SCEJ

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5-h. CVD$B!&%I%i%$%W%m%;%9(B

$B:G=*99?7F|;~!'(B2014-03-05 16:19:01

$B$3$NJ,N`$G$h$/;H$o$l(B
$B$F$$$k%-!<%o!<%I(B		$B%-!<%o!<%I(B$B
carbon nanotubes7$B7o(B**
graphene4$B7o(B*
CVD4$B7o(B*
chemical vapor deposition2$B7o(B
SiC2$B7o(B
crystal growth2$B7o(B
aerosol catalysts2$B7o(B
Conformality1$B7o(B

$B$BHV9f(B$B9V1iBjL\!?H/I=$B%-!<%o!<%I(B$B
74$B%3%m%$%IMO1U$+$i$N%(%"%m%>%k?(G^$NAO@.$H%+!<%\%s%J%N%A%e!<%V$N5$Aj9g@.(B
($BAaBg@h?JM}9)(B) $B!{(B($B3X(B)$BBg>l(B $B0lE/(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B$B!&(B ($BJ]EZC+2=3X(B) $BDMED(B $B9b9T(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BLnED(B $BM%(B		carbon nanotubes
aerosol catalysts
chemical vapor deposition
12/17
17:41:35
109$B?(G^1vMO1U$+$i$N%(%"%m%>%k?(G^$NAO@.$H%+!<%\%s%J%N%A%e!<%V$N5$Aj9g@.(B
($BAaBg@h?JM}9)(B) $B!{(B($B3X(B)$B?yLn(B $BM5N<(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B$B!&(B ($BJ]EZC+2=3X(B) $BDMED(B $B9b9T(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BLnED(B $BM%(B		carbon nanotubes
aerosol catalysts
chemical vapor deposition
12/19
19:20:03
110$B%"!<%/J|EE$rMQ$$$?%+!<%\%s%J%N%A%e!<%V$NO"B39g@.(B
($BAaBg@h?JM}9)(B) $B!{(B($B3X(B)$BCfB<(B $BE55A(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		carbon nanotubes
arc discharge
continuous process
12/19
20:01:06
130$B%"%;%A%l%s%V%i%C%/N3;R>e$G$N%+!<%\%s%J%N%A%e!<%V9g@.$K$h$kJ#9g2=$H!"(B1$BIC%9%1!<%k$G$NH?1~@)8f(B
($BAaBg@h?JM}9)(B) $B!{(B($B3X(B)$B7*C+(B $B6)L@(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($BEE5$2=3X9)6H(B) $B86ED(B $BM4:n(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BLnED(B $BM%(B		carbon nanotubes
carbon nanoparticles
hybridization
12/20
15:24:23
157$B4^?;C4;}?(G^$rMQ$$$?%+!<%\%s%J%N%A%e!<%V$NN.F0AX9g@.(B
($BAaBg@h?JM}9)(B) $B!{(B($B3X(B)$B@nC<(B $B9'M4(B$B!&(B ($BElBg1!9)(B) ($B3X(B)$BDD(B $BCiL@(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B $B6b(B $BEl\F(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		Carbon Nanotubes
Fluidized Bed
Supported Catalysts
12/23
11:01:47
162$B%(%C%A%s%0@O=PK!$K$h$k%0%i%U%'%s4pHD>eD>@\7A@.$NB.EY2aDx$NM}2r$HKl
($BElBg1!9)(B) $B!{(B($B3X(B)$B>.:d(B $B>;51(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		graphene
rate process
crystal growth
12/23
14:34:59
163$B%(%C%A%s%0@O=PK!$K$h$k(BCo-C$B:.9gKl$+$i$NGvAX%0%i%U%'%s$NM6EEBN4pHD>eD>@\7A@.(B
