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SCEJ 54th Autumn Meeting (Fukuoka, 2023)
Program search result : Momose Takeshi : 13 programs
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Authors field exact matches “Momose Takeshi”; 13 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | Chair: | ||||
| S114 | [Review lecture] R&D Trend and Future Prospect of 3D LSI Chip Stacking Technology | 3D-IC chip stacking TSV | ST-24 | 814 | |
| S116 | Development of Molybdenum Atomic Layer Deposition Process for Next Generation ULSI Interconnect | ALD Molybdenum interconnect | ST-24 | 845 | |
| S117 | Examination of selective deposition process by Co-ALD | cobalt ALD selective deposition | ST-24 | 837 | |
| Day 1 | S116 | Development of Molybdenum Atomic Layer Deposition Process for Next Generation ULSI Interconnect | ALD Molybdenum interconnect | ST-24 | 845 |
| Day 1 | S117 | Examination of selective deposition process by Co-ALD | cobalt ALD selective deposition | ST-24 | 837 |
| Day 1 | S120 | Low temperature CVD process development for AlN thin films for 3DICs. | AlN film chemical vapor deposition low temperature | ST-24 | 229 |
| Day 1 | S122 | Development of low-resistivity copper thin film formation process on polymer by supercritical fluid thin film deposition method | SCFD Polymer resistivity | ST-24 | 304 |
| Day 1 | S124 | In-situ Quartz Crystal Microbalance Measurement of Adsorption for Trimethylaluminum | ALD QCM Adsorption | ST-24 | 705 |
| Day 2 | S201 | Observation of the initial process of Cobalt film growth using variations in reflected light intensity. | cobalt ALD reflectance | ST-24 | 895 |
| Day 2 | S206 | Detailed study of the effect of SiCl4 addition to SiC-CVI by MTS/H2 | SiC CVI MTS | ST-24 | 862 |
| Day 2 | S207 | Investigation of high-speed impregnation conditions using high-concentration hydrogen supply in SiC-CVI process | SiC CVI CVD | ST-24 | 843 |
| Day 2 | Chair: | ||||
| S213 | [Review lecture] Current Status and Future Prospects of Hard Coatings for Cutting Tools by Chemical Vapor Deposition | CVD Cutting tool Hard coating | ST-24 | 150 | |
| S215 | DFT study on reaction paths of AlN growth by MOCVD | DFT AlN MOCVD | ST-24 | 423 | |
| S216 | Improvement of COSMO-SAC method for estimating vapor pressure of metal complex | COSMO-SAC metal complex vapor pressure | ST-24 | 824 | |
| Day 2 | S216 | Improvement of COSMO-SAC method for estimating vapor pressure of metal complex | COSMO-SAC metal complex vapor pressure | ST-24 | 824 |
| Day 2 | S218 | Investigation of visible light responsive CuOx/TiO2 photocatalytic reaction mechanism using model catalyst structure | photocatalyst visible light reaction mechanism | ST-24 | 926 |
| Day 3 | Chair: | ||||
| Z313 | Investigation of solid base catalysts applicable for transesterification reactions in sub- and supercritical methanol | Sub- and supercritical methanol Solid base catalyst Transesterification | SY-73 | 370 | |
| Z314 | Investigation of Polymer Flocculant Extraction Behavior Using Liquefied Dimethyl Ether | Hansen Solubility Parameters solvent extraction microalgae | SY-73 | 509 | |
| Z315 | Study on Mass Production of Plant Oil by Liquefied Dimethyl Ether Extraction | dimethyl ether extraction seed oil | SY-73 | 547 | |
| Z316 | Rate of Alkaline Hydrothermal Defluorination of PFCA | Defluorination PFCA Rate | SY-73 | 1016 | |
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SCEJ 54th Autumn Meeting (Fukuoka, 2023)
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