SCEJ

$B2=3X9)3X2q(B $BBh(B39$B2s=)5(Bg2q(B

$B9V1i%W%m%0%i%`!J2q>l!&F|DxJL!K(B

L$B2q>l(B

$B:G=*99?7F|;~!'(B2007-07-24 09:36:53

$BBh(B1$BF|(B
$B9V1i(B
$B;~9o(B		$B9V1i(B
$BHV9f(B		$B9V1iBjL\!?H/I=$B%-!<%o!<%I(B$BJ,N`(B
$BHV9f(B		$B$BHV9f(B
$B%7%s%]%8%&%`(B $B!cH?1~9)3X$N?7$7$$E83+!d(B
(9:00$B!A(B10:00)$B!!(B($B:BD9(B $B;32<7r0l(B)
9:00$B!A(B 9:20L101$B%^%$%/%m%j%"%/%?!
($B4X@>Bg(B) $B!{(B($B3X(B)$BG5B<(B $B@@(B$B!&(B($B@5(B)$B2,ED(B $BK'		Microreactor
Raman microscopic spectrometer
Mass transport
S-34665
9:20$B!A(B 9:40L102$B6k7A%^%$%/%m%A%c%M%kFb$K$*$1$kAXN.N.BN$N29EYJ,I[$H>:292aDx(B
($B;:Am8&(B) $B!{(B($B@5(B)$B;38}(B $B2B;R(B$B!&(B($B@5(B)$BCfB<(B $B9@G7(B$B!&(B($B@5(B)$B8E20(B $BIp(B$B!&(B$BA0ED(B $B1QL@(B		microchannel
temperature distribution
computational fluid dynamics
S-34581
9:40$B!A(B 10:00L103$B%^%$%/%mN.O)$rMxMQ$7$?%$%*%sG;=L2s<}$K$*$1$kN.O)7A>u$HG;=LEY$N4X78(B
($BFAEgBg1!@hC<650iIt(B) $B!{(B($B3X(B)$B9bLZ(B $BMW(B$B!&(B($BFAEgBg9)(B) $B;38}(B $B?JB@O:(B$B!&(B($BFAEgBg(BSTS$B8&(B) ($B@5(B)$B30NX(B $B7r0lO:(B$B!&(B($B@5(B)$B?y;3(B $BLP(B$B!&(B($B@5(B)$BCf@n(B $B7I;0(B		microchannel
electrophoresis
ion enrichment
S-34441
(10:00$B!A(B11:00)$B!!(B($B:BD9(B $BJR2,(B $B>M(B)
10:00$B!A(B 10:20L104$B%^%$%/%mN.BNCf$K$*$1$k(BDNA$B$N(B2$BK\:?7A@.$NG.NO3XE*@-
($B;:Am8&%J%N%F%/%N%m%8!<8&5fItLg(B) $B!{(B($B@5(B)$B;32<(B $B7r0l(B$B!&(B($B@5(B)$B5\:j(B $B??:4Li(B$B!&(B($B@5(B)$B;38}(B $B2B;R(B$B!&(B($B@5(B)$BCfB<(B $B9@G7(B$B!&(B($B@5(B)$BA0ED(B $B1QL@(B		laminar flow
microchannel
conformational entropy
S-34547
10:20$B!A(B 10:40L105$B%^%$%/%mN.O)$rMxMQ$7$?B?CJ>xN1$N8!F$(B
($BFAEgBg1!@hC<650iIt(B) $B!{(B($B3X(B)$BJ!?9(B $B9'E5(B$B!&(B($BFAEgBg9)(B) $BM'@.(B $B4nBeH~(B$B!&(B($BFAEgBg(BSTS$B8&(B) ($B@5(B)$B30NX(B $B7r0lO:(B$B!&(B($B@5(B)$B?y;3(B $BLP(B$B!&(B($B@5(B)$BCf@n(B $B7I;0(B		microchannel
distillation
phase separation
S-34764
10:40$B!A(B 11:00L106$B%^%$%/%m%_%-%5!<$rMQ$$$?F}2=%W%m%;%9$N@_7W(B
