SCEJ 82nd Annual Meeting (Tokyo, 2017)
Last modified: 2017-02-20 10:00:00
Program search result : trichlorosilane : 1 program
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Keywords field exact matches “trichlorosilane”; 1 program is found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 2 | E208 | [Requested talk] Surface reaction design for silicon epitaxial growth based on the reactor simulation | silicon epitaxial growth rate trichlorosilane silicon hydride | K-2 | 14 |
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SCEJ 82nd Annual Meeting (Tokyo, 2017)
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