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SCEJ 89th Annual Meeting (Sakai, 2024)

Program search result : ZrN : 1 program

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Keywords field exact matches “ZrN”; 1 program is found.
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TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 3
9:20– 9:40		G302Study of ZrN thin film formation process using atomic layer deposition
ZrN
ALD
TEMAZ
5-h273
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SCEJ 89th Annual Meeting (Sakai, 2024)

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