SCEJ

$B2=3X9)3X2q(B $BBh(B48$B2s=)5(Bg2q(B ($BFAEg(B 2016)

$B9V1i?=$79~$_0lMw!J%7%s%]%8%&%`!&9V1iJ,N`JL!K(B

ST) $BIt2q2#CG7?%7%s%]%8%&%`(B

ST-17. $B!ZIt2q2#CG7?%7%s%]%8%&%`![(BCVD$B!&%I%i%$%W%m%;%9!!!]9=B$!&5!G=@)8f$NH?1~9)3X!](B

$B%*!<%,%J%$%6!<(B: $B?y;3(B $B@5OB!JEl5~Bg3X!K!&EgED!!3X!J9-EgBg3X!K!&@n>e(B $B2m?M!JEl5~%(%l%/%H%m%s!K(B

CVD$B$r$O$8$a$H$9$k%I%i%$%W%m%;%9$O!$%(%l%/%H%m%K%/%9!$B@M[EECS!$(BMEMS$B!$5!G=@-%3!<%F%#%s%0Ey$NJ,Ln$K$*$$$F!$4p445;=Q$H$J$C$F$$$k!#K\%7%s%]%8%&%`$G$O!$(BCVD$B$HN`1o5;=Q$rMxMQ$7$?GvKl7A@.!$HyN3;R9g@.!$Hy:Y2C9)$K$*$1$k@=IJ$N9=B$$H5!G=$r@)8f$9$k$?$a$K!$H?1~%a%+%K%:%`$NM}2r$K$h$kO@M}E*$J:GE,2=$rL\;X$75DO@$9$k$3$H$rL\E*$H$7$^$9!#$J$*!$M%=($JH/I=$r$5$l$?)Ne>^$rB#Dh$7$^$9!#(B

$B:G=*99?7F|;~!'(B2016-11-29 11:54:01

$B$3$NJ,N`$G$h$/;H$o$l(B
$B$F$$$k%-!<%o!<%I(B		$B%-!<%o!<%I(B$B
CVD5$B7o(B*
carbon nanotube3$B7o(B*
SiC3$B7o(B*
Methyltrichlorosilane2$B7o(B
supercritical fluid deposition2$B7o(B
TiO21$B7o(B

