Shimogaki Yukihiro - Program search result - SCEJ 82nd Annual Meeting (Tokyo, 2017)

`SCEJ 82nd Annual Meeting (Tokyo, 2017)`

Last modified: 2017-02-20 10:00:00

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Program search result : Shimogaki Yukihiro : 7 programs

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Authors field exact matches “Shimogaki Yukihiro”; 7 programs are found.
The search results are sorted by the start time.

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Day 2 9:00– 9:40	E201	[Invited lecture] Analysis and Design of CVD/ALD processes Based on Chemical Reaction Engineering (U. Tokyo) (Ful)Shimogaki Yukihiro	Chemical Reaction Engineering CVD Process Design	K-2	838
Day 2 10:20– 10:40	E205	[Requested talk] Reaction Mechanism and Growth-rate Distribution in Metal-Organic Vapor-Phase Epitaxy of GaN (U. Tokyo) *(Ful)Sugiyama Masakazu, (Ful)Momose Takeshi, (Politecnico Di Milano) Ravasio Stefano, Cavallotti Carlo, (U. Tokyo) (Ful)Shimogaki Yukihiro	GaN MOVPE reaction mechanism	K-2	324
Day 2 10:20– 10:40	G205	3-demontional capacitor fabrication using supercritical fluid deposition (U. Tokyo) *(Stu)Zhao Yu, (Ful)Shimoyama Yusuke, (Ful)Momose Takeshi, (Ful)Shimogaki Yukihiro	supercritical fluid deposition 3-demontional capacitor	8-e	151
Day 3 11:20– 11:40	G308	Ultra conformal infiltration achieved by optimal design of SiC-CVI process and the effect on composite material properties (U. Tokyo) *(Stu)Shima Kohei, (Stu)Sato Noboru, (Stu)Funato Yuichi, (Stu)Naka Tomoaki, (IHI) (Ful)Fukushima Yasuyuki, (U. Tokyo) (Ful)Momose Takeshi, (Ful)Shimogaki Yukihiro	CVD SiC CMC	5-h	552
Day 3 11:40– 12:00	G309	Construction of the overall reaction model for optimizing SiC-CVD using Methyltrichlorosilane(4) (U. Tokyo) *(Stu)Funato Yuichi, (Stu)Shima Kohei, (Stu)Sato Noboru, (Stu)Naka Tomoaki, (Ful)Fukushima Yasuyuki, (Ful)Momose Takeshi, (Ful)Shimogaki Yukihiro	SiC Reaction model CVD	5-h	664
Day 3 13:20– 15:20	PE383	Effects of HCl gas addition and high concentration precursor supply to SiC-CVI process aiming for uniform growth in multi-scale (U. Tokyo) *(Stu)Naka Tomoaki, (Stu)Shima Kohei, (Stu)Sato Noboru, (Stu)Funato Yuichi, (IHI) (Ful)Fukushima Yasuyuki, (U. Tokyo) (Ful)Momose Takeshi, (Ful)Shimogaki Yukihiro	CVD SiC	5-h	478
Day 3 13:20– 15:20	PE386	Synthesis and characterization of Ti_1-xAl_xN films by thermal CVD (U. Tokyo) *(Stu)Sato Hiroki, Hirabaru Tomoko, (Kyocera) Kubo Hayato, (U. Tokyo) (Ful)Momose Takeshi, (Kyocera) Tanibuchi Takahito, (U. Tokyo) (Ful)Shimogaki Yukihiro	CVD coating TiAlN	5-h	321

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SCEJ 82nd Annual Meeting (Tokyo, 2017)

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