SCEJ 86th Annual Meeting (2021): List of the applications (topics)

`SCEJ 86th Annual Meeting (2021) / / IChES 2021`

List of received applications (By topics code)

11) Electronics

11-c. Micro-processing (etching, thin film, etc.)

Most recent update: 2021-08-21 18:44:01

The keywords that frequently used in this topics code.	Keywords	Number
	Wafer etching	1
	SiC	1
	CLF3 gas	1

ACKN No.	Title/Author(s)	Keywords	Style
43	ClF3 gas distributor design for SiC wafer etching (Yokohama Nat. U.) Hayashi Masaya, *(Reg)Habuka Hitoshi, (Kanto Denka Kogyo) (Cor)Takahashi Yoshinao, (AIST) Kato Tomohisa	SiC Wafer etching CLF3 gas	O

List of received applications (By topics code)

List of received applications
SCEJ 86th Annual Meeting (2021)
IChES 2021

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Most recent update: 2021-08-21 18:44:01
For more information contact Organizing Committee, SCEJ 86th Annual Meeting (2021) / / IChES 2021
E-mail: inquiry-86a

www3.scej.org

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