Keywords field exact matches “plasma-enhanced CVD”; 1 program is found.
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Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
Day 1 | J120 | Rapid synthesis of silica membranes via atmospheric-pressure plasma-enhanced CVD using dielectric barrier discharge | Atmospheric pressure plasma plasma-enhanced CVD Silica membranes | 4-a | 385 |
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SCEJ 86th Annual Meeting (2021)