SCEJ

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S-37. CVD$B!&%I%i%$%W%m%;%9(B $B!]9=B$!&5!G=@)8f$NH?1~9)3X!](B

$B%*!<%,%J%$%6!<(B $B2O@%85L@!J5~ETBg!K!&;01:!!K-!J%"%k%P%C%/!K!&;0Bp2m?M!JF`NI@hC

CVD$B$r$O$8$a$H$9$k%I%i%$%W%m%;%9$O!$%(%l%/%H%m%K%/%9!$B@M[EECS!$(BMEMS$B!$5!G=@-%3!<%F%#%s%0Ey$NJ,Ln$K$*$$$F!$4p445;=Q$H$J$C$F$$$k!#K\%7%s%]%8%&%`$G$O!$(BCVD$B$HN`1o5;=Q$rMxMQ$7$?GvKl7A@.!$HyN3;R9g@.!$Hy:Y2C9)$K$*$1$k@=IJ$N9=B$$H5!G=$r@)8f$9$k$?$a$K!$H?1~%a%+%K%:%`$NM}2r$K$h$kO@M}E*$J:GE,2=$rL\;X$75DO@$9$k$3$H$rL\E*$H$7$^$9!#$J$*!$M%=($JH/I=$r$5$l$?)Ne>^$rB#Dh$7$^$9!#(B

$B:G=*99?7F|;~!'(B2014-08-04 11:49:01

$B$3$NJ,N`$G$h$/;H$o$l(B
$B$F$$$k%-!<%o!<%I(B
$B%-!<%o!<%I(B$B
CVD7$B7o(B**
SiC4$B7o(B*
methyltrichlorosilane2$B7o(B
conductive oxide1$B7o(B