($B2V2&(B) $B!{(B($B@5(B)$B>>;3(B $B0lM:(B$B!&(B($B@5(B)$BJw(B $B9@Fs(B$B!&(B($B@5(B)$B5WJ](B $B1QL@(B$B!&(B($B5~Bg9)(B) ($B@5(B)$BA0(B $B0lW"(B		emulsification
micromixer
convection mixing
S-34580
(11:00$B!A(B12:00)$B!!(B($B:BD9(B $B>>;30lM:(B)
11:00$B!A(B 11:20L107$B%^%$%/%m%j%"%/%?$rMQ$$$?F<%J%N%3%m%$%I$ND4@=(B
($B;37ABg9)(B) $B!{(B($B3X(B)$BHx7A(B $B7IB@(B$B!&(B($B@5(B)$B<58M(B $B>;9-(B$B!&(B($B@5(B)$BBgC](B $BE/Li(B		microreactor
copper nanoparticle
stability of colloid
S-34356
11:20$B!A(B 11:40L108$B%^%$%/%m6u4V$rMQ$$$?%j%A%&%`%^%s%,%s%9%T%M%k%J%NN3;R$N9g@.(B
($BEl9)Bg(B) $B!{(B($B@5(B)$BC+8}(B $B@t(B$B!&(B($B@5(B)$BLpLn(B $BB@O/(B		microspace
spray pyrolysis
lithium manganese spinel
S-34548
11:40$B!A(B 12:00L109$B%^%$%/%mN.O)Fb$N1UE)$rMxMQ$7$?9bJ,;R=E9g$H9bJ,;RHyN3;R@=B$K!$N8!F$(B
($B5~Bg1!9)(B) ($B@5(B)$BKR(B $BBYJe(B$B!&(B$B!{(B($B3X(B)$BNS(B $BC#Li(B$B!&(B($B3X(B)$BCf@>(B $BJ8?M(B$B!&(B($B@5(B)$BBg5WJ](B $B>0?M(B$B!&(B($B@5(B)$BA0(B $B0lW"(B		$B%^%$%/%mH?1~9)3X(B
$B=E9gH?1~(B
$B9bJ,;RN3;R(B
S-3473
(13:00$B!A(B13:40)$B!!(B($B:BD9(B $BC+8}(B $B@t(B)
13:00$B!A(B 13:20L113$B%^%$%/%m%A%c%s%M%k$rMQ$$$?EE;R%Z!<%Q!
($BAn8&2=3X(B) $B!{BlBt(B $BMF0l(B$B!&(B($B@5(B)$B9b66(B $B9'FA(B$B!&(B($BEl9)Bg(B) ($B@5(B)$B@>Gw(B $B5.;V(B$B!&(B($BElBg1!(B) ($B@5(B)$BD;5o(B $BE0(B		microchannel
electronics paper
particles
S-34145
13:20$B!A(B 13:40L114$B%a%=B?9&BN$rC4;}$7$?%^%$%/%m%j%"%/%?!<$N:n@=$HH?1~FC@-(B
($B;:Am8&(B) $B!{(B($B@5(B)$BJR2,(B $B>M(B$B!&(B($B@5(B)$B1sF#(B $BL@(B$B!&(B$B86ED(B $BFX90(B$B!&(B$B0pLZ(B $BM35*(B$B!&(B($B@5(B)$B;3K\(B $BBs;J(B$B!&(B($B@5(B)$BCf4d(B $B>!(B$B!&(B($B@5(B)$BBg?9(B $BN4IW(B		microreactor
mesoporous
catalytic reaction
S-34954
(13:40$B!A(B14:20)$B!!(B($B:BD9(B $BKR(B $BBYJe(B)
13:40$B!A(B 14:00L115$B%^%$%/%m%j%"%/%?$rMxMQ$7$?%"%8%s9g@.K!$N8!F$(B
($BFAEgBg1!@hC<650iIt(B) $B!{(B($B3X(B)$BH*Ln(B $B=$0l(B$B!&(B$B@>B<(B $BJ~98(B$B!&(B($BFAEgBg9)(B) $B:{;3(B $B2F:Z(B$B!&(B($BFAEgBg(BSTS$B8&(B) ($B@5(B)$B30NX(B $B7r0lO:(B$B!&(B($BBgDM2=3X(B) $BC+8}(B $B@5=S(B$B!&(B$B?9(B $B9@;J(B$B!&(B($BFAEgBg(BSTS$B8&(B) ($B@5(B)$B?y;3(B $BLP(B$B!&(B($B@5(B)$BCf@n(B $B7I;0(B		microchannel
