Plasma - Program search result - SCEJ 86th Annual Meeting (2021)

`SCEJ 86th Annual Meeting (2021)`

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Program search result : Plasma : 2 programs

The preprints(abstracts) are now open (Mar. 8th). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.

Keywords field exact matches “Plasma”; 2 programs are found.
The search results are sorted by the start time.

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Day 1 13:20– 14:20	PA139	Spectoroscopy of plasma emisson during film deposition in HMDSO/AR PE-CVD (Gifu U.) *(Stu)Kuboniwa A., Komiyama M., (Reg)Nishida S.	CVD film plasma	5-h	24
Day 3 9:40– 10:00	K303	Ammonia synthesis by synchronizing the pressure swing of N₂-H₂ plasma with the pulse discharge and gas intake/exhaust cycles (Tokyo Tech) *(Reg)Mori Shinsuke, (Stu)Sato Shoma	Plasma Ammonia Pressure swing	5-c	608

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SCEJ 86th Annual Meeting (2021)

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