SCEJ

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S-29. CVD$B!&%I%i%$%W%m%;%9!]9=B$!&5!G=@)8f$NH?1~9)3X!](B

$B%*!<%,%J%$%6!<(B $BAz3@9,9@(B($BEl5~Bg(B)$B!$=);3BY?-(B($BEl3$Bg(B)

CVD$B$d%9%Q%C%?!$%I%i%$%(%C%A%s%0$J$I$NGvKl7A@.!&HyN3;R9g@.!$Hy:Y2C9)$K$*$1$kH?1~%a%+%K%:%`$NM}2r$rDL$8!$%G%P%$%99=B$$r7A@.$7!$5!G=$rH/8=$5$;$kJ}K!O@$K$D$$$F5DO@$9$k$3$H$rL\E*$H$7$^$9!#8w!&EE;R%G%P%$%9!$(BMEMS$B!$%^%$%/%m%j%"%/%?$J$I$N7A@.$K$*$$$F!$I,MW$JGvKl$N9=B$$d5!G=$r7P83E*$K$G$O$J$/!$O@M}E*$K:GE,2=$9$k$?$a$NJ}K!O@$r5DO@$7$^$9!#C10l2q>l$G$N%7%s%]%8%&%`$H$9$k$3$H$G;22C

$B:G=*99?7F|;~!'(B2010-06-21 20:19:01

$B$3$NJ,N`$G$h$/;H$o$l(B
$B$F$$$k%-!<%o!<%I(B
$B%-!<%o!<%I(B$B
MOVPE4$B7o(B*
GaAs2$B7o(B
nanoparticle2$B7o(B
carbon nanotubes2$B7o(B
deposition2$B7o(B
Zinc oxide2$B7o(B
ultrasonic spray pyrolysis2$B7o(B
thin film2$B7o(B
supercritical fluid2$B7o(B
synthesis1$B7o(B