azine
synthesis
S-34776
14:00$B!A(B 14:20L116$B%^%$%/%m%A%e!<%V%j%"%/%?!<$K$h$k2a;@2=?eAG$N9g@.(B
($BJ!=wBg?M4V4D6-(B) $B!{(B($B@5(B)$BApJI(B $B9n8J(B$B!&(B$BA086(B $B>^;R(B$B!&(B$B41(B $B9q@6(B$B!&(B($B@5(B)$B-;L(B		Hydrogen peroxide
Electrolysis
Catalytic reaction
S-34267
(14:20$B!A(B15:20)$B!!(B($B:BD9(B $BApJI9n8J(B)
14:20$B!A(B 14:40L117$B%^%$%/%mN.O)$K$*$1$kL52A(B
($BF|N)!&EE3+8&(B) $B!{(B($B@5(B)$BGr@P(B $BJ~;K(B$B!&(B($B@5(B)$B6aF#(B $B7rG7(B$B!&(B($B@5(B)$B2OB<(B $BJY(B$B!&(B($BF|N)%W%i%s%H%F%/%N%m%8!<(B) $B>.ED(B $B>-;K(B		microreactor
consecutive reaction
mixing-reaction number
S-34907
14:40$B!A(B 15:00L118$BMpN.3H;6$rMQ$$$?%^%$%/%m%j%"%/%?$K$*$1$kH?1~<}N(I>2A(B
($BF|N)!&EE3+8&(B) $B!{(B($B@5(B)$B6aF#(B $B7rG7(B$B!&(B($B@5(B)$BGr@P(B $BJ~;K(B$B!&(B($B@5(B)$B2OB<(B $BJY(B$B!&(B($BF|N)%W%i%s%H%F%/%N%m%8!<(B) ($B@5(B)$B>.ED(B $B>-;K(B		microreactor
dimensionless number
turbulent diffusion
S-34912
15:00$B!A(B 15:20L119$BB?CJ?WB.A`:n$KBP1~$7$?5!G=%"%;%s%V%k7?%^%$%/%m%j%"%/%?!<$N3+H/(B
($B5~Bg9)(B) $B!{(B($B3X(B)$B0KEl(B $B@i=U(B$B!&(B$BKLEg(B $BN$B!&(B($B@5(B)$B@DLZ(B $B@kL@(B$B!&(B($B@5(B)$BA0(B $B0lW"(B		unit assemble
microreactor
multistage rapid operation
S-3412
(15:20$B!A(B16:20)$B!!(B($B:BD9(B $B>>2,C$O:(B)
15:20$B!A(B 15:40L120C12A7$B$+$iJ|=P$5$l$k;@AGIi%$%*%s$KM3Mh$9$k3h@-2=3X
($BElBg1!9)(B) $B!{(B($B@5(B)$B;3K\(B $B8wIW(B$B!&(B($B9)3X1!Bg9)(B) ($B@5(B)$BDjJ}(B $B@55#(B		C12A7
oxygen anion
radical species
S-34752
15:40$B!A(B 16:00L121$BBg5$05$K$*$1$k(BC12A7$BM3Mh5$Aj3h@-;@AG
($B;:Am8&(B) $B!{(B($B@5(B)$B@>2,(B $B>-51(B$B!&(B($BElKL3X1!Bg(B) $BD9ED(B $B?-:H(B$B!&(B($B;:Am8&(B) $B3k@>(B $B??6W(B		C12A7
active oxygen species
silicon oxydation
S-34685
16:00$B!A(B 16:20L122$B%^%$%/%m%P%k%V$K$h$k%9%i%0N.$NH/@8$HCj=P%W%m%;%9$X$NE,MQ(B
