SCEJ 86th Annual Meeting (2021)
Program search result : Habuka Hitoshi : 2 programs
The preprints(abstracts) are now open (Mar. 8th). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.
Authors field exact matches “Habuka Hitoshi”; 2 programs are found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | N123 | ClF3 gas distributor design for SiC wafer etching | SiC Wafer etching CLF3 gas | 11-c | 43 |
| Day 3 | K319 | Si-B film formation using boron trichloride and dichlorosilane gases | Silicon-boron CVD BCL3 | 5-h | 42 |
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SCEJ 86th Annual Meeting (2021)
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