Last modified: 2017-02-20 10:00:00
Keywords field exact matches “Reaction model”; 1 program is found.
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Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
Day 3 | G309 | Construction of the overall reaction model for optimizing SiC-CVD using Methyltrichlorosilane(4) | SiC Reaction model CVD | 5-h | 664 |
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SCEJ 82nd Annual Meeting (Tokyo, 2017)