($B2,;3Bg1!(B) $B!{(B($B@5(B)$BIpF#(B $BL@FA(B$B!&(B($B2,;3Bg9)(B) $BIp@n(B $BM5H~(B$B!&(B($B2,;3Bg1!(B) $BCfJ?(B $BBn?C(B$B!&(B$BNk?9(B $B9/0l(B$B!&(B$B?@ED(B $B3YJ8(B$B!&(B($B6(OB%U%!%$%s%F%C%/(B) $BLgOF(B $B?.7f(B		slug flow
micro valve
extraction
S-34324
(16:20$B!A(B17:20)$B!!(B($B:BD9(B $BHx>e(B $B70(B)
16:20$B!A(B 16:40L123$BD62;GH>H2A(B
($BElKLBg9)(B) $B!{(B($B3X(B)$B4X8}(B $BOB9((B$B!&(B($B@5(B)$B5WJ](B $B@5$B!&(B($B@5(B)$BJFK\(B $BG/K.(B		ultrasound irradiation
hydroxyl radical
Electron Spin Resonance
S-34352
16:40$B!A(B 17:00L124$BM-5!MOG^7O$K$*$1$k%=%N%j%"%/%?!<$N@-G=I>2A$N8!F$(B
($BL>Bg1!9)(B) $B!{(B($B3X(B)$BJ!IZ(B $BAo(B$B!&(B($BK\B?EE;R(B) ($BIt(B)$BD+AR(B $B5A9,(B$B!&(B($BL>>kBgG@(B) ($BIt(B)$BA0NS(B $B@590(B$B!&(B($BL>Bg1!9)(B) ($BIt(B)$B>>2,(B $BC$O:(B$B!&(B($BIt(B)$B9aED(B $BG&(B		onochemical reactor
cavitation
organic solvent
S-34224
17:00$B!A(B 17:20L125$B%;%k%m!<%9$NM-8zMxMQ$N$?$a$N%=%N%W%m%;%9(B
($BL>Bg1!9)(B) $B!{(B($B3X(B)$BEOJU(B $B??Li(B$B!&(B($B@5(B)$BFs0f(B $B?8(B$B!&(B($B3X(B)$B9b0B(B $BH~Li;R(B$B!&(B($B@5(B)$B>>2,(B $BC$O:(B$B!&(B($B@5(B)$B9aED(B $BG&(B		cellulose
ultrasonic
separation
S-34561
(17:20$B!A(B18:00)$B!!(B($B:BD9(B $B@>2,>-51(B)
17:20$B!A(B 17:40L126$B;@AG%W%i%:%^$HC:2=?eAGJ,;R$H$N@\?(H?1~(B
($B@iMU9)Bg9)(B) $B!{(B($B3X(B)$BJ!2,(B $BBgJe(B$B!&(B($B@5(B)$BD9E:(B $B42(B$B!&(B($B@5(B)$B>.NS(B $B4p$B!&(B($B@5(B)$BHx>e(B $B70(B		microwave
plasma
oxidation
S-34501
17:40$B!A(B 18:00L127$B5$1UJ|EE$K$h$k%U%'%N!<%kJ,2r(B
($BK!@/Bg(B) $B!{(B($B3X(B)$BK\ED(B $BJ87I(B$B!&(B($B@5(B)$B@>3$(B $B1QM:(B		phenol
discharge
water
S-34762

$BBh(B2$BF|(B
$B9V1i(B
$B;~9o(B		$B9V1i(B
$BHV9f(B		$B9V1iBjL\!?H/I=$B%-!<%o!<%I(B$BJ,N`(B
$BHV9f(B		$B$BHV9f(B
$B%7%s%]%8%&%`(B $B!c(BCVD$B!&%I%i%$%W%m%;%9!d(B
(9:00$B!A(B10:00)$B!!(B($B:BD9(B $BLnED(B $BM%(B)
9:00$B!A(B 9:20L201LPI$BK!$rMQ$$$?(BBTX$B$+$i$N%+!<%\%s%J%N%U%!%$%P!<$N9b8zN(@=B$(B
($B5~Bg1!9)(B) $B!{(B($B3X(B)$B5W>>(B $B<#(B$B!&(B$BHDAR(B $B7<(B$B!&(B($B@5(B)$BEDLg(B $BH%(B$B!&(B($BKLBg9)(B) ($B@5(B)$B8~0f(B $B?B(B		Carbon nanofibers
Liquid pulse injection technique