$B$BHV9f(B$B9V1iBjL\!?H/I=$B%-!<%o!<%I(B$BH/I=7A<0(B
20$B%I%G%+%s(B/$B%(%?%N!<%k:.9gG3NA$rMQ$$$?%G%#!<%<%k%(%s%8%s$K$*$1$k%+!<%\%s%J%N%A%e!<%V$N9g@.(B
($BEl9)Bg1!M}9)(B) ($B3X(B)$B!{NkLZ(B $B=S2p(B$B!&(B ($B@5(B)$B?9(B $B?-2p(B		carbon nanotube
diesel engine
flame synthesis
O
35[$BE8K>9V1i(B] III-V$BB2H>F3BNNL;R%I%C%H@.D9$N$=$N>l4Q;!$H@.D9%a%+%K%:%`(B
($B0$Fn9b@l(B) $BDMK\(B $B;KO:(B		MBE
STM
in-situ
O
176[$BE8K>9V1i(B] Li-ion$BEECS$N8=>u$H2]Bj!"@56K:`$K5a$a$i$l$kFC@-(B
($BF|0!2=3X(B) $B=;M'(B $B0R;K(B		Li-ion
Large format battery
Positive Electrode Materials
O
263[$BM%=(O@J8>^(B] $B%(%"%m%>%k%J%NN3;RBO@Q$K$h$C$F:n@=$7$?B?9&2$BGvKl$N7ABV$H6u7dN($K>F@.$,M?$($k1F6A(B
($B9-Bg1!9)(B) ($B@5(B)$B!{5WJ](B $BM%(B$B!&(B $Bh_C+(B $BM&$B!&(B ($B@5(B)$BEgED(B $B3X(B		Phase transformation
Plasma-enhanced CVD
Sintering
O
264$B5$8G86NA(BPECVD$BK!$K$h$k9b%"%9%Z%/%HHfN3;RJqKdKl$N9g@.(B
($B9-Bg1!9)(B) ($B3X(B)$B!{=E>>(B $BM45*(B$B!&(B ($B@5(B)$B5WJ](B $BM%(B$B!&(B ($B@5(B)$BEgED(B $B3X(B		Nanocomposite film
Carbon nanotube
Abnormal growth
O
267Effect of heat treatments on the photocatalytic activity of Ag-TiO2 nanocomposite films prepared by a one-step gas-phase deposition process
($B9-Bg1!9)(B) ($B@5(B)$B!{(BKusdianto K.$B!&(B Jiang Dianping$B!&(B ($B@5(B)Kubo Masaru$B!&(B ($B@5(B)Shimada Manabu		PECVD
Annealing
Crystal-phase
O
303C5$B!A(BC7$BC:2=?eAG$+$i$NC:AG(BCVD$B$K$*$1$k6bB04pHD$X$N?;C:B.EY$N2r@O(B
($B5~Bg9)(B) ($B@5(B)$B!{2O@%(B $B85L@(B$B!&(B ($B3X(B)$BGO>l(B $BfFJ?(B		CVD
Carbon
Solid-phase diffusion
O
395[$B>7BT9V1i(B] $BJ,;RdAC:AG$N(Bin silico$B9g@.$K$h$k5$BNJ,N%FC@-@)8f$N8!F$(B
($B5~Bg9)(B) ($B@5(B)$B!{EDCf(B $B=($B!&(B $BB-N)(B $BJ?(B$B!&(B $B;3:,(B $B9/G7(B$B!&(B ($B@5(B)$B5\86(B $BL-(B		CVD
Molecular simulation
Air separation
O
412[$B>7BT9V1i(B] $BJ#;(7A>u$X$N9b@-G=?e>x5$ITF)2a$r
($B%"%k%P%C%/D6:`8&(B) $B!{:B4V(B $B=(><(B$B!&(B $BK\ED(B $BOB9-(B		atomic layer despoition
gas barrier film
water vapor transmission rate
O
429$B:FMxMQ%5%U%!%$%"4pHD>e$X$N(BCu$B$N5^B.%(%T%?%-%7!<$H(BCVD$B$K$h$k%0%i%U%'%s$N@:L)9g@.(B
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{1J0f(B $B4>Li(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		graphene
chemical vapor deposition
epitaxial growth
O
533$B%W%i%:%^%8%'%C%H(BCVD$BK!$K$h$k%7%j%3%s%J%NN3;R6E=8BN$N9bB.@=Kl$K4X$9$k8&5f(B
($B4tIlBg1!9)(B) $B1J0f(B $BM4Je(B$B!&(B $B:Y@n(B $B42?M(B$B!&(B ($B4tIlBg9)(B) ($B@5(B)$B!{@>ED(B $BE/(B$B!&(B $B>.5\;3(B $B@5<#(B		CVD
plasma
nanoparticle
O
601[$B>7BT9V1i(B] $B%_%9%H$rMQ$$$?Bg5$052<$GBgLL@Q$KOK$j9bIJ
($B9bCN9)Bg(B) $B!{@n86B<(B $BIR9,(B$B!&(B Giang T. Dang$B!&(B $B?\OB(B $BM4B@(B$B!&(B $B:4F#(B $BfFB@(B$B!&(B $B>>yu(B $B=SM4(B		mist CVD
Leidenfrost effect
metal oxide functional thin film
O
626$BG.(BCVD$BK!$K$h$kN)J}>=Cb2=%[%&AGKl9g@.$K8~$1$?8!F$(B
($BElBg9)(B) ($B3X(B)$B!{:4F#(B $B9($B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B5~%;%i(B) $BC+^<(B $B1I?N(B$B!&(B ($BElBg9)(B) ($B@5(B)$BAz3@(B $B9,9@(B		CVD
boron nitride
coating
O
634$B2=3XE*I=LL=hM}$r;\$7$?(BWC-Co$B4pHD>e$X$N(BTiC$B9E2A(B
