SCEJ

$B2=3X9)3X2q(B $BBh(B81$BG/2q(B (2016)

$B9V1i?=$79~$_0lMw!J%7%s%]%8%&%`!&9V1iJ,N`JL!K(B

5) $BH?1~9)3X(B

5-h. CVD$B!&%I%i%$%W%m%;%9(B

$B:G=*99?7F|;~!'(B2016-05-19 11:21:01

$B$3$NJ,N`$G$h$/;H$o$l(B
$B$F$$$k%-!<%o!<%I(B		$B%-!<%o!<%I(B$B
chemical vapor deposition9$B7o(B***
carbon nanotubes8$B7o(B**
graphene5$B7o(B*
CVD5$B7o(B*
fluidized bed3$B7o(B*
SiC3$B7o(B*
crystal growth3$B7o(B*
methyltrichlorosilane2$B7o(B
flame synthesis2$B7o(B
single-wall carbon nanotubes2$B7o(B
dry-etching2$B7o(B
aerosol catalysts2$B7o(B
PZT capacitors1$B7o(B

$B$BHV9f(B$B9V1iBjL\!?H/I=$B%-!<%o!<%I(B$BH/I=7A<0(B
123$B%+!<%\%s%J%NN3;R(B-$B%J%N%A%e!<%VJ#9gBN$N5$AjO"B39g@.(B
($BAaBg1!@h?JM}9)(B) ($B3X(B)$B!{7*C+(B $B6)L@(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		carbon nanotubes
carbon nanoparticles
continuous production
P
180Co$BGvKl$X$NC:AG8GMO$H1vAG%(%C%A%s%0$K$h$k%0%i%U%'%s$N(BSiO2$B>eD>@\7A@.(B
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{4_ED(B $BM-M}(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		graphene
crystal growth
dry-etching
P
216$B9u1t4p:`>e$G$NBgN37B7k>=(BSi$BGvKl$N9bB.@=Kl$H5!3#GmN%5;=Q$N3+H/(B
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{;3:j(B $BM*J?(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		crystalline silicon thin films
lift-off process
crystal growth
P
273$BC1AX%+!<%\%s%J%N%A%e!<%V$N2P1j9g@.$HH?1~>l@)8f$K$h$k9bIJ
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{2,ED(B $BfFJ?(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		single-wall carbon nanotubes
flame synthesis
reaction field control
P
334$B%5%U%!%$%">e$X$N%(%T%?%-%7%c%kFxCe$H%0%i%U%'%s$N@:L)@)8f9g@.(B
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{Fn=P(B $BBYM$(B$B!&(B ($B3X(B)$B@D0f(B $B;|4n(B$B!&(B $BBg@n(B $BD+M[(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		graphene
chemical vapor deposition
epitaxial growth
P
338$B%(%C%A%s%0@O=PK!$K$h$k%0%i%U%'%sKl$N@d1oBN4pHD>eD>@\7A@.$H9=B$@)8f(B
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{=)MU(B $B>M7C(B$B!&(B ($BElBg1!9)(B) $B>.:d(B $B>;51(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		graphene
crystal growth
dry-etching
P
349$B%a%?%s$*$h$S0l;@2=C:AG$+$i$NFe$G$N%0%i%U%'%s9g@.$HB.EYO@!&J?9UO@E*8!F$(B
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{1J0f(B $B4>Li(B$B!&(B $BBg@n(B $BD+M[(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		graphene
chemical vapor deposition
disproportionation reaction
P
358$B%"%k%_%K%&%`;0e$X$N(B $B%+!<%\%s%J%N%A%e!<%V9=B$BN$N%F!<%i!<%a%$%I9g@.(B
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{5H86(B $BM*(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B%G%s%=!<4pAC8&(B) $BBgEg(B $B5W=c(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BLnED(B $BM%(B		carbon nanotubes
aluminum substrates
three-dimensional structure
