Hall BD, Day 2 - Hall and day program - SCEJ 49th Autumn Meeting (Nagoya, 2017)

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`SCEJ 49th Autumn Meeting (Nagoya, 2017)`

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Hall and day program : Hall BD, Day 2

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Hall BD(Bldg.2 3F 232), Day 2(Sep. 21)

ST-26

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
ST-26 [Trans-Division Symposium] CVD & Dry Processes -Reaction Engineering for the Structure / Functions Control-
(9:00–10:00) (Chair: Mori Shinsuke)
9:00– 9:20	BD201	[Invited lecture] Reaction Engineering on the Supercritical Hydrothermal Synthesis (Nagoya U.) (Ful)Takami S.	supercritical hydrothermal synthesis metal oxide nanoparticles reaction engineering	ST-26	813
9:20– 9:40	BD202	Porous carbon electrode fabricated from supercritical drying for Li-O₂/CO₂ battery (Tokyo Tech) *(Stu)Kunanusont N., (Ful)Shimoyama Y.	supercritical drying porous carbon electrode Li-O2/CO2 battery	ST-26	666
9:40– 10:00	BD203	Investigation of growth model on SiC-CVI process with high precursor concentration (U. Tokyo) *(Stu)Naka Tomoaki, (Stu)Sato Noboru, (Ful)Shima Kohei, (Stu)Funato Yuichi, (IHI) (Cor)Fukushima Yasuyuki, (U. Tokyo) (Ful)Momose Takeshi, (Ful)Shimogaki Yukihiro	CVI SiC process	ST-26	810
(10:00–11:00) (Chair: Ikeda Kei)
10:00– 10:20	BD204	Construction of overall reaction model on SiC-CVD and experimental verification (U. Tokyo) *(Stu)Funato Yuichi, (Stu)Sato Noboru, (Ful)Shima Kohei, (Stu)Naka Tomoaki, (IHI) (Ful)Fukushima Yasuyuki, (U. Tokyo) (Ful)Momose Takeshi, (Ful)Shimogaki Yukihiro	SiC CVD modeling	ST-26	923
10:20– 10:40	BD205	Multiscale analysis and simulation on trench filling process by chemical vapor deposition (U. Tokyo) *(Stu)Funato Yuichi, (Stu)Sato Noboru, (Ful)Shima Kohei, (Stu)Naka Tomoaki, (IHI) (Ful)Fukushima Yasuyuki, (U. Tokyo) (Ful)Momose Takeshi, (Ful)Shimogaki Yukihiro	CVD trench Multiscale	ST-26	942
10:40– 11:00	BD206	[Invited lecture] Development of 4H-SiC bulk single crystal growth by gas-source method (DENSO) *(Cor)Makino Emi, (Cor)Tokuda Yuichiro, (Cor)Kanda Takahiro, (Cor)Sugiyama Naohiro, (Cor)Kuno Hironari, (CRIEPI) Hoshino Norihiro, Kamata Isaho, Tsuchida Hidekazu, (DENSO) (Cor)Kojima Jun	4H-SiC gas-source method fast growth	ST-26	806
(11:00–12:00) (Chair: Noda Suguru)
11:00– 11:20	BD207	The precursor pressure dependence of the crystal structure of Ti_1-xAl_xN films by thermal CVD (U. Tokyo) *(Stu)Sato Hiroki, Hirabaru Tomoko, (Kyocera) (Cor)Kubo Hayato, (U. Tokyo) (Ful)Momose Takeshi, (Kyocera) (Cor)Tanibuchi Takahito, (U. Tokyo) (Ful)Shimogaki Yukihiro	CVD TiAlN cutting tool	ST-26	367
11:20– 11:40	BD208	Rate analysis of carbon CVD on inert surfaces from benzene (Kyoto U.) *(Stu)Kamimura Shuhei, (Ful)Kawase Motoaki	CVD Carbon Benzene	ST-26	609
11:40– 12:00	BD209	Reduction of by-products in exhaust gases of CVD from Si-Cl compounds enabled by additive gases (U. Tokyo) *(Stu)Sato Noboru, (IHI) (Cor)Fukushima Yasuyuki, (U. Tokyo) (Stu)Funato Yuichi, (Ful)Shima Kohei, (Ful)Momose Takeshi, (NIAD-QE) Koshi Mitsuo, (U. Tokyo) (Ful)Shimogaki Yukihiro	silicon chlorine compounds by-product elementary reaction simulation	ST-26	729
(13:00–14:40) (Chair: Nishida Satoshi)
13:00– 13:40	BD213	[Review lecture] Thin film deposition technologies for future high efficiency crystalline Si solar cells (Toyota Technological Inst.) *Ohshita Yoshio, (Meiji U.) Nakamura Kyotarou, (Toyota Technological Inst.) Lee Hyunju, Kamioka Takefumi	Solar cells passivation CVD	ST-26	800
13:40– 14:00	BD215	[Invited lecture] Ultra-high-speed coating of Diamond-Like Carbon by high-density plasma surrounding substrate and source gas blowing toward substrate (Gifu U.) Kousaka Hiroyuki	Diamond-Like Carbon Microwave Plasma CVD	ST-26	187
14:00– 14:20	BD216	Adhesion strength improvement of TiC-based hard coating layer by surface treated WC-Co (Osaka Pref. U.) *(Stu)Tanaka Chihiro, (Stu)Kiyokawa Daichi, (Ful)Okamoto Naoki, (Ful)Saito Takeyasu, (Osaka U.) Higuchi Kouji, Kitajima Akira	adhesion strength hard coating cemented carbide	ST-26	711
14:20– 14:40	BD217	Mechanism of fabrication of metal-organic framework HKUST-1 film by spray method (Hiroshima U.) *(Ful)Kubo Masaru, (Stu)Sugahara Takuya, (Ful)Shimada Manabu	Porous materials Crystal growth Carbon nanotube composite	ST-26	658

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SCEJ 49th Autumn Meeting (Nagoya, 2017)

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