SCEJ 45th Autumn Meeting (Okayama, 2013) : Session programs

`SCEJ 45th Autumn Meeting (Okayama, 2013)`

Session programs

Symposium <CVD & Dry Process - Reaction Engineering for the Structure/Functions control>

D204-D220, D303-D320

Most recent update: 2013-08-20 14:03:53

Time	Paper ID	Title / Autors	Keywords	Topic code	Ack. number
Hall D, Day 2
(10:00–12:00) ( Saito T., Ikeda K.)
10:00– 10:20	D204	Structure and electrochemical performance of rapidly deposited silicon-based porous films for lithium ion rechargeable batteries Lee Jungho, Matsumoto Shingo, Nakane Kenji, Noda Suguru	physical vapor deposition porous silicon films lithium ion batteries	S-2	956
10:20– 10:40	D205	Construction of reaction mechanism of methyltrichlorosilane considering surface reactions for SiC-CVD process Sato Noboru, Funato Yuichi, Fukushima Yasuyuki, Sugiura Hidetoshi, Hotoduka Kozue, Momose Takeshi, Koshi Mitsuo, Shimogaki Yukihiro	SiC CVD reaction mechanism	S-2	637
10:40– 11:00	D206	The study of the overall reaction model on SiC-CVD using Methyltrichlorosilane Fukushima Yasuyuki, Sato Noboru, Funato Yuichi, Sugiura Hidetoshi, Hotozuka Kozue, Momose Takeshi, Shimogaki Yukihiro	SiC CVD Methyltrichlorosilane	S-2	436
11:00– 11:20	D207	Plasma CVD of silica from hexamethyldisiloxane and oxygen Takeda E., Nagaya S., Takahashi R., Kawase M.	Plasma CVD HMDSO silica	S-2	835
11:20– 11:40	D208	Vapor phase synthesis and characteristics of red luminescent silicon materials Otake H., Inasawa S., Tsuji Y., Yamaguchi Y.	CVD nanoparticles photoluminescence	S-2	410
11:40– 12:00	D209	Mechanism of silicon formation via the zinc reduction of silicon tetrachloride Ono Y., Inasawa S., Tsuji Y., Yamaguchi Y.	zinc reduction reaction silicon supersaturation	S-2	413

(13:00–14:20) ( Shimoyama Y., Kawakami M.)
13:00– 13:40	D213	[Keynote Lecture] Materials Processing with Supercritical Fluids Adschiri T.	Supercritical Nano Processing	S-2	885
13:40– 14:00	D215	[Invited Lecture] Low-cost fabrication of compound semiconductor solar cells using supercritical fluid Tomai Takaaki, Honma Itaru	supercritical fluid selenization solar cells	S-2	351
14:00– 14:20	D216	Effect of alcohol addition on supercritical fluid deposition of TiO₂ Zhao Yu, Jung Kyubong, Momose Takeshi, Shimogaki Yukihiro	Supercritical fluid deposition TiO$2$ alcohol	S-2	622
(14:20–15:40) ( Kawase M., Tsukune A.)
14:20– 15:00	D217	[Keynote Lecture] Vapor Phase Epitaxy of Nitride Semiconductors by MOCVD Matsumoto Koh	Nitride Semiconductors MOCVD Quantum Chemical Calculation	S-2	377
15:00– 15:20	D219	Analysis and control of growth rate and composition in GaN-MOVPE (1) Momose Takeshi, Kamiya Tatsuya, Sugiyama Masakazu, Shimogaki Yukihiro	GaN MOVPE È¿±þ²òÀÏ	S-2	855
15:20– 15:40	D220	Analysis and control of growth rate and composition in GaN-MOVPE (2) Ravasio Stefano Valerio, Momose Takeshi, Katsushi Fujii, Shimogaki Yukihiro, Carlo Cavallotti, Sugiyama Masakazu	GaN MOVPE È¿±þ²òÀÏ	S-2	931
Hall D, Day 3
(9:40–10:40) ( Shimada M., Tamaoki N.)
9:40– 10:00	D303	[Invited Lecture] Sputtering Synthesis of Complex Iron-Titanium Oxide Thin Films and Controlling Their Mixed Valence States Fujii Tatsuo	reactive sputtering Hematite-ilmenite solid solution epitaxial thin	S-2	353
10:00– 10:20	D304	Low temperature CVD and characterization of various TiC-based hardmaterials Nezaki M, Masaoka H, Okamoto N, Saito T, Kondo K, Kan T	titanium carbide hard coating chemical vapor deposition	S-2	946
10:20– 10:40	D305	The role of gas-phase reaction during Co-CVD using amidinate precursor Suzuki Y., Shimizu H., Momose T., Shimogaki Y.	amidinate cobalt thermal CVD	S-2	508
(10:40–12:00) ( Noda S., Miura Y.)
10:40– 11:00	D306	Fabrication and evaluation of ferroelectric capacitors on a highly oriented conductive oxide bottom electrodes Takada Y., Tsuji T., Okamoto N., Saito T., Kondo K., Yosimura T., Fujimura N., Higuchi K., Kitajima A., Oshima A.	ferroelectric material pulsed laser deposition conductive oxide	S-2	947
11:00– 11:20	D307	Process development for next generation DRAM electrode using a new Ru-CVD/ALD precursor Kim Taewoong, Momose Takeshi, Shimogaki Yukihiro	Ruthenium CVD ALD	S-2	605
11:20– 11:40	D308	Study on initial nucleation of Cu-CVD using amidinate precursor Shima Kohei, Shimizu Hideharu, Momose Takeshi, Shimogaki Yukihiro	Cu-CVD Nucleation Amidinate	S-2	959
11:40– 12:00	D309	[Invited Lecture] Novel Si-DRIE technique for future TSV packaging Morikawa Yasuhiro	Si-DRIE Scallop-free TSV packaging	S-2	356

