
Authors field exact matches “Shimizu Hideharu”; 3 programs are found.
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| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Organized Session (CVD Reactions Section, Division of Chemical Reaction Engineering) | |||||
| Day 2 | Chair: | ||||
| F201 | Reaction Rate Equation Determination of Chemical Vapor Deposited Bismuth-based Perovskite Thin Film | Chemical vapor deposition Methylammonium bismuth iodide Perovskite solar cell | 5-h | 686 | |
| F202 | Evaluation of Reactive sputtered MAX alloy thin films with reducing gas | sputtering MAX-phase | 5-h | 787 | |
| F203 | Rate analysis of carbon CVD from hydrocarbons with different degrees of unsaturation | CVD carbon coking | 5-h | 785 | |
| Day 3 | G304 | Silicon Nitride ALD Process Using High Purity Hydrazine | Siicon Nitride Atomic Layer Deposition Incubation Cycle | 5-h | 109 |
| Day 3 | Chair: | ||||
| G306 | Investigation of Area Selective Co-ALD process utilizing in-situ observation of reflectance intensity. | ALD in-situ observation reflectance | 5-h | 232 | |
| G307 | Investigation of Continuous Cu Film Formation Process on Polymer | Atomic Layer Depoition Copper on Polymer | 5-h | 531 | |
| G308 | Surface activation of the copper surface by VUV-Redox method using xenon excimer lamp | VUV-Redo Surface activation | 5-h | 786 | |
| G309 | CFD Simulation Study on factors influencing AlN compound single crystal growth | MOCVD CFD III-V compound | 5-h | 683 | |
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SCEJ 89th Annual Meeting (Sakai, 2024)
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