($BAaBg@h?JM}9)(B) $B!{(B($B3X(B)$B4_ED(B $BM-M}(B$B!&(B ($BElBg1!9)(B) ($B3X(B)$B>.:d(B $B>;51(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		graphene
crystal growth
dry-etching
12/23
14:44:28
182Fluidized Bed CVD of Carbon Nanotubes of Smaller Diameter Using an Internal Heat-Exchange Reactor
($BElBg1!9)(B) $B!{(B($B3X(B)$BDD(B $BCiL@(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B $B6b(B $BEl\F(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		Carbon Nanotubes
Fluidized Bed CVD
Catalyst Nanoparticles
12/24
12:30:51
239$BB@M[EECSMQ2=9gJ*H>F3BNGvKl:n@=$K$*$1$kD6NW3&(BEtOH$BCf$G$NN22=!&%;%l%s2=H?1~5sF0$N2r@O(B
($BElKLBgB?858&(B) $B!{(B($B3X(B)$BCf0B(B $BM4B@(B$B!&(B ($B@5(B)$Bcx5o(B $B9bL@(B$B!&(B ($B@5(B)$BK\4V(B $B3J(B		supercritical fluid
solar cell
thin film
12/25
09:31:59
267$B9bF3EE@-!&9bEEN.BQ@-$rM-$9F<(B-$BC:AGJ#9g:`NA$N3+H/(B
($BAaBg@h?JM}9)(B) $B!{(B($B3X(B)$B5H86(B $BM*(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($BAaBgM}9)(B) ($B@5(B)$BLnED(B $BM%(B		Nano-carbon
Metal-Carbon hybrid
Current carrying capacity
12/25
14:16:40
272Si$B@.KlH?1~%b%G%k$NDs0F$H=D7?2sE><0(BCVD$BAuCVFb$N?tCM2r@O(B
($BK-EDCf8&(B) $B!{(B($B@5(B)$BKRLn(B $BAm0lO:(B$B!&(B ($BK!(B)$B0p3@(B $B>;1Q(B$B!&(B ($BK!(B)$BCfEh(B $B7r$B!&(B ($B@5(B)$B>._7(B $BN490(B$B!&(B ($BK!(B)$BKYG7Fb(B $B@.L@(B		Chemical reaction model
CVD
CFD
12/25
14:29:38
296$BC1AX%+!<%\%s%J%N%A%e!<%V$N2P1j9g@.$H!"29EY>l!&H?1~@)8f(B
($BAaBg@h?JM}9)(B) $B!{(B($B3X(B)$B;38}(B $BKc0a(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		single-wall carbon nanotubes
flame synthesis
Fe nanoparticles
12/25
17:41:17
314$B!ZJ,2J2q>)Ne>^![(BCVD$BH?1~J,2J2q>)Ne>^^<0(B
($B4tIlBg1!9)(B) $B!{(B($B@5(B)$B@>ED(B $BE/(B$B!&(B ($BElBg1!9)(B) ($B3X(B)$BM{(B $B=EZ_(B$B!&(B ($B3X(B)$BDD(B $BCiL@(B		CVD reaction section
ceremony
young researcher award
12/25
20:38:05
396$B%Q%k%9(BDC$B%W%i%:%^(BCVD$BK!$K$h$k%@%$%d%b%s%I@.D9B.EYHf(B([100]/[111])$B$N@)8f(B
($B:eI\Bg1!9)(B) $B!{(B($B3X(B)$BCfED(B $B^+$B!&(B ($B@5(B)$B2,K\(B $B>0$B!&(B ($B@5(B)$BsnF#(B $B>f{J(B$B!&(B ($B@5(B)$B6aF#(B $BOBIW(B		pulsed DC plasma-assisted chemical vapor deposition
diamond
growth rate ratio
12/26
15:50:01