(13:00–14:20) ( Akiyama Y., Miyake M.)
13:00– 13:20	D313	Kinetic study on Hot-wire-assisted Atomic Layer Deposition of Ni Thin Films Yuan Guangjie, Shimizu Hideharu, Momose Takeshi, Shimogaki Yukihiro	Hot-wire-assisted ALD Ni film Kinetics	S-2	803
13:20– 13:40	D314	Structural control of nanoparticle deposited films by annealing Mantani Yuki, Kubo Masaru, Shimada Manabu	PECVD Porous thin film Sintering	S-2	123
13:40– 14:00	D315	Kinetic studies on SiC-CVD process using organic chlorosilane by outlet gas analysis Funato Yuichi, Sato Noboru, Fukushima Yasuyuki, Sugiura Hidetoshi, Hotozuka kozue, Momose takeshi, Shimogaki Yukihiro	CVD Metyltrichlorosilane Dimetyldichlorosilane	S-2	587
14:00– 14:20	D316	Multiscale Analysis of SiC-CVD from Dimethyldichlorosilane Sugiura Hidetoshi, Fukushima Yasuyuki, Sato Noboru, Funato Yuichi, Hotozuka Kozue, Momose Takeshi, Shimogaki Yukihiro	SiC CVD Dimethyldichlorosilane	S-2	577
(14:20–15:40) ( Shimogaki Y., Hotoduka K.)
14:20– 14:40	D317	Analysis of localized silicon deposition in SiH4/H2 PE-CVD Nishida Satoshi, Muta Hiroshi, Kuribayashi Shizuma	PE-CVD silicon deposition	S-2	454
14:40– 15:00	D318	Transient simulation of chemical vapor infiltration of carbon from methane for producing carbon fiber reinforced carbon Norinaga Koyo, Shutou Hiroki, Tanaka Ryota, Kudo Shinji, Hayashi Jun-ichiro	reaction kinetics transport phenomena CVD	S-2	899
15:00– 15:20	D319	In-flight coating of carbon nanotube Kadomura Hirofumi, Kubo Masaru, Shimada Mnabu	composite PECVD nanoparticles	S-2	124
15:20– 15:40	D320	Fluidized Bed CVD of Carbon Nanotubes Using a Heat-Exchange Reactor Chen Zhongming, Kim Dong Young, Hasegawa Kei, Osawa Toshio, Noda Suguru	carbon nanotubes fluidized bed catalytic chemical vapor deposition	S-2	729

Technical program
SCEJ 45th Autumn Meeting (Okayama, 2013)

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Most recent update: 2013-08-20 14:03:53
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