SCEJ 82nd Annual Meeting (Tokyo, 2017)
Last modified: 2017-02-20 10:00:00
Program search result : Deposition : 2 programs
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Keywords field exact matches “Deposition”; 2 programs are found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | B120 | [Invited lecture] Thin film deposition using chemical reaction in supercritical fluid for high-aspect-ratio 3-dimensional features | Deposition Supercritical fluid Process development | K-1 | 335 |
| Day 2 | E218 | [Requested talk] PEALD-TiO2 films synthesized via CCRF discharges | TiO2 PEALD deposition | K-2 | 217 |
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SCEJ 82nd Annual Meeting (Tokyo, 2017)
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