
Title (J) field includes “分子動力学計算”; 1 program is found.
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| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 2 | EE216 | Molecular dynamics simulations of precursor adsorption in the Co-ALD process using neural network potentials | Atomic layer deposition Neural network potential Growth per cycle | ST-26 | 347 |
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SCEJ 56th Autumn Meeting (Tokyo, 2025)
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