687$B%F%H%i%a%A%k%7%i%s$r86NA$H$7$?(BSiC-CVD$B%W%m%;%9$N%^%k%A%9%1!<%k2r@O(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B?y1:(B $B=(=S(B$B!&(B (IHI$B4pHW8&(B) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B3X(B)$BEh(B $B9IJ?(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BgULg(B $BM$0l(B$B!&(B (IHI$B4pHW8&(B) $BJ]8MDM(B $B>?(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B		SiC
CVD
tetramethylsilane
12/27
16:50:05
698$B6bB0(B-$BC:AG:.9gKl$+$i$N%0%i%U%'%s$N8GAj@.D9(B
($BAaBg@h?JM}9)(B) $B!{(B($B3X(B)$B;38}(B $B9RB@O:(B$B!&(B ($BElBg1!9)(B) ($B3X(B)$B>.:d(B $B>;51(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		graphene
solid-phase growth
thin films
12/27
17:06:51
732$B%[%C%H%o%$%d(BALD$B$K$h$k(BNi$BGvKl7A@.$NKd$a9~$_@-8~>e$K$`$1$?(BNH2$B%i%8%+%k$NI=LLH?1~2r@O(B
($BElBg1!9)(B) ($B3X(B)$BjO(B $B8w[?(B$B!&(B ($B@5(B)$B@6?e(B $B=(<#(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B $B!{(B($B@5(B)$BAz3@(B $B9,9@(B		Atomic layer deposition
Hot wire
Conformality
12/27
18:01:18
735ALD$BK!$rMQ$$$?LJA!0]>e$X$N(BAl2O3$B%3%s%U%)!<%^%k%3!<%F%#%s%0$K$h$kI=LLAB?e2=(B
($BElKLBg(BWPI$B:`NA5!9=(B) $B!{(B($B@5(B)$BKL[j(B $BBg2p(B$B!&(B ($B@5(B)$B0$?,(B $B2mJ8(B		ALD
Conformal coating
Woven cotton fabrics
12/27
18:06:02
761$B%b%N%a%A%k%H%j%/%m%m%7%i%s$rMQ$$$?(BSiC-CVD$B%W%m%;%9$K$*$1$k@=Kl\:Y2r@O(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BEh(B $B9IJ?(B$B!&(B (IHI$B4pHW8&(B) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BgULg(B $BM$0l(B$B!&(B ($B3X(B)$B?y1:(B $B=(=S(B$B!&(B (IHI$B4pHW8&(B) $BJ]8MDM(B $B>?(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B		CVD
SiC
methyltrichlorosilane
12/27
19:09:24
780$B%W%i%:%^(BCVD$B$K$h$k%+!<%\%s%J%N%&%)!<%k$NL5?(G^9bB.9g@.$HF)L@F3EEGvKl$X$N1~MQ8!F$(B
($BEl9)Bg1!M}9)(B) $B!{(B($B3X(B)$B;P@n(B $BMNJ?(B$B!&(B ($B@5(B)$B?9(B $B?-2p(B$B!&(B ($B@5(B)$BNkLZ(B $B@5><(B		graphene
plasma
CVD
12/27
19:53:56
808$B8GBN;@2=J*7?EE5$J,2r%;%k$HM6EEBN%P%j%"J|EE$K$h$kFs;@2=C:AGJ,2r$H%+!<%\%s%J%N%A%e!<%V9g@.(B
($BEl9)Bg1!M}9)(B) $B!{(B($B@5(B)$B?9(B $B?-2p(B$B!&(B $B>>1:(B $BD>5*(B$B!&(B Lin Lin Tun$B!&(B ($B@5(B)$BNkLZ(B $B@5><(B		carbon dioxide
carbon nanotubes
solid oxide electrolyser cell
12/27
21:36:56
$B9V1i?=$79~$_0lMw(B($B%7%s%]%8%&%`HV9f!&9V1iJ,N`HV9fJL(B)
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$B2=3X9)3X2q(B $BBh(B79$BG/2q(B
(C) 2014 $B8x1W
Most recent update: 2014-03-05 16:19:01
For more information contact $B2=3X9)3X2q(B $BBh(B79$BG/2q(B $BLd$$9g$;78(B
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