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SCEJ 54th Autumn Meeting (Fukuoka, 2023)

Program search result : バッチ : 3 programs

The preprints(abstracts) are now open (Aug. 28). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants and invited persons are required.

Title (J) field includes “バッチ”; 3 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 2
9:40– 10:00		C203Influence of wafer load/unload operation in batch-type wafer cleaning
(Yokohama Nat. U.) Tsuchida Toko, *(Reg)Habuka Hitoshi, (PreTech) Goto Akihiro
Wafer cleaning
Wafer operation
Betch-type cleaner
SY-7795
Day 2
11:20– 11:40		H208Batch Bayesian optimization method for goal-oriented multi-objective functional materials design
(Resonac) (Cor)Hanaoka Kyohei
Bayesian Optimization
ST-21385
Day 2
16:00– 16:20		J222Simulation Evaluation of Quality Improvement by Deep Reinforcement Learning Method for Semi-Batch Process
(Fuji Electric) *(Div)Tange Yoshio, (Div)Ikekawa Shogo, (Div)Matsui Tetsuro
Reinforcement Learning
Semi-Batch Process
SY-65724

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SCEJ 54th Autumn Meeting (Fukuoka, 2023)

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