Shimogaki Yukihiro - Program search result - SCEJ 54th Autumn Meeting (Fukuoka, 2023)

`SCEJ 54th Autumn Meeting (Fukuoka, 2023)`

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Program search result : Shimogaki Yukihiro : 10 programs

The preprints(abstracts) are now open (Aug. 28). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants and invited persons are required.

Authors field exact matches “Shimogaki Yukihiro”; 10 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Day 1 14:00– 14:20	S116	Development of Molybdenum Atomic Layer Deposition Process for Next Generation ULSI Interconnect (U. Tokyo) *(Stu)Liu Haonan, (Stu)Wu Yuxuan, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	ALD Molybdenum interconnect	ST-24	845
Day 1 14:20– 14:40	S117	Examination of selective deposition process by Co-ALD (U. Tokyo) *(Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Momose Takeshi, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro	cobalt ALD selective deposition	ST-24	837
Day 1 15:20– 15:40	S120	Low temperature CVD process development for AlN thin films for 3DICs. (U. Tokyo) *(Stu)Obara S., Ninomiya T., Takagi T., (Reg)Momose T., (Reg)Shimogaki Y.	AlN film chemical vapor deposition low temperature	ST-24	229
Day 1 16:00– 16:20	S122	Development of low-resistivity copper thin film formation process on polymer by supercritical fluid thin film deposition method (U. Tokyo) *(Stu)Nakajima Yusuke, (Reg)Shimogaki Yukihiro, (U. Tokyo/Kumamoto U) (Reg)Momose Takeshi	SCFD Polymer resistivity	ST-24	304
Day 1 16:40– 17:00	S124	In-situ Quartz Crystal Microbalance Measurement of Adsorption for Trimethylaluminum (U. Tokyo) *(Stu)Wu Yuxuan, (Stu)Liu Haonan, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	ALD QCM Adsorption	ST-24	705
Day 2 9:00– 9:20	S201	Observation of the initial process of Cobalt film growth using variations in reflected light intensity. (U. Tokyo) *(Stu)Kimura Shunsuke, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Momose Takeshi, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro	cobalt ALD reflectance	ST-24	895
Day 2 10:40– 11:00	S206	Detailed study of the effect of SiCl₄ addition to SiC-CVI by MTS/H₂ (U. Tokyo) *(Stu)Otaka Yuhei, (Reg)Sato Noboru, (Stu)Kimura Shunsuke, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	SiC CVI MTS	ST-24	862
Day 2 11:00– 11:20	S207	Investigation of high-speed impregnation conditions using high-concentration hydrogen supply in SiC-CVI process (U. Tokyo) *(Stu)Kimura Shunsuke, (Stu)Otaka Yuhei, (Reg)Sato Noboru, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	SiC CVI CVD	ST-24	843
Day 2 14:00– 14:20	S216	Improvement of COSMO-SAC method for estimating vapor pressure of metal complex (U. Tokyo) *(Reg)Sato Noboru, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	COSMO-SAC metal complex vapor pressure	ST-24	824
Day 2 14:40– 15:00	S218	Investigation of visible light responsive CuO_x/TiO₂ photocatalytic reaction mechanism using model catalyst structure (U. Tokyo) *(Stu)Tanaka Jun, (Stu)Nakajima Yusuke, (Reg)Shimogaki Yukihiro, (Reg)Momose Takeshi	photocatalyst visible light reaction mechanism	ST-24	926

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SCEJ 54th Autumn Meeting (Fukuoka, 2023)

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