BTX
S-35495
9:20$B!A(B 9:40L202$B>\:Y$J2=3XH?1~%9%-!<%`$H(BCFD$B$H$N%+%C%W%j%s%0$K$h$kG.J,2rC:AG(BCVD$B$N?tCM%7%_%e%l!<%7%g%s(B
($BKLBg%(%M%;%s(B) $B!{(B($B3X(B)$B;0;^(B $BD>O)(B$B!&(B($B@5(B)$BB'1J(B $B9TMG(B$B!&(B($B@5(B)$BNS(B $B=a0lO:(B		CVD
CFD
carbon
S-35995
9:40$B!A(B 10:00L203$BG.J,2rC:AG(BCVD$B$K$*$1$kH?1~4oFbH>7BJ}8~%,%9AH@.J,I[$N@V30J,8wJ,@O(B
($B5~Bg9)(B) $B!{(B($B@5(B)$B2O@%(B $B85L@(B$B!&(B($B3X(B)$B;3K\(B $B9d5*(B$B!&(B($B@5(B)$B;01:(B $B9'0l(B		pyrocarbon
CVD
infrared absorption
S-35445
(10:00$B!A(B11:00)$B!!(B($B:BD9(B $B2O@%85L@(B)
10:00$B!A(B 10:20L204$BL\E*$K1~$8$?C1AX%+!<%\%s%J%N%A%e!<%V$N9g@.(B
($BElBg1!9)(B) $B!{(B($B@5(B)$BLnED(B $BM%(B$B!&(B($B3X(B)$BD9C+@n(B $B3>(B$B!&(B($B3X(B)$B?yL\(B $B91;V(B$B!&(B($B3X(B)$Bd*(B $BOB7{(B$B!&(B$B4];3(B $BLPIW(B$B!&(B($B@5(B)$B;38}(B $BM34tIW(B		single-walled carbon nanotubes
customized synthesis
combinatorial method
S-35588
10:20$B!A(B 10:40L205$BC1AX%+!<%\%s%J%N%A%e!<%V?bD>G[8~@.D9$H?(G^%J%NN3;R$NAFBg2=!&<:3h(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B=t7((B $B?58c(B$B!&(B($B3X(B)$BD9C+@n(B $B3>(B$B!&(B($B@5(B)$BLnED(B $BM%(B$B!&(B$B4];3(B $BLPIW(B$B!&(B($B@5(B)$B;38}(B $BM34tIW(B		single-walled carbon nanotubes
rapid growth
catalyst deactivation
S-35598
10:40$B!A(B 11:00L206$BBg5$05%W%i%:%^$K$h$k%@%a!<%8%U%j!<(BCVD$B$N9=C[$H?bD>G[8~C1AX%+!<%\%s%J%N%A%e!<%V9g@.$X$NE83+(B
($BEl9)Bg1!(B) $B!{(B($B@5(B)$BLn:j(B $BCRMN(B$B!&(B($BEl9)Bg(B) $BBg@>(B $B6uK`(B$B!&(B($BEl9)Bg1!(B) ($B@5(B)$B2,:j(B $B7r(B		Atmospheric pressure non-thermal plasma
Single-walled carbon nanotubes
Ion damage
S-3523
(11:00$B!A(B12:00)$B!!(B($B:BD9(B $BLn:jCRMN(B)
11:00$B!A(B 11:20L207$BHsJ?9U(BCO$B%W%i%:%^$rMQ$$$?%@%$%d%b%s%IGvKl$NDc299g@.(B
($BEl9)Bg1!M}9)(B) $B!{(B($B@5(B)$B?9(B $B?-2p(B$B!&(B($BEl9)Bg(B) $BI~It(B $BM5G$(B$B!&(B($BEl9)Bg1!M}9)(B) ($B@5(B)$BNkLZ(B $B@5><(B		plasma CVD
diamond thin film
low temperature synthesis
S-35174
11:20$B!A(B 11:40L208$B%W%i%:%^%(%C%A%s%0$K$*$1$k%$%*%s%(%M%k%.!