P
402$B%0%i%U%'%s(BCVD$B@.D9$K$*$1$k2CG.A0=hM}9)Dx$NLr3d(B
($BJ!2,Bg9)(B) $B>eLn(B $B??42(B$B!&(B ($B@5(B)$B!{5H86(B $BD>5-(B$B!&(B ($B@5(B)$BLnED(B $B8-(B		graphene
pre-anneal
chemical vapor deposition
O
468$B>.N37B%;%i%_%C%/J4Kv$X$N?(G^$N5$AjC4;}$H%+!<%\%s%J%N%A%e!<%V$NN.F0AX9g@.(B
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{@nC<(B $B9'M4(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		carbon nanotubes
fluidized bed
chemical vapor deposition
P
477$B%S!<%:>e$X$N?(G^%9%Q%C%?C4;}$N@:L)@)8f$HC1AX%+!<%\%s%J%N%A%e!<%V$NN.F0AX9g@.(B
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{K*C+(B $B=!0lO:(B$B!&(B $BDD(B $BCiL@(B$B!&(B ($B3X(B)$B@nC<(B $B9'M4(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		single-wall carbon nanotubes
fluidized bed
chemical vapor deposition
P
628$B=D7?2sE><0(BCVD$BAuCV$NB&JI$K$*$1$kBO@QJ*$N@.D9M^@)K!$N8!F$(B
($BK-EDCf8&(B) ($B@5(B)$B!{KRLn(B $BAm0lO:(B$B!&(B ($BK!(B)$BCfEh(B $B7r$B!&(B ($BK!(B)$B0p3@(B $B>;1Q(B$B!&(B ($B@5(B)$B>._7(B $BN490(B$B!&(B ($BK!(B)$BKYG7Fb(B $B@.L@(B		CVD
CFD
deposition
O
739$BC4;}?(G^$N5$AjJ,;66!5k$H%+!<%\%s%J%N%A%e!<%V$NO"B39g@.(B
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{Bg>l(B $B0lE/(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B$B!&(B ($BJ]EZC+2=3X9)6H(B) $BDMED(B $B9b9T(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BLnED(B $BM%(B		carbon nanotubes
aerosol catalysts
chemical vapor deposition
P
762$B5$8G86NA(BPECVD$BK!$K$*$1$kJ#9gGvKl$N9=B$7A@.(B
($B9-Bg1!9)(B) ($B@5(B)$B5WJ](B $BM%(B$B!&(B ($B@5(B)$B!{EgED(B $B3X(B$B!&(B ($B3X(B)$BED8}(B $BCRLi(B		composite material
plasma synthesis
aerosol nanoparticle deposition
O
800$B5>@7AX$r3hMQ$7$?(BSiC-CVI$B6Q0lKd9~%W%m%;%9$N9=C[(B
($BElBg1!9)(B) ($B3X(B)$B!{Eh(B $B9IJ?(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BgULg(B $BM$0l(B$B!&(B (IHI$B4pHW8&(B) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B		CVD
SiC
methyltrichlorosilane
O
812$BD69b%"%9%Z%/%HHf9=B$$rMQ$$$F4Q;!$7$?(BSiC-CVI$B@=Kl5sF0$N29EY!&05NO0MB8@-(B
($BElBg1!9)(B) ($B3X(B)$B!{Eh(B $B9IJ?(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BgULg(B $BM$0l(B$B!&(B (IHI$B4pHW8&(B) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B		CVD
SiC
methyltrichlorosilane
O
817$BIbM7N3;R?(G^$rMQ$$$?%G%#!<%<%k%(%s%8%s$K$*$1$k%+!<%\%s%J%N%A%e!<%V(B(CNT)$B$N2P1j9g@.(B
($BEl9)Bg1!M}9)(B) ($B3X(B)$B!{NkLZ(B $B=S2p(B$B!&(B ($B@5(B)$B?9(B $B?-2p(B		Carbon nanotube
flame synthesis
diesel
P
883$B%+!<%\%s%J%N%A%e!<%V$N5$AjO"B39g@.$HC;7B2=!&9b<}NL2=$X$ND)@o(B
($BAaBg@h?JM}9)(B) ($B@5(B)$B!{LnED(B $BM%(B$B!&(B $B;38}(B $BKc0a(B$B!&(B ($B3X(B)$B2,ED(B $BfFJ?(B$B!&(B ($B3X(B)$BBg>l(B $B0lE/(B$B!&(B ($B3X(B)$B?yLn(B $BM5N<(B$B!&(B ($B3X(B)$B7*C+(B $B6)L@(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B		carbon nanotubes
chemical vapor deposition
aerosol catalysts
