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SCEJ 89th Annual Meeting (Sakai, 2024)

Last modified: 2024-06-18 12:32:12

Hall and day program : Hall G, Day 3

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Hall G(B3 2F 207), Day 3(Mar. 20)

5 | 4

TimePaper
ID
Title / AuthorsKeywordsTopic codeAck.
number
5. Chemical reaction engineering
Organized Session (CVD Reactions Section, Division of Chemical Reaction Engineering)
(9:00–10:40) (Chair: Saito Takeyasu)
9:009:20G301Quantitative Analysis of Trimethylaluminum Physisorption for ALD
(U. Tokyo) *(Stu)Wu Yuxuan, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro
Atomic Layer Depositon
Quartz Crystal Microbalance
Surface Adsorption
5-h383
9:209:40G302Study of ZrN thin film formation process using atomic layer deposition
(U. Tokyo) *(Stu)Tanaka Jun, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro
ZrN
ALD
TEMAZ
5-h273
9:4010:00G303Development of Molybdenum Atomic Layer Deposition Process for Next Generation of ULSI Interconnect
(U. Tokyo) *(Stu)Obara Soken, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro
Molybdenum
ALD
low resistivity
5-h123
10:0010:20G304Silicon Nitride ALD Process Using High Purity Hydrazine
(Taiyo Nippon Sanso) *(Cor)Wada Yoshifumi, (Cor)Murata Hayato, (Cor)Shimizu Hideharu
Siicon Nitride
Atomic Layer Deposition
Incubation Cycle
5-h109
10:2010:40G305Investigation of Co Thin Film Thermal Atomic Layer Etching Process
(U. Tokyo) *(Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
ALE
atomic layer eching
cobalt
5-h516
(10:40–12:00) (Chair: Sugime Hisashi, Shimizu Hideharu)
10:4011:00G306Investigation of Area Selective Co-ALD process utilizing in-situ observation of reflectance intensity.
(U. Tokyo) *(Stu)Kimura Shunsuke, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Momose Takeshi, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro
ALD
in-situ observation
reflectance
5-h232
11:0011:20G307Investigation of Continuous Cu Film Formation Process on Polymer
(U.Tokyo) *(Stu)Nakajima Yusuke, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro
Atomic Layer Depoition
Copper
on Polymer
5-h531
11:2011:40G308Surface activation of the copper surface by VUV-Redox method using xenon excimer lamp
(Osaka Metro. U.) *(Reg)Endo Shinichi, (Reg)Saito Takeyasu
VUV-Redo
Surface activation
5-h786
11:4012:00G309CFD Simulation Study on factors influencing AlN compound single crystal growth
(Kyoto U.) *(Stu)Li Yafei, Murahashi Kousuke, (Reg)Kawase Motoaki
MOCVD
CFD
III-V compound
5-h683
12:0012:20CVD reaction subdivision encouragement award ceremony
4. Separation processes
(13:00–13:40) (Chair: Tatemoto Yuji)
13:0013:20G313Energy saving effect of vertical thin film multiple-effect evaporator
(Kansai Chem. Eng.) *(Reg)Kishida Takahiro, (Reg)Noda Hideo, (Reg)Yamaji Hiroshi, (Reg·SPCE)Nishimura Goro
Energy saving
Multiple-effect evaporator
Thin film evaporation
4-c213
13:2013:40G314[Featured presentation] Development of iron rust capture device using swirl flow
(Mitsubishi Electric) *(Reg)Yamaguchi Ryusei, Kurihara Kota, Imamura Eiji
Iron oxide
Swirl flow
Circulating water
4-b42
(13:40–14:40) (Chair: Hashimoto Kazuki)
13:4014:00G315Modification treatment of radioactive contaminated soil using pressurized flotation method
(Waseda U.) (Reg)Matsukata Masahiko, (Reg)Yamazaki Atsushi, *(Reg)Masada Takenori, Aikawa Mitsuaki, (Matsukura Giken) Matsubara Iwao, Watanabe Katsutoshi
radioactive contaminated soil
pressurized flotation method
4-i160
14:0014:20G316Evaluation of adsorption characteristics of granular adsorbent for degradation products in oil
(Hitachi) *(Reg)Iijima Atsushi, Saito Hayate
Adsorption
Degraded oil
4-e713
14:2014:40G317[Featured presentation] Solvent extraction of technetium(VII) and rhenium(VII) using tripodal amide-type extractants
(JAEA) *(Reg)Shimojo Kojiro, Suzuki Hideya
technetium
rhenium
solvent extraction
4-f419
(15:00–16:00) (Chair: Shimojo Kojiro)
15:0015:20G319Simulation of Ethanol Dehydration Process using Azeotropic Distillation with Benzene Entrainer
(Mimura Eng. Consultant Office) *(Reg)Mimura Kenichi, (Utsunomiya U.) (Reg)Sato Takafumi
process simulation
azeotropic distillation
three phase distillation
4-c2
15:2015:40G320Prediction of HETP for Packed Column
(TUS) (Reg)Ohe Shuzo
Packed column
efficiency
HETP
4-c699
15:4016:00G321Correlative modeling of local behavior of HETP for a Packed distillation column
(Kansai Chem.Eng.) *(Reg)Kataoka Kunio, (Reg)Nishimura Goro, (Reg)Noda Hideo
Packed Distillation Column
HETP
Control Volume Model
4-c1
(16:00–16:40) (Chair: Inasawa Susumu)
16:0016:20G322Investigation of drying characteristics in high-speed mixing dryer for different operational conditions by NIR (near infrared spectroscopy)
(Shizuoka U.) *(Reg)Tatemoto Yuji, (Stu)Matsuoka Katsutoshi, Otsuka Makoto, (EarthTechnica) (Cor)Koyanagi Keita
Drying
NIR
Agitation
4-h38
16:2016:40G323Effect of forms of water in coal on water desorption behavior
(CRIEPI) *(Cor)Hashimoto Kazuki, (Cor)Sakuragi Kiyoshi, (Cor)Otaka Maromu, (Reg)Yamaguchi Akimasa
forms of water
water desorption
coal
4-h110

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SCEJ 89th Annual Meeting (Sakai, 2024)


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