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SCEJ 85th Annual Meeting (2020)

Last modified: 2020-03-02 11:00:00

Program search result : residual stress : 1 program

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Keywords field exact matches “residual stress”; 1 program is found.
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TimePaper
ID
Title / AuthorsKeywordsTopic codeAck.
number
Day 3
13:0014:40
J316Residual stress in gas barrier silica film prepared by plasma chemical vapor deposition
(Kyoto U.) *(Reg)Kawase M., (Stu)Hirata S., (Stu·PCEF)Wakisaka T.
CVD
residual stress
silica gas barrier film
5-h608

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SCEJ 85th Annual Meeting (2020)


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