SCEJ 89th Annual Meeting (Sakai, 2024)
Last modified: 2024-06-18 12:32:12
Hall and day program : Hall G, Day 3 : G302
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The ID/PW sent to the Registered participants and invited persons are required.
Hall G, Day 3
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| 5. Chemical reaction engineering | |||||
| Organized Session (CVD Reactions Section, Division of Chemical Reaction Engineering) | |||||
| (9:00–10:40) (Chair: | |||||
| G301 | Quantitative Analysis of Trimethylaluminum Physisorption for ALD | Atomic Layer Depositon Quartz Crystal Microbalance Surface Adsorption | 5-h | 383 | |
| G302 | Study of ZrN thin film formation process using atomic layer deposition | ZrN ALD TEMAZ | 5-h | 273 | |
| G303 | Development of Molybdenum Atomic Layer Deposition Process for Next Generation of ULSI Interconnect | Molybdenum ALD low resistivity | 5-h | 123 | |
| G304 | Silicon Nitride ALD Process Using High Purity Hydrazine | Siicon Nitride Atomic Layer Deposition Incubation Cycle | 5-h | 109 | |
| G305 | Investigation of Co Thin Film Thermal Atomic Layer Etching Process | ALE atomic layer eching cobalt | 5-h | 516 | |
| (10:40–12:00) (Chair: | |||||
| G306 | Investigation of Area Selective Co-ALD process utilizing in-situ observation of reflectance intensity. | ALD in-situ observation reflectance | 5-h | 232 | |
| G307 | Investigation of Continuous Cu Film Formation Process on Polymer | Atomic Layer Depoition Copper on Polymer | 5-h | 531 | |
| G308 | Surface activation of the copper surface by VUV-Redox method using xenon excimer lamp | VUV-Redo Surface activation | 5-h | 786 | |
| G309 | CFD Simulation Study on factors influencing AlN compound single crystal growth | MOCVD CFD III-V compound | 5-h | 683 | |
| CVD reaction subdivision encouragement award ceremony | |||||
| 4. Separation processes | |||||
| (13:00–13:40) (Chair: | |||||
| G313 | Energy saving effect of vertical thin film multiple-effect evaporator | Energy saving Multiple-effect evaporator Thin film evaporation | 4-c | 213 | |
| G314 | [Featured presentation] Development of iron rust capture device using swirl flow | Iron oxide Swirl flow Circulating water | 4-b | 42 | |
| (13:40–14:40) (Chair: | |||||
| G315 | Modification treatment of radioactive contaminated soil using pressurized flotation method | radioactive contaminated soil pressurized flotation method | 4-i | 160 | |
| G316 | Evaluation of adsorption characteristics of granular adsorbent for degradation products in oil | Adsorption Degraded oil | 4-e | 713 | |
| G317 | [Featured presentation] Solvent extraction of technetium(VII) and rhenium(VII) using tripodal amide-type extractants | technetium rhenium solvent extraction | 4-f | 419 | |
| (15:00–16:00) (Chair: | |||||
| G319 | Simulation of Ethanol Dehydration Process using Azeotropic Distillation with Benzene Entrainer | process simulation azeotropic distillation three phase distillation | 4-c | 2 | |
| G320 | Prediction of HETP for Packed Column | Packed column efficiency HETP | 4-c | 699 | |
| G321 | Correlative modeling of local behavior of HETP for a Packed distillation column | Packed Distillation Column HETP Control Volume Model | 4-c | 1 | |
| (16:00–16:40) (Chair: | |||||
| G322 | Investigation of drying characteristics in high-speed mixing dryer for different operational conditions by NIR (near infrared spectroscopy) | Drying NIR Agitation | 4-h | 38 | |
| G323 | Effect of forms of water in coal on water desorption behavior | forms of water water desorption coal | 4-h | 110 | |
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SCEJ 89th Annual Meeting (Sakai, 2024)
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