$B$BHV9f(B$B9V1iBjL\!?H/I=$B%-!<%o!<%I(B$B
5ULSI$BG[@~$N%-%c%C%WAXMQ?75,86NA$H%W%i%:%^(BCVD$B$K$h$k(BSiCH$BKl(B
($BBgM[F|;@(B/$BElBg1!9)(B) $B!{(B($B@5(B)$B@6?e(B $B=(<#(B$B!&(B($B%H%j%1%_%+%k8&(B) $B2CED(B $BIp;K(B$B!&(B($BC^GHBg(B) $BEDEg(B $BD*IW(B$B!&(B($BElBg1!9)(B) ($B@5(B)$BAz3@(B $B9,9@(B
Plasma Enhanced CVD
low-k cap layer
SiCH
4/9
18:56:56
83[$BE8K>9V1i(B] $B%G%P%$%93+H/!&@8;:$rL\;X$7$?%W%i%:%^%W%m%;%9!&AuCV3+H/(B
($B%5%`%3(B) $B!{K\;3(B $B?50l(B$B!&(B$BDT(B $BM}(B
$B%W%i%:%^(BCVD
$B%W%i%:%^(BRIE
$BH>F3BN%G%P%$%9(B
4/20
20:17:02
96[$BE8K>9V1i(B] CVD$B%W%m%;%9$NJ,;RO@E*2rL@$K8~$1$FNL;R2=3X$N2L$?$9Lr3d(B
($B5~Bg9)(B) $B!{N)2V(B $BL@CN(B
CVD$B%W%m%;%9(B
$BNL;R2=3X7W;;(B
$BCb2=J*H>F3BN(B
4/21
12:18:55
176$BL5EE2r$a$C$-$K$h$k(BMWCNT/$B%K%C%1%kJ#9gBN$N:n@=(B
($B:eI\Bg1!9)(B) $B!{(B($B3X(B)$B9bLZ(B $B9/9T(B$B!&(B($B@5(B)$BsnF#(B $B>f{J(B$B!&(B($B@5(B)$B2,K\(B $B>0$B!&(B($B@5(B)$B6aF#(B $BOBIW(B$B!&(B($BBg:e;T9)8&(B) $BF#86(B $BM5(B$B!&(B$B>.NS(B $BLwG7(B
carbon nanotube
electroless plating
nickel
4/23
16:19:24
183$B%+!<%\%s%J%NN3;RE:2CD62;GHJ.L8G.J,2rK!$K$h$kG3NAEECSN3;R:`NA$N9g@.(B
($B:eI\Bg9)(B) $B!{(B($B3X(B)$B5HED(B $B=S9,(B$B!&(B($B3X(B)$BKYED(B $BfF8c(B$B!&(B($B@5(B)$BLZ2<(B $BBnLi(B$B!&(B($B@5(B)$BB-N)(B $B85L@(B
carbon nanopowder
ultrasonic spray pyrolysis
fuel cell
4/23
17:17:20
189$BHs5.6bB0EE6K(B/$BJ]8n@d1oKl$K$h$k6/M6EEBN$NNt2=M^@)8z2L(B
($B:eI\Bg1!9)(B) $B!{(B($B3X(B)$BDT(B $BE0(B$B!&(B($B3X(B)$BOB@t(B $BMW(B$B!&(B$BW"ED(B $BM40lO:(B$B!&(B($B@5(B)$B2,K\(B $B>0$B!&(B($B@5(B)$BsnF#(B $B>fLw(B$B!&(B($B@5(B)$B6aF#(B $BOBIW(B$B!&(B$B5HB<(B $BIp(B$B!&(B$BF#B<(B $B5*J8(B$B!&(B($B:eBg;:8&(B) $BKLEg(B $B>4(B$B!&(B$BBgEg(B $BL@Gn(B
ferroelectric material
pulsed laser deposition
zinc oxide
4/23
17:45:33
190$BD6NW3&Fs;@2=C:AGCf$G$N6bB0;@2=J*GvKl7A@.$K$*$1$kE:2CJ*8z2L(B
($B:eI\Bg1!9)(B) $B!{(B($B3X(B)$B>.Eg(B $B>O8w(B$B!&(B$BW"ED(B $BM40lO:(B$B!&(B($B@5(B)$BsnF#(B $B>f{J(B$B!&(B($B@5(B)$B2,K\(B $B>0$B!&(B($B@5(B)$B6aF#(B $BOBIW(B$B!&(B($BElKLBgB?858&(B) ($B@5(B)$B9b8+(B $B@?0l(B
supercritical carbon dioxide
metal-oxide thin films
device
4/23
17:46:47
214$BBg7?H?1~4o$G$N(BGaAs$BA*Br(BMOVPE$B@.D9$N2r@O$H@)8f(B
($BElBg9)(B) $BA0Be(B $BIpN\(B$B!&(B($B=;M'2=3X(B) $B;T@n(B $BKa(B$B!&(B$B?A(B $B2mI'(B$B!&(B($BElBg1!9)(B) ($B@5(B)$B?y;3(B $B@5OB(B$B!&(B($BElBg@hC<8&(B) $BCfLn(B $B5A><(B$B!&(B($BElBg1!9)(B) $B!{(B($B@5(B)$BAz3@(B $B9,9@(B
GaAs
MOVPE
large scale reactor
4/24
