$B9V1i(B $B;~9o(B | $B9V1i(B $BHV9f(B | $B9V1iBjL\!?H/I=$B%-!<%o!<%I(B | $BJ,N`(B $BHV9f(B | $B$BHV9f(B | |
$B%7%s%]%8%&%`(B <CVD$B!&%I%i%$%W%m%;%9(B $B!]9=B$!&5!G=@)8f$NH?1~9)3X!](B> |
(9:00$B!A(B10:00) ($B:BD9(B $B?9(B $B?-2p(B) |
9:00$B!A(B 9:20 | G201 | $B%[%C%H%o%$%d(BALD$B$K$h$k(BRu$BGvKl(B: $B@.D9FC@-!"AH@.!"$*$h$S9=B$FC@-(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BjO(B $B8w[?(B$B!&(B ($B@5(B)$B@6?e(B $B=(<#(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B | Atomic layer deposition Hot wire non-oxidization ambient
| S-37 | 386 |
9:20$B!A(B 9:40 | G202 | $BF3EE@-;@2=J*EE6K$rMQ$$$?6/M6EEBN%-%c%Q%7%?$N:n@=$HNt2=5!9=(B
($B:eI\Bg1!9)(B) $B!{(B($B3X(B)$B9bED(B $B`v;R(B$B!&(B ($B3X(B)$BE7Ln(B $BBY2O(B$B!&(B ($B@5(B)$B2,K\(B $B>0$B!&(B ($B@5(B)$BsnF#(B $B>f{J(B$B!&(B ($B@5(B)$B6aF#(B $BOBIW(B$B!&(B $B5HB<(B $BIp(B$B!&(B $BF#B<(B $B5*J8(B$B!&(B ($B:eBg;:8&(B) $BHu8}(B $B9(Fs(B$B!&(B $BKLEg(B $B>4(B | ferroelectric capacitor conductive oxide degradation mechanism
| S-37 | 816 |
9:40$B!A(B 10:00 | G203 | $B>o29%*%>%s(BCVD$BK!$K$h$k%j%A%&%`%$%*%sEECSMQ(BSiOC$BIi6K$N:n@=(B
($B:eI\Bg1!9)(B) $B!{(B($B3X(B)$BDTK\(B $BM*0l(B$B!&(B ($B@5(B)$B2,K\(B $B>0$B!&(B ($B@5(B)$BsnF#(B $B>fLw(B$B!&(B ($B@5(B)$B6aF#(B $BOBIW(B$B!&(B ($B%j%0%J%$%H(B) $B0f=P(B $BM&(B$B!&(B $B@>@n(B $B>;?.(B$B!&(B $BBg@>(B $B7DOB(B | Li-ion batteries SiOC CVD
| S-37 | 907 |
(10:00$B!A(B11:00) ($B:BD9(B $BsnF#(B $B>fLw(B) |
10:00$B!A(B 10:20 | G204 | $B%[%m!<%+%=!<%IJ|EE$K$h$k%+!<%\%s%J%N%U%!%$%P!<$NL5?(G^9g@.(B
($BEl9)Bg1!M}9)(B) $B!{(B($B@5(B)$B?9(B $B?-2p(B$B!&(B $BEDCf(B $B1MCR(B$B!&(B ($B@5(B)$BNkLZ(B $B@5><(B | Plasma-enhanced CVD Carbon Nanofiber Non-catalytic synthesis
| S-37 | 999 |
10:20$B!A(B 10:40 | G205 | $B%W%i%:%^(BCVD$B$K$h$k%7%j%3%s9bB.@=Kl$N6Q0l2=(B
($B4tIlBg(B) $B!{(B($B@5(B)$B@>ED(B $BE/(B$B!&(B $B;3K\(B $BfFB@(B$B!&(B $B>>1J(B $BBn??(B$B!&(B ($B@5(B)$BL6ED(B $B9@;J(B$B!&(B $B7*NS(B $B;VF,bC(B | $B%W%i%:%^(BCVD $B9bB.@=Kl(B $B%7%j%3%s(B
| S-37 | 395 |
10:40$B!A(B 11:00 | G206 | $B%W%i%:%^(BCVD$BK!$G:n@=$7$?%7%j%+Kl9=B$$X$N%-%c%j%"%,%9$N1F6A(B
