Last modified: 2019-03-12 11:30:00
Authors field exact matches “Shimogaki Yukihiro”; 4 programs are found.
The search results are sorted by the start time.
Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
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Day 1 | PA120 | Ultra-thin continuous crystalline tetracene film formation by temperature-driven supercritical fluid deposition | supercritical fluid tetracene thin film | 8-c | 1283 |
Day 3 | PE358 | Study for reducing by-product and precursor recycle in SiC-CVD | CVD CVI SiC | 5-h | 970 |
Day 3 | PE367 | Multiscale simulation on time-evolution of film thickness profile in microstructure during CVD | multiscale simulation chemical vapor deposition microstructure | 5-h | 1034 |
Day 3 | PE371 | Kinetic analysis on TiAlN-CVD process to construct reaction model | CVD TiAlN cutting tool | 5-h | 982 |
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SCEJ 84th Annual Meeting (Tokyo, 2019)