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SCEJ 53rd Autumn Meeting (Nagano, 2022)

Last modified: 2022-09-26 13:32:00

Session programs : ST-24

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ST-24 [Trans-Division Symposium]
CVD and Dry Processes

Organizers: Noda Suguru (Waseda Univ.), Shimoyama Yusuke (Tokyo Tech), Kawakami Masato (Tokyo Electron Technology Solutions), Momose Wataru (ALD Japan)

Dry processes such as CVD and ALD have become important core technologies in various fields such as electronics, energy devices, and functional coatings. In this symposium, the reaction mechanisms of thin film formation, fine particle synthesis, and microfabrication using dry processes will be understood from the viewpoint of reaction engineering, and rational and efficient reaction processes and reaction devices will be discussed. The CVD Reaction Subdivision Incentive Award will be presented to the young researcher who makes the best presentation.

Hall DJ, Day 1

TimePaper
ID
Title / AuthorsKeywordsTopic codeAck.
number
Hall DJ(C3 3F 301), Day 1(Sep. 14)
(10:00–11:40) (Chair: Noda Suguru)
10:0010:40DJ104[Review lecture] Crystalline materials frontier opened by flux-coating method
(Shinshu U.) *Teshima Katsuya, Yamada Tetsuya, Hayashi Fumitaka, (Tokyo U. Sci/Shinshu U.) Terashima Chiaki
Flux method
Crystalline layer
Environmental and energy devices
ST-24119
10:4011:00DJ106Investigation of fast filling conditions using high concentration hydrogen supply in SiC-CVI process
(U. Tokyo) *(Stu)Kimura Shunsuke, (Stu)Otaka Yuhei, (Reg)Sato Noboru, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
SiC
CVI
CVD
ST-24450
11:0011:20DJ107Investigation of AlN thin film synthesis method using alkylaluminum
(Kyoto U.) *(Stu)Murahashi Kousuke, Li Yafei, (Reg)Kageyama Miho, (Reg)Kawase Motoaki
chemical vapor deposition
AlN
trimethylaluminium
ST-24407
11:2011:40DJ108Density Function Theory Study of Cu Acetylacetonate Dissociative Adsorption on Cu (111) surface
(U. Tokyo) *(Stu)Wu Yuxuan, (Reg)Sato Noboru, (Stu)Yamaguchi Jun, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
Atomic Layer Depositon
Density Function Theory
Surface Adsorption
ST-24599
(13:00–15:00) (Chair: Kawakami Masato, Habuka Hitoshi)
13:0013:40DJ113[Review lecture] Improvement of prediction accuracy of W-ALD deposition rate by machine learning
(TTS) *Aita Michitaka, Yamasaki Hideaki, Hotta Takanobu, Kawaguchi Takuya, Narushima Kensaku, Kubo Atsushi, Mochizuki Seiichiro, Takagi Toshio
Machine Learning
ALD
Simulation
ST-24221
13:4014:00DJ115Examination of Co-ALD process using CCTBA
(U. Tokyo) *(Stu)Yamaguchi Jun, (Reg)Sato Noboru, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
ALD
cobalt
CCTBA
ST-24617
14:0014:20DJ116[Featured presentation] Boron Doping Method using BCl3 gas for Silicon Minimal CVD
(Yokohama Nat. U.) Kamochi Yuki, *(Reg)Habuka Hitoshi, (Minimal Fab./AIST) Ikeda Shin-ichi, Ishida Yuuki, Hara Shiro
Minimal Fab
Silicon CVD
Boron Doping
ST-249
14:2014:40DJ117Study of estimating vapor pressure of metal complex with COSMO-SAC method
(U. Tokyo) *(Reg)Sato Noboru, (Stu)Yamaguchi Jun, (Stu)Wu Yuxuan, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
vapor pressure
metal complex
COSMO-SAC
ST-24686
14:4015:00DJ118Functional protective film coating method by vacuum ultraviolet light irradiation
(Gifu U.) *(Stu)Yokoi Akino, (Reg)Hayakawa Yukio, (Reg)Kambara Shinji
Vacuum ultraviolet light
Polymer coating
Surface modification
ST-24237
(15:10–17:00) (Chair: Shimoyama Yusuke, Tamaoki Naoki)
15:1015:40DJ119[Invited lecture] Microstructure and functionality of non-oxide ceramic layers by laser-assisted chemical vapor deposition
(AIST) *Katsui Hirokazu, Hotta Mikinori, (Nagoya U.) Harada Katsuyoshi, (NIMS) Shimoda Kazuya
chemical vapor deposition
laser
microstructure
ST-24198
15:4016:00DJ121Preparation of ZnO-TiO2-CNT by in-flight PECVD coating process
(Hiroshima U.) *(Stu)Kawahara Junto, (Reg)Kubo Masaru, (Reg)Shimada Manabu
photocatalytic activity
composite material
aerosol process
ST-24437
16:0016:20DJ122Effect of temperature and pressure on synthesis of magnetic Iron oxide nanoparticles in super critical carbon dioxide
(Tokyo Tech) *(Stu)Kariya Keito, (Reg)Orita Yasuhiko, (Reg)Shimoyama Yusuke
supercritical CO2
magnetic nanoparticle
temperature and pressure
ST-24528
16:2016:40DJ123Continuous gas-phase CVD synthesis of single-wall carbon nanotubes via rapid heating of catalyst source
(Waseda U.) *(Stu)Chikaarashi Itsuki, (Reg)Ohsawa Toshio, (Reg)Noda Suguru
carbon nanotube
chemical vapor deposition
nanoparticle catalyst
ST-24239
16:4017:00DJ124Washing of surface modified magnetite nanoparticles using supercritical CO2
(Tokyo Tech) *(Reg)Orita Yasuhiko, Ikeda Kai, (Stu)Wijakmatee Thossaporn, (Reg)Shimoyama Yusuke
carbon dioxide
magnetite nanoparticles
supercritical washing
ST-24497

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SCEJ 53rd Autumn Meeting (Nagano, 2022)


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