$B$BHV9f(B$B9V1iBjL\!?H/I=$B%-!<%o!<%I(B$B
147[$BE8K>9V1i(B] $B%X%F%m@\9g%G%P%$%9$H$7$F$N(BCIS$B7OGvKlB@M[EECS5;=Q$N8=>u$H>-MhE8K>(B
($B>!L&(B
CVD
CIS thin film solar cell
Heterojunction device
5/8
11:28:39
148[$B>7BT9V1i(B] $BG.(BCVD$BK!$rMQ$$$??eJ?4I7?H?1~4oFb$N(BTiN $BGvKl@8@.2aDx$K$*$1$kG.J*
($B;38}Bg9)(B) $B!{(B($B@5(B)$BEDG7>e(B $B7r0lO:(B$B!&(B ($B1'It6=;:(B) $B1)D;(B $BM4Lm(B$B!&(B ($B;38}Bg9)(B) ($B@5(B)$B@>B<(B $BN6IW(B
CVD
Titanium nitride
Heat and mass transfer
5/8
11:29:43
149[$BE8K>9V1i(B] $B2DMO2=%+!<%\%s%J%N%A%e!<%V$rMQ$$$?@hC<%J%N:`NA3+H/(B
($B6eBg1!9)(B) $B!{CfEh(B $BD>IR(B
CVD
Advanced nanomaterial
Carbon nanotube
5/8
11:32:21
161$BD6NW3&N.BNH?1~$rMQ$$$F:n@=$7$?B@M[EECSMQ(BCu2ZnSn(S,Se)4$BGvKl$N9=B$FC@-I>2A(B
($BElKLBgB?858&(B) $B!{(B($B3X(B)$BCf0B(B $BM4B@(B$B!&(B ($B@5(B)$B2,(B $B?-?M(B$B!&(B ($B@5(B)$Bcx5o(B $B9bL@(B$B!&(B ($B@5(B)$BK\4V(B $B3J(B
supercritical fluid
solar cell
CZTS thin film
5/8
13:53:38
268SiC-CVD$B$K$*$1$kM-5!%7%i%s86NA$NHf3S8!F$(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B?y1:(B $B=(=S(B$B!&(B ($B3X(B)$BEh(B $B9IJ?(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BgULg(B $BM$0l(B$B!&(B (IHI$B4pHW8&(B) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B
SiC
CVD
Chlorosilane
5/9
14:40:00
285$B%b%N%a%A%k%H%j%/%m%m%7%i%s$r86NA$H$7$?(BSiC-CVI$B%W%m%;%9:GE,2=$N$?$a$NH?1~O'%9%1!<%k%7%_%e%l!<%7%g%s(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BgULg(B $BM$0l(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B (IHI$B4pHW8&(B) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B3X(B)$BEh(B $B9IJ?(B$B!&(B ($B3X(B)$B?y1:(B $B=(=S(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B
CVI
SiC
Methyltrichlorosilane
5/9
15:46:01
290172nmVUV$B$K$h$k%A%?%sI=LL$N2~
($B4tIlBg1!(B) $B!{(B($B3X(B)$B;38}(B $B63J?(B$B!&(B ($B@5(B)$B?@86(B $B?.;V(B
VUV
Titan
MPC polymer
5/9
15:57:37
291$BD6NW3&N.BNBO@QK!$rMQ$$$?NLO@AH@.(BBi4Ti3O12$B@=Kl(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B%A%g%&(B $B%f%&(B$B!&(B ($B3X(B)$BE"(B $B7>J{(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B
Bi4Ti3O12
supercritical fluid deposition
stoichiometric
5/9
15:57:52
312$B%b%N%a%A%k%H%j%/%m%m%7%i%s$r86NA$H$7$?(BSiC-CVD$B%W%m%;%9$K$*$1$k05NO0MB8@-$r(B $B9MN8$7$?AGH?1~5!9=$N9=C[(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BgULg(B $BM$0l(B$B!&(B ($B3X(B)$BEh(B $B9[J?(B$B!&(B ($B3X(B)$B?y1:(B $B=(=S(B$B!&(B ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B $B1[(B $B8wCK(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B
SiC
CVD
reaction mechanism
5/9
17:17:08
345$B5$8G86NA(BPECVD$B$K$h$k%J%NJ#9gKl$N9g@.@)8f$H8w?(G^3h@-I>2A(B
($B9-Bg1!9)(B) $B!{(B($B3X(B)$BED8}(B $BCRLi(B$B!&(B ($B@5(B)$B5WJ](B $BM%(B$B!&(B ($B@5(B)$BEgED(B $B3X(B
thin film
nanoparticle
composite material
5/9
19:19:58