($BEl		Plasma Etching
Ion Energy Distribution
Reactive Ion Etching
S-35511
11:40$B!A(B 12:00L209$B;n839=B$4pHD$rMxMQ$7$?(BC5F8/O2/Ar$B%W%i%:%^H?1~$N%a%+%K%:%`2r@O(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B4X(B $B=_;V(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B		plasma CVD
Dry Etching
Reaction Kinetics
S-35453
(13:00$B!A(B14:20)$B!!(B($B:BD9(B $B?y;3@5OB(B)
13:00$B!A(B 13:40L213[$BE8K>9V1i(B] $B6a@\>l8w$rMQ$$$?(BCVD$B$K$h$k%J%N2C9)$H$=$N1~MQ(B
($BElBg9)(B) $B!{@nE:(B $BCi(B		Optical Near-Fields
Photo-CVD
Photochemical Reaction
S-35178
13:40$B!A(B 14:00L215$B%"%k%4%s(B-$B?eAG%"!<%/$K$h$k(BSn-Ag$B9g6b$+$i$NA*BrE*>xH/B%?J5!9=$N8!F$(B
($BEl9)BgAmM}9)(B) $B!{(B($B3X(B)$BEDCf(B $B3X(B$B!&(B($B@5(B)$BEOJU(B $BN49T(B		DC arc
Vaporization Enhancement
Sn-Ag alloy
S-35624
14:00$B!A(B 14:20L216$B%9%-%c%K%s%0%"%K!<%k$K$h$k%J%NN3;R(BFeSi2$B!?(BSi$BJ#9gGvKl$N:n@=$H$=$N%J%N9=B$(B
($BEl9)BgC:%(%M8&(B) $B!{(B($B3X(B)$B;{_7(B $B??Je(B$B!&(B($B3X(B)$B0f>e(B $B7z(B$B!&(B($BEl9)BgJ,@O;Y1g%;(B) $B8;4X(B $BAo(B$B!&(B($BEl9)BgC:%(%M8&(B) ($B@5(B)$B0K86(B $B3X(B		Iron Silicide
Zone Melting Crystallization
Nano-particle
S-35987
(14:20$B!A(B15:20)$B!!(B($B:BD9(B $BAz3@9,9@(B)
14:20$B!A(B 14:40L217$BGvKl(BZMC$BK!$K$h$k(BFeSi2$BGvKl$N:n@=$H29EY$K$h$k7k>=Aj$N@)8f(B
($BEl9)BgC:%(%M8&(B) $B!{(B($B3X(B)$B0f>e(B $B7z(B$B!&(B($B3X(B)$B;{_7(B $B??Je(B$B!&(B($B@5(B)$B0K86(B $B3X(B		solar cell
Iron silicide
crystallization
S-35991
14:40$B!A(B 15:00L218W/O$B%(%^%k%8%g%s$NG3NA2aG;G3>F$K$h$k(BNi$BD6HyN3;R$N@=B$(B
($BL>Bg9)(B) $B!{(B($B3X(B)$B@n1[(B $B??8c(B$B!&(B($B4D6-8&(B) ($B@5(B)$B>.NS(B $B=a(B$B!&(B($BL>Bg9)(B) ($B@5(B)$B>.NS(B $B?.2p(B$B!&(B($B@5(B)$B1)B?Ln(B $B=E?.(B$B!&(B($B@5(B)$BHDC+(B $B5A5*(B$B!&(B($B=jB0$J$7(B) ($B@5(B)$B?9(B $B<">!(B		nano particle
W/O emulsion
combustion
S-35653
15:00$B!A(B 15:20L219$B8GBN4VH/G.8=>]$rMxMQ$7$?(BTiO2$B%J%NN3;R$N%U%i%C%7%e9g@.(B
($BKLBg(B) $B!{(B($B3X(B)$BKLB<(B $BBY><(B$B!&(B$B2-Cf(B $B7{G7(B$B!&(B($B@5(B)$B=);3(B $BM'9((B		nanofabrication
solid state reaction
oxide materials
S-35781

$BBh(B3$BF|(B
$B9V1i(B
$B;~9o(B		$B9V1i(B
$BHV9f(B		$B9V1iBjL\!?H/I=$B%-!<%o!<%I(B$BJ,N`(B
$BHV9f(B		$B$BHV9f(B
$B%7%s%]%8%&%`(B $B!c(BCVD$B!&%I%i%$%W%m%;%9!d(B
(9:00$B!A(B10:00)$B!!(B($B:BD9(B $B6LCVD>
9:00$B!A(B 9:20L301$B%7%j%3%sI=LL$K$*$1$kM-5!J*J,;R5[CeC&N%5sF0$N$=$N>l4Q;!(B
($B2#9qBg1!9)(B) $B!{(B($B@5(B)$B1)?<(B $BEy(B$B!&(B$B;320(B $BBgJe(B		Silicon
Organic compound
adsorption
S-35168
