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SCEJ 80th Annual Meeting (Tokyo, 2015)

List of received applications (By topics code)


5) Chemical reaction engineering

5-h. CVD & dry processes

Most recent update: 2015-07-10 15:24:01

The keywords that frequently used
in this toopics code.
KeywordsNumber
CVD6**
SiC3*
diamond2
Chemical vapor deposition2
Silicon2
Lithium secondary battery2
Evaporation2
Zinc oxide2
graphene2
Thin film2
electron beam evaporated1

ACKN
No.
Title/Author(s)KeywordsStyle
175Direct formation and structure control of few-layer graphene on dielectric substrates by etching-precipitation method
(Waseda U.) *Akiba Sachie, (U. Tokyo) Kosaka Masaki, (Waseda U.) Hasegawa Kei, Noda Suguru
graphene
crystal growth
dry-etching
P
178Preparation of metal oxide layer on carbon nanotubes by in-flight coating
(Hiroshima U.) *Kubo Masaru, Kadomura Hirofumi, Shimada Manabu
Plasma enhanced chemical vapor deposition
Composite materials
Film formation
O
302Synthesis of carbon nanotubes on powders by fluidized bed and their total collection by gas flow
(Waseda U.) *Hachiya Soichiro, Kawabata Kosuke, Chen Zhongming, Hasegawa Kei, Osawa Toshio, Noda Suguru
carbon nanotubes
fluidized bed
chemical vapor deposition
P
303Effects of hydrogen addition on silica film growth by plasma CVD
(Kyoto U.) *Takeda E., Deguchi T., Kawase M.
Plasma CVD
silica
hydrogen addition
O
305Doping and de-doping processes of various carbon nanomaterials with Br2 for their resistivity control
(Waseda U.) *Takabatake Mami, Hasegawa Kei, Osawa Toshio, Noda Suguru
graphene
carbon nanotube
doping
P
450Chemical vapor deposition rate of pyrolytic carbon from aromatic hydrocarbons
(Kyoto U.) *Baba S., Iwai T., Nagata K., Kawase M.
Chemical vapor deposition
Pyrolysis
Carbon
P
462Preparation of zinc oxide thin film by the CVD method using the zinc acetylacetonate.
(Tokai U.) *Misawa Kyosuke, Nakamura Yusuke, Tazawa Takumi, Morita Masahito, Akiyama Yasunobu
CVD
thin film
zinc oxide
P
465Evaluation of the step coverage of the ZnO thin films prepared by using the APCVD method
(Tokai U.) *Hayakawa Hisashi, Yamanashi Toshihiro, Kataoka Takahiro, Kanamori Mizuya, Akiyama Yasunobu
CVD
Zinc oxide
Thin film
P
510Rapid vapor deposition of Cu films and application to electrodes for lithium secondary batteries
(Waseda U.) *Aoi Shigeki, Hasegawa Kei, Osawa Toshio, Monma Toshiyuki, Osaka Tetsuya, Noda Suguru
Rapid vapor deposition
Cu
lithium secondary batteries
P
518Gass-phase synthesis of Si nanoparticles and fabrication of three-dimensional thick electrodes for lithium secondary batteries
(Waseda U.) *Kowase Takayuki, Hasegawa Kei, Osawa Toshio, Monma Toshiyuki, Osaka Tetsuya, Noda Suguru
Lithium secondary battery
Evaporation
Silicon
P
564Multi-scale analysis of SiC-CVD from trimethylchlorosilane
(U. Tokyo) *Sugiura Hidetoshi, Shima Kohei, Sato Noboru, Funato Yuichi, (IHI) Fukushima Yasuyuki, (U. Tokyo) Momose Takeshi, Shimogaki Yukihiro
SiC
CVD
trimethylchlorosilane
P
616Direct deposition of Si particle films on current collectors for lithium secondary batteries
(Waseda U.) *Morikawa Yusuke, Hasegawa Kei, Osawa Toshio, Monma Toshiyuki, Osaka Tetsuya, Noda Suguru
Lithium secondary battery
Evaporation
Silicon
P
657Construction of the overall reaction model for opitmizing SiC-CVD using Methyltrichlorosilane
(U. Tokyo) *Funato Y., Sato N., Shima K., Fukushima Y., Sugiura H., Momose T., Shimogaki Y.
Overall reaction model
SiC
CVD
O
672Study on the Sticking Probability of SiC-CVD Species Using Methyltrichlorosilane (3)
(U. Tokyo) *Shima K., Sato N., Funato Y., Sugiura H., (IHI) Fukushima Y., (U. Tokyo) Momose T., Shimogaki Y.
CVD
SiC
methyltrichlorosilane
O
747Controls of diamond growth rate ratio ([100]/[111]) and morphology by direct current plasma chemical vapor deposition
(Osaka Pref. U.) *Yukawa H., Nezaki M., Nakata K., Okamoto N., Saito T., Kondo K., (AIST) Yamasaki S., Okushi H.
CVD
diamond
plasma
P
785Contact resistance evaluation of electron beam evaporated TiCN/Pt/Au electrode on p-type diamond by transmission line model
(Osaka Pref. U.) *Suzuki S., Nezaki M., Okamoto N., Saito T., Kondo K., (AIST) Matsumoto T., Makino T., Ogura M., Kato H., Takeuchi D., Yamasaki S., Okushi H.
diamond
contact resistance
electron beam evaporated
P
809The ferroelectric and piezoelectric properties of ferroelectric films by PLD
(Osaka Pref. U.) *Amano T., Takada Y., Okamoto N., Saito T., Kondo K., Yoshimura T., Fujimura N., (ISIR, Osaka U.) Higuchi K., Kitajima A.
ferroelectric properties
pulsed laser deposition
piezoelectric properties
P
838Reaction analysis of InGaN-MOVPE using the new nitride precursor
(U. Tokyo) *Suzuki Y., Momose T., (ALL) Teramoto T., Dussarrat C., (U. Tokyo) Sugiyama M., Shimogaki Y.
InGaN
reaction analysis
Qmass
P

List of received applications (By topics code)

List of received applications
SCEJ 80th Annual Meeting (Tokyo, 2015)

(C) 2015 The Society of Chemical Engineers, Japan. The Society of Chemical Engineers, Japan. All rights reserved.
Most recent update: 2015-07-10 15:24:01
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E-mail: inquiry-80awww3.scej.org
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