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SCEJ 53rd Autumn Meeting (Nagano, 2022)

Program search result : 出浦 桃子 : 5 programs

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Authors and Chairs (J) field exact matches “出浦 桃子”; 5 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

TimePaper
ID
Title / AuthorsKeywordsTopic codeAck.
number
Day 1
10:4011:00
DJ106Investigation of fast filling conditions using high concentration hydrogen supply in SiC-CVI process
(U. Tokyo) *(Stu)Kimura Shunsuke, (Stu)Otaka Yuhei, (Reg)Sato Noboru, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
SiC
CVI
CVD
ST-24450
Day 1
11:2011:40
DJ108Density Function Theory Study of Cu Acetylacetonate Dissociative Adsorption on Cu (111) surface
(U. Tokyo) *(Stu)Wu Yuxuan, (Reg)Sato Noboru, (Stu)Yamaguchi Jun, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
Atomic Layer Depositon
Density Function Theory
Surface Adsorption
ST-24599
Day 1
13:4014:00
DJ115Examination of Co-ALD process using CCTBA
(U. Tokyo) *(Stu)Yamaguchi Jun, (Reg)Sato Noboru, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
ALD
cobalt
CCTBA
ST-24617
Day 1
14:2014:40
DJ117Study of estimating vapor pressure of metal complex with COSMO-SAC method
(U. Tokyo) *(Reg)Sato Noboru, (Stu)Yamaguchi Jun, (Stu)Wu Yuxuan, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
vapor pressure
metal complex
COSMO-SAC
ST-24686
Day 2
10:4011:00
CB206Investigation of solubility and diffusivity of Cu(tmhd)2 in scCO2 to design optimal Cu-SCFD process for high aspect ratio structure
(U. Tokyo) *(Stu)Moroi K., Huang Y. Y., Deura M., (Tokyo Tech) (Reg)Shimoyama Y., (U. Tokyo) (Reg)Shimogaki Yukihiro, (Reg)Momose T.
supercritical fluid deposition
solubility
diffusivity
SY-73399

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SCEJ 53rd Autumn Meeting (Nagano, 2022)


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