9:20$B!A(B 9:40L302InGaAsP$B7O(BMOVPE$B$K$*$1$k(BV$BB25[C&CeB.EY$H8GAjAH@.(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B54DM(B $BN4M4(B$B!&(B($B@5(B)$B?y;3(B $B@5OB(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B$B!&(B$BCfLn(B $B5A><(B		MOVPE
Crystal Growth
Simulation
S-35769
9:40$B!A(B 10:00L303GaAs$B$*$h$S(BInP$B$N(BMOVPE$B$K$*$1$kI=LL5[CeAX$NB.EY2aDxHf3S(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B=P1:(B $BEm;R(B$B!&(B($B@5(B)$B?y;3(B $B@5OB(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B$B!&(B($BElBg@hC<8&(B) $BCfLn(B $B5A><(B		MOVPE
Surface adsorption layer
kinetics
S-35790
(10:00$B!A(B11:00)$B!!(B($B:BD9(B $B1)?<(B $BEy(B)
10:00$B!A(B 10:20L304$B9bB.2sE>7?(BCVD$BAuCV$rMQ$$$?(BGaAs$B@.D9%W%m%;%9$K$*$1$k(BH2/N2$B:.9g%,%9%-%c%j%"$N1F6A(B
($BEl$B!&(B($B@5(B)$B1'0f(B $BL@@8(B$B!&(B($B@5(B)$B6LCV(B $BD>		MOCVD
CHEMKIN
rapid rotation reactor
S-35587
10:20$B!A(B 10:40L305$BA*Br@.D9%W%m%U%!%$%k2r@O$K$h$k(BInP,InAs-MOVPE$B@.D9$NB.EYO@(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B2&(B $B1@K2(B$B!&(B($B@5(B)$BAW(B $B3$@/(B$B!&(B($B@5(B)$B?y;3(B $B@5OB(B$B!&(B($BElBg@hC<8&(B) $BCfLn(B $B5A><(B$B!&(B($BElBg1!9)(B) ($B@5(B)$BAz3@(B $B9,9@(B		InP/InAs-MOVPE
Selective area growth
Kinetics
S-35687
10:40$B!A(B 11:00L306MOVPE$B$K$*$1$kI=LLH?1~B.EY$HI=LL86;R9=B$$N4X78(B
($BElBg9)(B) $B!{(B($B@5(B)$B?y;3(B $B@5OB(B$B!&(B($B3X(B)$B=P1:(B $BEm;R(B$B!&(B($B@5(B)$BAW(B $B3$@/(B$B!&(B($B3X(B)$B2&(B $B1>K2(B$B!&(B($BElBg@hC<8&(B) $BCfLn(B $B5A><(B$B!&(B($BElBg9)(B) ($B@5(B)$BAz3@(B $B9,9@(B		MOVPE
surface reaction rate
surface reconstruction
S-35820
(11:00$B!A(B12:00)$B!!(B($B:BD9(B $BsnF#>fLw(B)
11:00$B!A(B 11:20L307$BBg7?(BCVD$BH?1~O'$K$h$k(BBN$B%;%i%_%C%/%99g@.(B
($B:eBg4p9)(B) $B!{(B($B3X(B)$BF#0f(B $B@6Mx(B$B!&(B($B:e4p9)(B) ($B@5(B)$B@>;3(B $B7{OB(B$B!&(B($B@5(B)$B9>F,(B $BLw9,(B$B!&(B($B@5(B)$B>e;3(B $B0T0l(B		Pyrolitic Boron Nitride
CVD
Crystal growth
S-35337
11:20$B!A(B 12:00L308[$BE8K>9V1i(B] 4H-SiC$BMQ9bB.(BCVD$BO'$N3+H/%3%s%;%W%H(B
($B;:Am8&(B) $B!{@PED(B $BM<5/(B		4H-SiC homo-epitaxial growth
Chemical vapor deposition
High-rate growth
S-35424
(13:00$B!A(B14:00)$B!!(B($B:BD9(B $B6aF#1Q0l(B)
13:00$B!A(B 13:20L313$B%Q%k%9%$%s%8%'%/%7%g%sJ}<0$K$h$k9bIJ
($BElBg1!9)(B) $B!{(B($B3X(B)$BNB(B $B@5>5(B$B!&(BSodabanulu Hassanet$B!&(B($B@5(B)$B?y;3(B $B@5OB(B$B!&(B($BElBg@hC<8&(B) $BCfLn(B $B5A><(B$B!&(B($BElBg1!9)(B) ($B@5(B)$BAz3@(B $B9,9@(B		Pulse injection method
GaN
MOVPE
S-35755