O
886$B%+!<%\%s%J%N%A%e!<%V$N4pHD>e9g@.$H3F
($BAaBg@h?JM}9)(B) ($B@5(B)$B!{LnED(B $BM%(B$B!&(B ($BElBg1!9)(B) $BMe(B $B%L%j(B$B!&(B ($BAaBg@h?JM}9)(B) ($B3X(B)$B>.NS(B $B=T;J(B$B!&(B ($B3X(B)$B9bH+(B $BKc$B!&(B ($B3X(B)$B5H86(B $BM*(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B		carbon nanotubes
chemical vapor deposition
self-organization
O
894$BD9<\%+!<%\%s%J%N%A%e!<%V$NN.F0AX9g@.$HC_EE%G%P%$%9;0
($BAaBg@h?JM}9)(B) ($B@5(B)$B!{LnED(B $BM%(B$B!&(B $BDD(B $BCiL@(B$B!&(B ($B3X(B)$B@nC<(B $B9'M4(B$B!&(B ($B3X(B)$BK*C+(B $B=!0lO:(B$B!&(B $B%-%s%F!<%m(B $B%j%+%k%I(B$B!&(B ($B3X(B)$B5v(B $BG5P~(B$B!&(B ($B3X(B)$B@.NS(B $BH~N$(B$B!&(B ($B3X(B)$BKY(B $B7=M$(B$B!&(B ($B3X(B)$B>.NX@%(B $B7IG7(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B		carbon nanotubes
fluidized bed
electric storage devices
O
895$B%3!<%k%I%&%)!<%k7?G.(BCVD$BAuCV$rMQ$$$F:n@=$7$?;@2=0!1tGvKl$N@.KlB.EY(B
($BEl3$Bg1!9)(B) ($B3X(B)$B!{9uED(B $B?88c(B$B!&(B ($BEl3$Bg9)(B) $B2#;3(B $BM%5.(B$B!&(B $BEOn5(B $B2m=S(B$B!&(B ($BEl3$Bg1!9)(B) $BBg5WJ](B $BC#@8(B$B!&(B ($B@5(B)$B=);3(B $BBY?-(B		CVD
Zinc oxide
transparent conductive film
P
905$BC_EE%G%P%$%9$N9bMFNL2=!&7ZNL2=$rL\;X$7$?3hJ*xCe5;=Q(B
($BAaBg@h?JM}9)(B) ($B@5(B)$B!{LnED(B $BM%(B$B!&(B ($BElBg1!9)(B) $BM{(B $B=EZ_(B$B!&(B ($BAaBg@h?JM}9)(B) ($B3X(B)$B@D0f(B $B;|4n(B$B!&(B ($B3X(B)$BK\ED(B $BM[0lO:(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B@5(B)$BBgBt(B $BMxCK(B		vacuum vapor deposition
thin films
lithium secondary batteries
O
906$B2P1jK!(BCo-Al-O$BN3;R$+$i$N(B10$BIC%9%1!<%k$G$N?(G^N3;R7A@.$H%+!<%\%s%J%N%A%e!<%V@.D9(B
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{Gr9>(B $B9(G7(B$B!&(B ($B@5(B)$BD9C+@n(B $B3>(B$B!&(B ($B%_%7%,%sBg(B) Yi Eongyu$B!&(B Laine Richard$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BLnED(B $BM%(B		carbon nanotubes
cobalt nanoparticles
chemical vapor deposition
O
910$B%b%N%a%A%k%H%j%/%m%m%7%i%s$rMQ$$$?(BSiC-CVD$B%W%m%;%9:GE,2=$N$?$a$NAm3gH?1~%b%G%k9=C[(B(2)
($BElBg1!9)(B) ($B3X(B)$B!{gULg(B $BM$0l(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BEh(B $B9IJ?(B$B!&(B (IHI$B4pHW8&(B) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B		SiC
CVD
Modelization
O
976$BG[8~$N0[$J$k(BPt$B22A(B
($B:eI\Bg1!9)(B) ($B3X(B)$B!{E7Ln(B $BBY2O(B$B!&(B ($B3X(B)$B|bED(B $B`v;R(B$B!&(B ($B@5(B)$B2,K\(B $B>0$B!&(B ($B@5(B)$BsnF#(B $B>f{J(B$B!&(B ($B@5(B)$B6aF#(B $BOBIW(B$B!&(B $B5HB<(B $BIp(B$B!&(B $BF#B<(B $B5*J8(B$B!&(B ($B:eBg;:8&(B) $BHu8}(B $B9(Fs(B$B!&(B $BKLEg(B $B>4(B		Ferroelectricity
Orientation
PZT capacitors
P
$B9V1i?=$79~$_0lMw(B($B%7%s%]%8%&%`HV9f!&9V1iJ,N`HV9fJL(B)
$B
$B2=3X9)3X2q(B $BBh(B81$BG/2q(B (2016)
(C) 2016 $B8x1W
Most recent update: 2016-05-19 11:21:01
For more information contact $B2=3X9)3X2q(B $BBh(B81$BG/2q(B $B
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