($B5~Bg9)(B) $B!{(B($B3X(B)$BC]ED(B $B0M2C(B$B!&(B ($B3X(B)$B=P8}(B $BMx$B!&(B ($B@5(B)$B2O@%(B $B85L@(B | Plasma CVD HMDSO silica
| S-37 | 754 |
(11:00$B!A(B12:00) ($B:BD9(B $B;01:(B $BK-(B) |
11:00$B!A(B 11:20 | G207 | $B5$8G86NA(BPECVD$B$K$h$k%J%NJ#9gKl$N9g@.@)8f$H8w?(G^3h@-I>2A(B
($B9-Bg1!9)(B) $B!{(B($B3X(B)$BED8}(B $BCRLi(B$B!&(B ($B@5(B)$B5WJ](B $BM%(B$B!&(B ($B@5(B)$BEgED(B $B3X(B | thin film nanoparticle composite material
| S-37 | 345 |
11:20$B!A(B 11:40 | G208 | 172nmVUV$B$K$h$k%A%?%sI=LL$N2~
($B4tIlBg1!(B) $B!{(B($B3X(B)$B;38}(B $B63J?(B$B!&(B ($B@5(B)$B?@86(B $B?.;V(B | VUV Titan MPC polymer
| S-37 | 290 |
11:40$B!A(B 12:00 | G209 | ($B9V1iCf;_(B)
|
| 100 | 150 |
(13:00$B!A(B14:00) ($B:BD9(B $B;01:(B $BK-(B) |
13:00$B!A(B 13:40 | G213 | [$BE8K>9V1i(B] $B%X%F%m@\9g%G%P%$%9$H$7$F$N(BCIS$B7OGvKlB@M[EECS5;=Q$N8=>u$H>-MhE8K>(B
($B>!L&(B | CVD CIS thin film solar cell Heterojunction device
| S-37 | 147 |
13:40$B!A(B 14:00 | G215 | $BD6NW3&N.BNH?1~$rMQ$$$F:n@=$7$?B@M[EECSMQ(BCu2ZnSn(S,Se)4$BGvKl$N9=B$FC@-I>2A(B
($BElKLBgB?858&(B) $B!{(B($B3X(B)$BCf0B(B $BM4B@(B$B!&(B ($B@5(B)$B2,(B $B?-?M(B$B!&(B ($B@5(B)$Bcx5o(B $B9bL@(B$B!&(B ($B@5(B)$BK\4V(B $B3J(B | supercritical fluid solar cell CZTS thin film
| S-37 | 161 |
(14:00$B!A(B15:00) ($B:BD9(B $B2O@%(B $B85L@(B) |
14:00$B!A(B 14:20 | G216 | $BD6NW3&N.BNBO@QK!$rMQ$$$?NLO@AH@.(BBi4Ti3O12$B@=Kl(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B%A%g%&(B $B%f%&(B$B!&(B ($B3X(B)$BE"(B $B7>J{(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B | Bi4Ti3O12 supercritical fluid deposition stoichiometric
| S-37 | 291 |
14:20$B!A(B 14:40 | G217 | PLD$BK!$K$h$k6/M6EEBNGvKl$NG[8~@-@)8f$HEE5$FC@-(B
($B:eI\Bg1!9)(B) $B!{(B($B3X(B)$BE7Ln(B $BBY2O(B$B!&(B ($B3X(B)$B9bED(B $B`v;R(B$B!&(B ($B@5(B)$B2,K\(B $B>0$B!&(B ($B@5(B)$BsnF#(B $B>fLw(B$B!&(B ($B@5(B)$B6aF#(B $BOBIW(B$B!&(B $B5HB<(B $BIp(B$B!&(B $BF#B<(B $B5*J8(B$B!&(B ($B:eBg;:8&(B) $BHu8}(B $B9(Fs(B$B!&(B $BKLEg(B $B>4(B | ferroelectric material pulsed laser deposition orientation control
| S-37 | 971 |
14:40$B!A(B 15:00 | G218 | [$B>7BT9V1i(B] $BG.(BCVD$BK!$rMQ$$$??eJ?4I7?H?1~4oFb$N(BTiN $BGvKl@8@.2aDx$K$*$1$kG.J*
