
Topics Code field begins with “0-a”; 1 program is found.
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| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | Z105 | [The SCEJ Award] Research on logical optimization of thin film deposition processes using chemical reactions | The SCEJ Award | 0-a | 719 |
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SCEJ 90th Annual Meeting (Tokyo, 2025)
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