Last modified: 2023-12-10 19:09:26
Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
ST-24 [Trans-Division Symposium] CVD, ALD and Dry Processes | |||||
(9:00–10:20) (Chair: | |||||
S201 | Observation of the initial process of Cobalt film growth using variations in reflected light intensity. | cobalt ALD reflectance | ST-24 | 895 | |
S202 | Morphology Improvement of Chemical Vapor Deposited Bismuth-based Perovskite Thin Film for Photovoltaic Use | Chemical vapor deposition Methylammonium bismuth iodide Molten bismuth | ST-24 | 425 | |
S203 | Rate analysis of coke deposition from hydrocarbons with different degrees of unsaturation | coking CVD Carbon | ST-24 | 255 | |
S204 | Production of silicon-carbon composite materials by chemical vapor deposition for negative electrode of lithium-ion battery | Chemical Vapor Deposition (CVD) Silicon Lithium-ion battery | ST-24 | 76 | |
Break | |||||
(10:40–11:50) (Chair: | |||||
S206 | Detailed study of the effect of SiCl4 addition to SiC-CVI by MTS/H2 | SiC CVI MTS | ST-24 | 862 | |
S207 | Investigation of high-speed impregnation conditions using high-concentration hydrogen supply in SiC-CVI process | SiC CVI CVD | ST-24 | 843 | |
S208 | [Invited lecture] Development of Epitaxial Growth for High Performance SiC Power Devices | Silicon carbide Power device Epitaxial growth | ST-24 | 518 | |
(13:00–14:20) (Chair: | |||||
S213 | [Review lecture] Current Status and Future Prospects of Hard Coatings for Cutting Tools by Chemical Vapor Deposition | CVD Cutting tool Hard coating | ST-24 | 150 | |
S215 | DFT study on reaction paths of AlN growth by MOCVD | DFT AlN MOCVD | ST-24 | 423 | |
S216 | Improvement of COSMO-SAC method for estimating vapor pressure of metal complex | COSMO-SAC metal complex vapor pressure | ST-24 | 824 | |
(14:20–15:50) (Chair: | |||||
S217 | Photocatalytic Performance Evaluation of TiO2 and TiO2-CuO Nanoparticulate Thin Films Prepared by a Gas Phase System | PECVD PVD TiO2-CuO heterojunction | ST-24 | 778 | |
S218 | Investigation of visible light responsive CuOx/TiO2 photocatalytic reaction mechanism using model catalyst structure | photocatalyst visible light reaction mechanism | ST-24 | 926 | |
S219 | Evaluation of the Physical Properties of Reactive sputtered MAX alloy thin films | sputtering MAX-phase | ST-24 | 876 | |
S220 | [Invited lecture] Structure and morphology control in thin films by using sputtering | sputtering thin film morphology control | ST-24 | 783 | |
(15:50–16:20) | |||||
Closing remark and Subdivision Meeting |
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SCEJ 54th Autumn Meeting (Fukuoka, 2023)