Last modified: 2018-02-27 10:00:00
Keywords field exact matches “Plasma-enhanced CVD”; 1 program is found.
The search results are sorted by the start time.
Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
Day 2 | J220 | Plasma-enhanced CVD of silica membranes in a dielectric barrier discharge reactor | Silica membranes Dielectric barrier discharge Plasma-enhanced CVD | 4-a | 527 |
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SCEJ 83rd Annual Meeting (Osaka, 2018)