14:30:46
234SCFD$B$K$h$k(BPd$B@=Kl$K$*$1$k?75,1UBN4T85:^$N3+H/(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BEOn4(B $B7=(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B
SCFD
liquid reducing agent
palladium
4/26
09:46:01
290$B%J%N:Y9&Fb$G$N2C?eJ,2rH?1~$K$h$k6bB0!$6bB0;@2=J*%J%NN3;R$N9g@.(B
($B5~Bg9)(B) $B!{(B($B@5(B)$B2O@%(B $B85L@(B$B!&(B($B3X(B)Gerlach I.$B!&(B($B@5(B)$B;01:(B $B9'0l(B
nanoreactor
nanoparticle
rapid heating
4/26
18:53:03
291Si$B%(%T%?%-%7%c%k9bB.@.D98~$1H?1~%b%G%k5Z$SH?1~%a%+%K%:%`$N2r@O(B
($BK-EDCf8&(B) $B!{(B($B@5(B)$BA4(B $B4p1I(B$B!&(B$BCfEh(B $B7r$B!&(B($BIt(B)$B>._7(B $BN490(B$B!&(B$B?y;3(B $BN41Q(B$B!&(B$B@P;R(B $B2m9/(B$B!&(B($B4tIlBg(B) ($B@5(B)$B@>ED(B $BE/(B$B!&(B$B7*NS(B $B;VF,bC(B$B!&(B($BElBg1!9)(B) ($B@5(B)$B1[(B $B8wCK(B
Si epitaxial
Reaction mechanism
Growth rate
4/26
19:06:30
313$B%W%i%:%^(BCVD$BK!$rMQ$$$?%+!<%\%s%J%N%U%!%$%P!<$N4J0WNN0hA*Br9g@.%W%m%;%9$N3+H/(B
($BEl9)Bg1!M}9)(B) $B!{(B($B@5(B)$B?9(B $B?-2p(B$B!&(B($BEl9)Bg9)(B) $BNkLZ(B $B=S2p(B$B!&(B($BEl9)Bg1!M}9)(B) ($B@5(B)$BNkLZ(B $B@5><(B
Plasma-enhanced CVD
Carbon nanofiber
Area-selective synthesis
4/26
21:03:11
561$BD6NW3&N.BN$rMQ$$$?@d1o@-2e$X$N6bB0Kl7A@.$HKd$a9~$_FC@-I>2A(B
($BElBg@88&(B) $B!{(B($B@5(B)$BI4@%(B $B7r(B$B!&(B(BEANS$B8&(B) ($B@5(B)$B;3ED(B $B1QM:(B$B!&(B($BElBg1!9)(B) ($B@5(B)$B?y;3(B $B@5OB(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B
Supercritical fluid
Deposition
Step coverage
4/27
22:21:45
568$BHy>.NN0hA*Br(BMOVPE$B$rMQ$$$?(BSi$B>e(BInGaAs$B$N7A>u6Q0l2=$K8~$1$?(BSi$BI=LL>uBV$H(BInAs$B@.D9$N4X78(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B=P1:(B $BEm;R(B$B!&(B($B3X(B)$B6aF#(B $B2B9,(B$B!&(B$BC]Cf(B $B=<(B$B!&(B$B9bLZ(B $B?.0l(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B$B!&(B($BElBg@hC<8&(B) $BCfLn(B $B5A><(B$B!&(B($BElBg1!9)(B) ($B@5(B)$B?y;3(B $B@5OB(B
MOVPE
heteroepitaxy
InGaAs on Si
4/27
22:49:26
601$BD6NW3&N.BN$rMQ$$$?(BSiO2$B@=Kl$K$*$1$kKd$a9~$_FC@-I>2A(B
(BEANS$B8&(B) $B!{(B($B@5(B)$B;3ED(B $B1QM:(B$B!&(B($BElBg@88&(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B($B%G%s%=!<(B) $BKLB<(B $B9/9((B$B!&(B$BI~It(B $BM-(B$B!&(B($BElBg1!9)(B) ($B@5(B)$B?y;3(B $B@5OB(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B
supercritical fluid
deposition
SiO2
4/28
09:51:06
610$B8:05G.(BCVD$BK!$K$h$j:n@=$7$?;@2=0!1t$HFs;@2=%9%:GvKl$NEE5$FC@-(B
($BEl3$Bg1!9)(B) $B!{(B($B3X(B)$B:#(B $BBgJe(B$B!&(B($B3X(B)$B1)$B!&(B($B@5(B)$B=);3(B $BBY?-(B