13:20$B!A(B 13:40L314$B%Q%k%9%$%s%8%'%/%7%g%s$rMQ$$$?(BInP$B$NA*Br(BMOVPE$B@.D9$K$*$1$kCo@.D9$NM^@)(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BC+(B $BOB$B!&(B($B3X(B)$B=P1:(B $BEm;R(B$B!&(B($B@5(B)$B?y;3(B $B@5OB(B$B!&(B$BCfLn(B $B5A><(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B		abnormal growth
Pulse Injection
SA-MOVPE
S-35387
13:40$B!A(B 14:00L315$B%A%?%s;@%9%H%m%s%A%&%`GvKl$N%(%T%?%-%7%c%k@.D9>r7o(B
($BEl3$Bg1!9)(B) $B!{(B($B@5(B)$B=);3(B $BBY?-(B$B!&(B$BB<>e(B $BGn;K(B$B!&(B$B2$B!&(B$B@nEg(B $BCN;j(B		CVD
Epitaxial Growth
Strontium Titanate
S-35147
(14:00$B!A(B15:00)$B!!(B($B:BD9(B $B0K86(B $B3X(B)
14:00$B!A(B 14:20L316$B%Q%k%9J|EE%W%i%:%^$K$h$k(BTiO2$B$NItJ,4T85$*$h$S$=$NFC@-I>2A(B
($BEl9)Bg(B) $B!{(B($B3X(B)$Bhq(B $B=a\](B$B!&(B($B@5(B)$B?9(B $B?-2p(B$B!&(B($B@5(B)$BNkLZ(B $B@5><(B		partial reduction
TiO2
plasma
S-35960
14:20$B!A(B 14:40L317TiO2$BCf6uN3;R$X$N(BPLD$BK!$K$h$k6bB0C4;}(B
($B:eI\Bg9)(B) $B!{(B($B3X(B)$B9g@n(B $B1QCK(B$B!&(B($B002=@.(B) ($B@5(B)$B?y2,(B $B98;R(B$B!&(B($B5~Bg9)(B) ($B@5(B)$BD9Nf(B $B?.Je(B$B!&(B($B:eI\Bg9)(B) ($B@5(B)$BDE5W0f(B $BLP		TiO2 hollow particle
PLD
metal support
S-35982
14:40$B!A(B 15:00L318$BD6NW3&Fs;@2=C:AGN.BN$rMxMQ$7$?(BTi$B;@2=J*GvKl$NCJ:9HoJ$@.Kl(B
($B>eCRBgM}9)(B) $B!{(B($B@5(B)$BFbED(B $B42(B$B!&(B$B2CG<(B $BIYM3$B!&(B($B@5(B)$BM30f(B $BOB;R(B$B!&(B($B@5(B)$B9,ED(B $B@60lO:(B		supercritical carbon dioxide
thin film
titanium oxide
S-35499
(15:00$B!A(B16:00)$B!!(B($B:BD9(B $B=);3BY?-(B)
15:00$B!A(B 15:20L319$BD6NW3&N.BN$rMQ$$$?(BULSI$BHy:Y9&$X$N(BCu$BKd$a9~$_(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BI4@%(B $B7r(B$B!&(B($B@5(B)$B?y;3(B $B@5OB(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B		Gap-filling
Supercritical Fluid
Cu
S-35848
15:20$B!A(B 15:40L320$B;@2=4T85$rMxMQ$7$?(BULSI-Cu$BG[@~7A@.MQ(BCVD$B%W%m%;%9$NB.EYO@(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B?\:4(B $B7=M:(B$B!&(B$B6b(B $B7.(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B		CVD
step coverage
Cu oxide
S-35452
15:40$B!A(B 16:00L321$BG.%U%#%i%a%s%H?eAG%i%8%+%k%=!<%9$K$h$k(BCu$BGvKl2~
($B;3M|Bg(B) $B!{(B($B@5(B)$B6aF#(B $B1Q0l(B$B!&(B$B?<_7(B $B??Li(B		hot filament
hydrongen radial
cu thin films
S-35967
$B9V1i%W%m%0%i%`(B
$B2=3X9)3X2q(B $BBh(B39$B2s=)5(Bg2q(B
(C) 2007 ($B
Most recent update: 2007-07-24 09:36:53
For more information contact $B2=3X9)3X2qKL3$F;;YIt(B $BBh(B39$B2s=)5(Bg2q(B $BLd$$9g$;78(B
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