($B:eI\Bg1!9)(B) ($B3X(B)$B!{EDCf(B $B@i?R(B$B!&(B ($B3X(B)$BNkLZ(B $BAo0lO:(B$B!&(B ($B@5(B)$B2,K\(B $B>0$B!&(B ($B@5(B)$BsnF#(B $B>fLw(B$B!&(B ($B:eBg;:8&(B) $BHu8}(B $B9(Fs(B$B!&(B $BKLEg(B $B>4(B		adhesion strength
TiC hard coating
Cemented carbide
O
641$BD62;GHL82=%W%m%;%9$K$h$k%Z%m%V%9%+%$%HB@M[EECS$N:n@=(B
($BElBg1!9)(B) ($B3X(B)$B!{>.Fn(B $BM:5*(B$B!&(B ($BElBg4D0B%;(B/$BElBg1!9)(B) ($B@5(B)$BDT(B $B2B;R(B		perovskite solar cell
TiO2
spray-deposition
O
678Ultra-porous carbon electrode fabricated from supercritical drying and application for lithium-air battery
($BEl9)Bg1!M}9)(B) ($B3X(B)$B!{(BKunanusont Nattanai$B!&(B ($BEl9)BgJ*		porous carbon electrode
supercritical drying
lithium-air battery
O
718SiC-CVI$B%W%m%;%9$N=i4|@.D9$KBP$9$k2
($BElBg1!9)(B) ($B3X(B)$B!{Eh(B $B9IJ?(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BgULg(B $BM$0l(B$B!&(B (IHI$B4pHW8&(B) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B		CVD
SiC
methyltrichlorosilane
O
769$BD6NW3&N.BN$rMQ$$$?F
($BElBg1!9)(B) ($B@5(B)$B!{I4@%(B $B7r(B$B!&(B $B2OB<(B $BMNM$(B$B!&(B ($B@5(B)$B2<;3(B $BM52p(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B		Supercritical fluid deposition
Cu
underlayer selectivity
O
868$B%b%N%a%A%k%H%j%/%m%m%7%i%s$rMQ$$$?(BSiC-CVD$B%W%m%;%9:GE,2=$N$?$a$NAm3gH?1~%b%G%k9=C[(B (3)
($BElBg1!9)(B) ($B3X(B)$B!{gULg(B $BM$0l(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BEh(B $B9IJ?(B$B!&(B ($B3X(B)$BCf(B $BCRL@(B$B!&(B (IHI$B4pHW8&(B) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B		SiC
Methyltrichlorosilane
Modelization
O
903$B%9%Q%C%?$K$h$k(BAl$B%I!<%W(BZnO$BEE6K$rM-$9$k6/M6EEBN%-%c%Q%7%?$N:n@=$HI>2A(B
($B:eI\Bg1!9)(B) ($B3X(B)$B!{9bED(B $B`v;R(B$B!&(B ($B3X(B)$B6LLn(B $BM|2C(B$B!&(B ($B@5(B)$B2,K\(B $B>0$B!&(B ($B@5(B)$BsnF#(B $B>fLw(B$B!&(B $B5HB<(B $BIp(B$B!&(B $BF#B<(B $B5*J8(B$B!&(B ($B:eBg;:8&(B) $BHu8}(B $B9(Fs(B$B!&(B $BKLEg(B $B>4(B		ferroelectric capacitor
Al-doped ZnO
sputtering
O
912Si-Cu/$B%+!<%\%s%J%N%A%e!<%V(B/Cu$BJ#9gEE6K$N5^B.>xCe$H%j%A%&%`Fs
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{@D0f(B $B;|4n(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		lithium secondary battery
physical vapor deposition
carbon nanotube
O
924$BD6NW3&N.BN$rMQ$$$?(BBi4Ti3O12$B@=Kl$K$*$1$kH?1~5!9=2r@O(B
($BElBg1!9)(B) ($B3X(B)$B!{%A%g%&(B $B%f%&(B$B!&(B ($B@5(B)$B2<;3(B $BM52p(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B		supercritical fluid deposition
reaction mechanism
Bi4Ti3O12
O
972$B6Q0l4^?;$rL\;X$7$?(BSiC-CVI$B%W%m%;%9$X$N(BHCl$B%,%9E:2C8z2L(B
($BElBg1!9)(B) ($B3X(B)$B!{Cf(B $BCRL@(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BEh(B $B9IJ?(B$B!&(B ($B3X(B)$BgULg(B $BM$0l(B$B!&(B (IHI$B4pHW8&(B) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B		SiC
CVI
O
1002$B9b=cEY!&9bG[8~@-(BCo$BGvKl7A@.$rL\;X$7$?%[%C%H%o%$%d(BALD$B%W%m%;%9$N:GE,2=(B
($BElBg1!9)(B) ($B3X(B)$B!{Cf(B $BCRL@(B$B!&(B ($B3X(B)$BEh(B $B9IJ?(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B		Hot-wire-assisted ALD
Cobalt
O
$B9V1i?=$79~$_0lMw(B($B%7%s%]%8%&%`HV9f!&9V1iJ,N`HV9fJL(B)
$B
$B2=3X9)3X2q(B $BBh(B48$B2s=)5(Bg2q(B ($BFAEg(B 2016)
(C) 2016 $B8x1W
Most recent update: 2016-11-29 11:54:01
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