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SCEJ 89th Annual Meeting (Sakai, 2024)

Program search result : Shimizu Hideharu : 3 programs

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Authors field exact matches “Shimizu Hideharu”; 3 programs are found.
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TimePaper
ID
Title / AuthorsKeywordsTopic codeAck.
number
Organized Session (CVD Reactions Section, Division of Chemical Reaction Engineering)
Day 2
9:0010:00
   Chair: Shimogaki Yukihiro, Shimizu Hideharu
F201Reaction Rate Equation Determination of Chemical Vapor Deposited Bismuth-based Perovskite Thin Film
(Kyoto U.) *(Int)Yang Ziguang, (Stu)Togami Keito, (Stu)Tanabe Maika, (Reg)Kawase Motoaki
Chemical vapor deposition
Methylammonium bismuth iodide
Perovskite solar cell
5-h686
F202Evaluation of Reactive sputtered MAX alloy thin films with reducing gas
(Osaka Metro. U.) *(Reg)Saito Takeyasu, (Stu·PCEF)Ueda Kazuki, (Reg)Okamoto Naoki
sputtering
MAX-phase
5-h787
F203Rate analysis of carbon CVD from hydrocarbons with different degrees of unsaturation
(Kyoto U.) (Stu)Nakano Shinji, (Reg)Fujitsuka Hiroyasu, *(Reg)Kawase Motoaki
CVD
carbon
coking
5-h785
Day 3
10:0010:20
G304Silicon Nitride ALD Process Using High Purity Hydrazine
(Taiyo Nippon Sanso) *(Cor)Wada Yoshifumi, (Cor)Murata Hayato, (Cor)Shimizu Hideharu
Siicon Nitride
Atomic Layer Deposition
Incubation Cycle
5-h109
Day 3
10:4012:00
   Chair: Sugime Hisashi, Shimizu Hideharu
G306Investigation of Area Selective Co-ALD process utilizing in-situ observation of reflectance intensity.
(U. Tokyo) *(Stu)Kimura Shunsuke, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Momose Takeshi, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro
ALD
in-situ observation
reflectance
5-h232
G307Investigation of Continuous Cu Film Formation Process on Polymer
(U.Tokyo) *(Stu)Nakajima Yusuke, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro
Atomic Layer Depoition
Copper
on Polymer
5-h531
G308Surface activation of the copper surface by VUV-Redox method using xenon excimer lamp
(Osaka Metro. U.) *(Reg)Endo Shinichi, (Reg)Saito Takeyasu
VUV-Redo
Surface activation
5-h786
G309CFD Simulation Study on factors influencing AlN compound single crystal growth
(Kyoto U.) *(Stu)Li Yafei, Murahashi Kousuke, (Reg)Kawase Motoaki
MOCVD
CFD
III-V compound
5-h683

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SCEJ 89th Annual Meeting (Sakai, 2024)


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