386$B%[%C%H%o%$%d(BALD$B$K$h$k(BRu$BGvKl(B: $B@.D9FC@-!"AH@.!"$*$h$S9=B$FC@-(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BjO(B $B8w[?(B$B!&(B ($B@5(B)$B@6?e(B $B=(<#(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B
Atomic layer deposition
Hot wire
non-oxidization ambient
5/10
12:47:18
387$B%b%N%a%A%k%H%j%/%m%m%7%i%s$rMQ$$$?(BSiC-CVD$B%W%m%;%9$K$*$1$k@=Kl\:Y2r@O(B(2)
($BElBg1!9)(B) $B!{(B($B3X(B)$BEh(B $B9IJ?(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BgULg(B $BM$0l(B$B!&(B ($B3X(B)$B?y1:(B $B=(=S(B$B!&(B (IHI$B4pHW8&(B) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B
CVD
SiC
methyltrichlorosilane
5/10
12:49:49
395$B%W%i%:%^(BCVD$B$K$h$k%7%j%3%s9bB.@=Kl$N6Q0l2=(B
($B4tIlBg(B) $B!{(B($B@5(B)$B@>ED(B $BE/(B$B!&(B $B;3K\(B $BfFB@(B$B!&(B $B>>1J(B $BBn??(B$B!&(B ($B@5(B)$BL6ED(B $B9@;J(B$B!&(B $B7*NS(B $B;VF,bC(B
$B%W%i%:%^(BCVD
$B9bB.@=Kl(B
$B%7%j%3%s(B
5/10
14:13:13
754$B%W%i%:%^(BCVD$BK!$G:n@=$7$?%7%j%+Kl9=B$$X$N%-%c%j%"%,%9$N1F6A(B
($B5~Bg9)(B) $B!{(B($B3X(B)$BC]ED(B $B0M2C(B$B!&(B ($B3X(B)$B=P8}(B $BMx$B!&(B ($B@5(B)$B2O@%(B $B85L@(B
Plasma CVD
HMDSO
silica
5/12
17:39:23
816$BF3EE@-;@2=J*EE6K$rMQ$$$?6/M6EEBN%-%c%Q%7%?$N:n@=$HNt2=5!9=(B
($B:eI\Bg1!9)(B) $B!{(B($B3X(B)$B9bED(B $B`v;R(B$B!&(B ($B3X(B)$BE7Ln(B $BBY2O(B$B!&(B ($B@5(B)$B2,K\(B $B>0$B!&(B ($B@5(B)$BsnF#(B $B>f{J(B$B!&(B ($B@5(B)$B6aF#(B $BOBIW(B$B!&(B $B5HB<(B $BIp(B$B!&(B $BF#B<(B $B5*J8(B$B!&(B ($B:eBg;:8&(B) $BHu8}(B $B9(Fs(B$B!&(B $BKLEg(B $B>4(B
ferroelectric capacitor
conductive oxide
degradation mechanism
5/12
18:33:39
907$B>o29%*%>%s(BCVD$BK!$K$h$k%j%A%&%`%$%*%sEECSMQ(BSiOC$BIi6K$N:n@=(B
($B:eI\Bg1!9)(B) $B!{(B($B3X(B)$BDTK\(B $BM*0l(B$B!&(B ($B@5(B)$B2,K\(B $B>0$B!&(B ($B@5(B)$BsnF#(B $B>fLw(B$B!&(B ($B@5(B)$B6aF#(B $BOBIW(B$B!&(B ($B%j%0%J%$%H(B) $B0f=P(B $BM&(B$B!&(B $B@>@n(B $B>;?.(B$B!&(B $BBg@>(B $B7DOB(B
Li-ion batteries
SiOC
CVD
5/12
20:19:41
971PLD$BK!$K$h$k6/M6EEBNGvKl$NG[8~@-@)8f$HEE5$FC@-(B
($B:eI\Bg1!9)(B) $B!{(B($B3X(B)$BE7Ln(B $BBY2O(B$B!&(B ($B3X(B)$B9bED(B $B`v;R(B$B!&(B ($B@5(B)$B2,K\(B $B>0$B!&(B ($B@5(B)$BsnF#(B $B>fLw(B$B!&(B ($B@5(B)$B6aF#(B $BOBIW(B$B!&(B $B5HB<(B $BIp(B$B!&(B $BF#B<(B $B5*J8(B$B!&(B ($B:eBg;:8&(B) $BHu8}(B $B9(Fs(B$B!&(B $BKLEg(B $B>4(B
ferroelectric material
pulsed laser deposition
orientation control
5/12
21:44:40
999$B%[%m!<%+%=!<%IJ|EE$K$h$k%+!<%\%s%J%N%U%!%$%P!<$NL5?(G^9g@.(B
($BEl9)Bg1!M}9)(B) $B!{(B($B@5(B)$B?9(B $B?-2p(B$B!&(B $BEDCf(B $B1MCR(B$B!&(B ($B@5(B)$BNkLZ(B $B@5><(B
Plasma-enhanced CVD
Carbon Nanofiber
Non-catalytic synthesis
5/12
23:03:52

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(C) 2014 $B8x1W
Most recent update: 2014-08-04 11:49:01
For more information contact $B2=3X9)3X2q6e=#;YIt(B $BBh(B46$B2s=)5(Bg2q(B $BLd$$9g$;78(B
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