Last modified: 2018-02-27 10:00:00
Keywords field exact matches “lift-off process”; 1 program is found.
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Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
Day 3 | PE391 | Rapid vapor deposition and mechanical separation of polycrystalline Si films on/from heat-resistant substrates | polycrystalline silicon films separation layer lift-off process | 5-h | 104 |
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SCEJ 83rd Annual Meeting (Osaka, 2018)