
Last modified: 2017-02-20 10:00:00
Authors and Chairs (J) field exact matches “霜垣 幸浩”; 7 programs are found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 2 | E201 | [Invited lecture] Analysis and Design of CVD/ALD processes Based on Chemical Reaction Engineering | Chemical Reaction Engineering CVD Process Design | K-2 | 838 |
| Day 2 | E205 | [Requested talk] Reaction Mechanism and Growth-rate Distribution in Metal-Organic Vapor-Phase Epitaxy of GaN | GaN MOVPE reaction mechanism | K-2 | 324 |
| Day 2 | G205 | 3-demontional capacitor fabrication using supercritical fluid deposition | supercritical fluid deposition 3-demontional capacitor | 8-e | 151 |
| Day 3 | G308 | Ultra conformal infiltration achieved by optimal design of SiC-CVI process and the effect on composite material properties | CVD SiC CMC | 5-h | 552 |
| Day 3 | G309 | Construction of the overall reaction model for optimizing SiC-CVD using Methyltrichlorosilane(4) | SiC Reaction model CVD | 5-h | 664 |
| Day 3 | PE383 | Effects of HCl gas addition and high concentration precursor supply to SiC-CVI process aiming for uniform growth in multi-scale | CVD SiC | 5-h | 478 |
| Day 3 | PE386 | Synthesis and characterization of Ti1-xAlxN films by thermal CVD | CVD coating TiAlN | 5-h | 321 |
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SCEJ 82nd Annual Meeting (Tokyo, 2017)
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