SCEJ 89th Annual Meeting (Sakai, 2024)
Program search result : 杉目 恒志 : 1 program
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Authors and Chairs (J) field exact matches “杉目 恒志”; 1 program is found.
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| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 3 | Chair: | ||||
| G306 | Investigation of Area Selective Co-ALD process utilizing in-situ observation of reflectance intensity. | ALD in-situ observation reflectance | 5-h | 232 | |
| G307 | Investigation of Continuous Cu Film Formation Process on Polymer | Atomic Layer Depoition Copper on Polymer | 5-h | 531 | |
| G308 | Surface activation of the copper surface by VUV-Redox method using xenon excimer lamp | VUV-Redo Surface activation | 5-h | 786 | |
| G309 | CFD Simulation Study on factors influencing AlN compound single crystal growth | MOCVD CFD III-V compound | 5-h | 683 | |
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SCEJ 89th Annual Meeting (Sakai, 2024)
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