Keywords field exact matches “AlN”; 1 program is found.
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Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
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Day 2 | S215 | DFT study on reaction paths of AlN growth by MOCVD | DFT AlN MOCVD | ST-24 | 423 |
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SCEJ 54th Autumn Meeting (Fukuoka, 2023)