SCEJ 82nd Annual Meeting (Tokyo, 2017)
Last modified: 2017-02-20 10:00:00
Program search result : 均一成長 : 1 program
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The ID/PW printed on the PROGRAM book are required.
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Title (J) field includes “均一成長”; 1 program is found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 3 | PE383 | Effects of HCl gas addition and high concentration precursor supply to SiC-CVI process aiming for uniform growth in multi-scale | CVD SiC | 5-h | 478 |
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SCEJ 82nd Annual Meeting (Tokyo, 2017)
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