($B;38}Bg9)(B) $B!{(B($B@5(B)$BEDG7>e(B $B7r0lO:(B$B!&(B ($B1'It6=;:(B) $B1)D;(B $BM4Lm(B$B!&(B ($B;38}Bg9)(B) ($B@5(B)$B@>B<(B $BN6IW(B | CVD Titanium nitride Heat and mass transfer
| S-37 | 148 |
(15:00$B!A(B16:00) ($B:BD9(B $BLnED(B $BM%(B) |
15:00$B!A(B 15:20 | G219 | $B%b%N%a%A%k%H%j%/%m%m%7%i%s$rMQ$$$?(BSiC-CVD$B%W%m%;%9$K$*$1$k@=Kl\:Y2r@O(B(2)
($BElBg1!9)(B) $B!{(B($B3X(B)$BEh(B $B9IJ?(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BgULg(B $BM$0l(B$B!&(B ($B3X(B)$B?y1:(B $B=(=S(B$B!&(B (IHI$B4pHW8&(B) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B | CVD SiC methyltrichlorosilane
| S-37 | 387 |
15:20$B!A(B 15:40 | G220 | SiC-CVD$B$K$*$1$kM-5!%7%i%s86NA$NHf3S8!F$(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B?y1:(B $B=(=S(B$B!&(B ($B3X(B)$BEh(B $B9IJ?(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BgULg(B $BM$0l(B$B!&(B (IHI$B4pHW8&(B) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B | SiC CVD Chlorosilane
| S-37 | 268 |
15:40$B!A(B 16:00 | G221 | $B%b%N%a%A%k%H%j%/%m%m%7%i%s$r86NA$H$7$?(BSiC-CVD$B%W%m%;%9$K$*$1$k05NO0MB8@-$r(B $B9MN8$7$?AGH?1~5!9=$N9=C[(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BgULg(B $BM$0l(B$B!&(B ($B3X(B)$BEh(B $B9[J?(B$B!&(B ($B3X(B)$B?y1:(B $B=(=S(B$B!&(B ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B $B1[(B $B8wCK(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B | SiC CVD reaction mechanism
| S-37 | 312 |
(16:00$B!A(B17:00) ($B:BD9(B $B@>ED(B $BE/(B) |
16:00$B!A(B 16:20 | G222 | $B%b%N%a%A%k%H%j%/%m%m%7%i%s$r86NA$H$7$?(BSiC-CVI$B%W%m%;%9:GE,2=$N$?$a$NH?1~O'%9%1!<%k%7%_%e%l!<%7%g%s(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BgULg(B $BM$0l(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B (IHI$B4pHW8&(B) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B3X(B)$BEh(B $B9IJ?(B$B!&(B ($B3X(B)$B?y1:(B $B=(=S(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B | CVI SiC Methyltrichlorosilane
| S-37 | 285 |
16:20$B!A(B 17:00 | G223 | [$BE8K>9V1i(B] $B2DMO2=%+!<%\%s%J%N%A%e!<%V$rMQ$$$?@hC<%J%N:`NA3+H/(B
($B6eBg1!9)(B) $B!{CfEh(B $BD>IR(B | CVD Advanced nanomaterial Carbon nanotube
| S-37 | 149 |