SCEJ 45th Autumn Meeting (Okayama, 2013) : Hall and day program

`SCEJ 45th Autumn Meeting (Okayama, 2013)`

Hall and day program

Hall D, Day 3

Most recent update: 2013-08-20 14:03:53

Time	Paper ID	Title / Autors	Keywords	Topic code	Ack. number
Symposium <CVD & Dry Process - Reaction Engineering for the Structure/Functions control>
(9:40–10:40) ( Shimada M., Tamaoki N.)
9:40– 10:00	D303	[Invited Lecture] Sputtering Synthesis of Complex Iron-Titanium Oxide Thin Films and Controlling Their Mixed Valence States Fujii Tatsuo	reactive sputtering Hematite-ilmenite solid solution epitaxial thin	S-2	353
10:00– 10:20	D304	Low temperature CVD and characterization of various TiC-based hardmaterials Nezaki M, Masaoka H, Okamoto N, Saito T, Kondo K, Kan T	titanium carbide hard coating chemical vapor deposition	S-2	946
10:20– 10:40	D305	The role of gas-phase reaction during Co-CVD using amidinate precursor Suzuki Y., Shimizu H., Momose T., Shimogaki Y.	amidinate cobalt thermal CVD	S-2	508
(10:40–12:00) ( Noda S., Miura Y.)
10:40– 11:00	D306	Fabrication and evaluation of ferroelectric capacitors on a highly oriented conductive oxide bottom electrodes Takada Y., Tsuji T., Okamoto N., Saito T., Kondo K., Yosimura T., Fujimura N., Higuchi K., Kitajima A., Oshima A.	ferroelectric material pulsed laser deposition conductive oxide	S-2	947
11:00– 11:20	D307	Process development for next generation DRAM electrode using a new Ru-CVD/ALD precursor Kim Taewoong, Momose Takeshi, Shimogaki Yukihiro	Ruthenium CVD ALD	S-2	605
11:20– 11:40	D308	Study on initial nucleation of Cu-CVD using amidinate precursor Shima Kohei, Shimizu Hideharu, Momose Takeshi, Shimogaki Yukihiro	Cu-CVD Nucleation Amidinate	S-2	959
11:40– 12:00	D309	[Invited Lecture] Novel Si-DRIE technique for future TSV packaging Morikawa Yasuhiro	Si-DRIE Scallop-free TSV packaging	S-2	356
(13:00–14:20) ( Akiyama Y., Miyake M.)
13:00– 13:20	D313	Kinetic study on Hot-wire-assisted Atomic Layer Deposition of Ni Thin Films Yuan Guangjie, Shimizu Hideharu, Momose Takeshi, Shimogaki Yukihiro	Hot-wire-assisted ALD Ni film Kinetics	S-2	803
13:20– 13:40	D314	Structural control of nanoparticle deposited films by annealing Mantani Yuki, Kubo Masaru, Shimada Manabu	PECVD Porous thin film Sintering	S-2	123
13:40– 14:00	D315	Kinetic studies on SiC-CVD process using organic chlorosilane by outlet gas analysis Funato Yuichi, Sato Noboru, Fukushima Yasuyuki, Sugiura Hidetoshi, Hotozuka kozue, Momose takeshi, Shimogaki Yukihiro	CVD Metyltrichlorosilane Dimetyldichlorosilane	S-2	587
14:00– 14:20	D316	Multiscale Analysis of SiC-CVD from Dimethyldichlorosilane Sugiura Hidetoshi, Fukushima Yasuyuki, Sato Noboru, Funato Yuichi, Hotozuka Kozue, Momose Takeshi, Shimogaki Yukihiro	SiC CVD Dimethyldichlorosilane	S-2	577
(14:20–15:40) ( Shimogaki Y., Hotoduka K.)
14:20– 14:40	D317	Analysis of localized silicon deposition in SiH4/H2 PE-CVD Nishida Satoshi, Muta Hiroshi, Kuribayashi Shizuma	PE-CVD silicon deposition	S-2	454
14:40– 15:00	D318	Transient simulation of chemical vapor infiltration of carbon from methane for producing carbon fiber reinforced carbon Norinaga Koyo, Shutou Hiroki, Tanaka Ryota, Kudo Shinji, Hayashi Jun-ichiro	reaction kinetics transport phenomena CVD	S-2	899
15:00– 15:20	D319	In-flight coating of carbon nanotube Kadomura Hirofumi, Kubo Masaru, Shimada Mnabu	composite PECVD nanoparticles	S-2	124
15:20– 15:40	D320	Fluidized Bed CVD of Carbon Nanotubes Using a Heat-Exchange Reactor Chen Zhongming, Kim Dong Young, Hasegawa Kei, Osawa Toshio, Noda Suguru	carbon nanotubes fluidized bed catalytic chemical vapor deposition	S-2	729

Technical program
SCEJ 45th Autumn Meeting (Okayama, 2013)

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Most recent update: 2013-08-20 14:03:53
For more information contact Organizing Committee, SCEJ 45th Autumn Meeting (Okayama, 2013)
E-mail: inquiry-45f

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