LPCVD
Zinc oxide
Tin oxide
4/28
10:28:55
630$B@.D9NN0h69:u2=A*Br(BMOVPE$B$K$h$k(BSi$B>e(BInGaAs$B$N9b2#(B/$B=DHf@.D9(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B6aF#(B $B2B9,(B$B!&(B($B3X(B)$B=P1:(B $BEm;R(B$B!&(B$BC]Cf(B $B=<(B$B!&(B$B9bLZ(B $B?.0l(B$B!&(B($BElBg@hC<8&(B) $BCfLn(B $B5A><(B$B!&(B($BElBg1!9)(B) ($B@5(B)$B?y;3(B $B@5OB(B
InGaAs
MOVPE
selctive area growth
4/28
11:23:56
666$B%+!<%\%s%J%NN3;RE:2CJ.L8G.J,2rK!$K$h$k%U%'%i%$%H%J%NN3;R$N9g@.(B
($B:eI\Bg9)(B) $B!{(B($B3X(B)$B6aED(B $BMyM30m(B$B!&(B($B@5(B)$BLZ2<(B $BBnLi(B$B!&(B($B@5(B)$BB-N)(B $B85L@(B
synthesis
ultrasonic spray pyrolysis
ferrite
4/28
12:36:45
794Microstructures and transparent conducting properties of self-organized networks of single-walled carbon nanotubes
($BElBg1!9)(B) $B!{(B($B3X(B)Ketpreechasawat Suarpa$B!&(B$B?yL\(B $B91;V(B$B!&(B($B@5(B)$BGrD;(B $BMN2p(B$B!&(B($B@5(B)$BLnED(B $BM%(B
carbon nanotubes
self-organization
transparent conducting properties
4/28
16:05:46
797$BC1AX%+!<%\%s%J%N%A%e!<%V$N5$Aj9g@.$HH?1~@)8f(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B:4F#(B $B2BK.(B$B!&(B$B@PDM(B $BMN9T(B$B!&(B($B@5(B)$BBgBt(B $BMxIW(B$B!&(B($B@5(B)$BLnED(B $BM%(B
carbon nanotubes
catalytic chemical vapor deposition
gas-phase synthesis
4/28
16:10:57
808$B9b86NA8zN((BGaAs-MOVPE$B$K$*$1$kIT=cJ*G;EY@)8f$HB@M[EECS1~MQ(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B54DM(B $BN4M4(B$B!&(B($B@5(B)$B?y;3(B $B@5OB(B$B!&(B($BElBg@hC<8&(B) $BCfLn(B $B5A><(B
MOVPE
photovoltaics
GaAs
4/28
16:36:10
819$B%b%N%a%A%k%7%i%s$r86NA$H$9$k(BHotwire-CVD$B$K$h$k(BSiC$B@=Kl$NH?1~%7%_%e%l!<%7%g%s(B
($B4tIlBg1!9)(B) $B!{(B($B3X(B)$B55;3(B $BB:42(B$B!&(B($B@5(B)$B@>ED(B $BE/(B$B!&(B$BL6ED(B $B9@;J(B$B!&(B$B7*NS(B $B;VF,bC(B
CVD
Silicon carbide
Simulation
4/28
16:52:43
838$B%J%N%/%i%9%?!<$N5$AjBO@Q$G7A@.$5$l$kGvKl9=B$$NI>2A(B
($B9-Bg1!9)(B) $B!{(B($B3X(B)$BHSED(B $BBg$B!&(B($B@5(B)$BEgED(B $B3X(B
cluster
nanostructure
thin film
4/28
17:28:59
843$BN3;R86NAF3F~%W%i%:%^(BCVD$BK!$K$h$k%J%NJ#9g:`NA$N9g@.(B
($B9-Bg1!9)(B) $B!{(B($B3X(B)$B;3K\(B $BMN>4(B$B!&(B($B@5(B)$BEgED(B $B3X(B
thin film
nanoparticle
nonequilibrium plasma
4/28
17:34:33

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(C) 2010 ($B
Most recent update: 2010-06-21 20:19:01
For more information contact $B2=3X9)3X2q4X@>;YIt(B $BBh(B42$B2s=)5(Bg2q(B $BLd$$9g$;78(B
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