Last Update: 2020-09-26 15:59:01

List of Received Applications (11-c) [Japanese]


11) Electronics

11-c. Micro-processing (etching, thin film, etc.)

Most recent update: 2020-09-26 15:59:01

The keywords that frequently used
in this topics code.
KeywordsNumber
RF plasma CVD1
Ti-based film1
multicomponent1

ACKN
No.
Title/Author(s)KeywordsStyle
534Synthesis and characterization of multicomponent metal compound films containing nitrogen, titanium and other metals prepared by RF plasma CVD
(Osaka Pref. U.) *(Stu)Matsushima Hiroaki, Fuji Kazuki, (Reg)Saito Takeyasu, (Reg)Okamoto Naoki
RF plasma CVD
Ti-based film
multicomponent
P

List of received applications (By topics code)

List of received applications
SCEJ 85th Annual Meeting (2020)
IChES 2020