $BDT(B $BE0(B$B!&(B ($B@5(B)$B2,K\(B $B>0$B!&(B ($B@5(B)$BsnF#(B $B>f{J(B$B!&(B ($B@5(B)$B6aF#(B $BOBIW(B$B!&(B $B5HB<(B $BIp(B$B!&(B $BF#B<(B $B5*J8(B$B!&(B ($B:eBg;:8&(B) $BHu8}(B $B9(Fs(B$B!&(B $BKLEg(B $B>4(B$B!&(B $BBgEg(B $BL@Gn(B
ferroelectric material
pulsed laser deposition
conductive oxide
4/27
14:12:19
682$BB@M[EECSMQ(BCIS$BGvKl:n@=$K$*$1$k(BSe$B2=%W%m%;%9$ND6NW3&N.BN$rMQ$$$?Dc292=(B
($BElKLBgB?858&(B) $B!{(B($B3X(B)$BLpCf(B $BH~5*(B$B!&(B ($B@5(B)$Bcx5o(B $B9bL@(B$B!&(B ($B@5(B)$BK\4V(B $B3J(B
CIGS Solar Cell
Conversion
Supercritical Fluid
4/27
14:32:01
759Cu-CVD$B%W%m%;%9$N=i4|3KH/@8!&@.D9$KBP$9$k2
($BElBg1!9)(B) $B!{(B($B3X(B)$BEh(B $B9IJ?(B$B!&(B ($B3X(B)$B@6?e(B $B=(<#(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B
Cu-CVD
Nucleation
ULSI
4/27
16:24:31
797$B%@%$%d%b%s%I%i%$%/%+!<%\%s@.KlMQ9b<~GH(BCH4$B%W%i%:%^$N%7%_%e%l!<%7%g%s(B
($B@iMU9)Bg(B) $B!{>.ED(B $B><5*(B$B!&(B ($BL>Bg9)(B) $B>e:d(B $BM5G7(B
diamond like carbon
plasma
simulation
4/27
17:21:08
807Si(111)$B>e(BInAs$B$NA*Br%X%F%m%(%T%?%-%7%c%k@.D9$K$*$1$k3&LLEE5$EAF3FC@-(B
($BElBg1!9)(B) $B!{EOn5(B $BfFBg(B$B!&(B ($BElBg@hC<8&(B) $BEOJU(B $B7rB@O:(B$B!&(B $BHn8e(B $B>$B!&(B ($BElBg1!9)(B) ($B@5(B)$B?y;3(B $B@5OB(B$B!&(B ($BElBg@hC<8&(B) $BCfLn(B $B5A><(B
MOVPE
selective-area
InAs/Si
4/27
17:31:59
825$B%"%k%3%-%7%I86NA$rMQ$$$?%j%A%&%`;@2=J*GvKl$NG.(BCVD
($BEl3$Bg(B) $B!{(B($B3X(B)$BFsIS(B $BM32B(B$B!&(B ($B3X(B)$B;3M|(B $B??9-(B$B!&(B ($B@5(B)$B=);3(B $BBY?-(B
CVD
Lithium tert-butoxide
Lithium Oxide
4/27
17:53:02
860$BJd=~%I!<%T%s%0$K$h$k(BInGaAs/GaAsP$BNL;R0f8MB@M[EECS$N%-%c%j%"2s<}8zN(8~>e(B
($BElBg1!9)(B) $B!{F#0f(B $B9(>;(B$B!&(B ($B@hC<8&(B) $B2&(B $B1>K2(B$B!&(B $BEOJU(B $B7rB@O:(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$B?y;3(B $B@5OB(B$B!&(B ($B@hC<8&(B) $BCfLn(B $B5A><(B
InGaAs / GaAsP quantum well solar cells
compensation doping
MOVPE
4/27
18:33:03
919$B9b=88wH/EEMQ%^%$%/%m=8@QD>Ns@\B3(BGaAs$BB@M[EECS$N;n:n(B
($BElBg9)(B) $B!{@%G=(B $BL$F`ET(B$B!&(B ($BElBg@hC<8&(B) $BEOJU(B $B7rB@O:(B$B!&(B ($BElBg9)(B) ($B@5(B)$B?y;3(B $B@5OB(B$B!&(B ($BElBg@hC<8&(B) $BCfLn(B $B5A><(B
micromachining
monolithic integrated solar cells
4/27
19:45:17
989[$BE8K>9V1i(B] $B2=3XE*GmN%$*$h$S(BCVD$B$K$h$k%0%i%U%'%s$N@.Kl$HB@M[EECSMQF)L@F3EEKl$X$N1~MQ$HE8K>(B
($BIY;NEE5!(B) $B!{F#0f(B $B7r;V(B
Graphene
Transparent Conductive Film
CVD
4/27
22:04:33

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(C) 2012 $B8x1W
Most recent update: 2012-09-29 21:47:01
For more information contact $B2=3X9)3X2qElKL;YIt(B $BBh(B44$B2s=)5(Bg2q(B $BLd$$9g$;78(B
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