11) Electronics
11-c. Micro-processing (etching, thin film, etc.)
Most recent update: 2020-09-26 15:59:01
![]() in this topics code. | Keywords | Number | |
---|---|---|---|
RF plasma CVD | 1 | ![]() | |
Ti-based film | 1 | ![]() | |
multicomponent | 1 | ![]() |
ACKN No. | Title/Author(s) | Keywords | Style |
---|---|---|---|
534 | Synthesis and characterization of multicomponent metal compound films containing nitrogen, titanium and other metals prepared by RF plasma CVD | RF plasma CVD Ti-based film multicomponent | P |
List of received applications (By topics code)
List of received applications
SCEJ 85th Annual Meeting (2020)
IChES 2020