SCEJ 53rd Autumn Meeting (Nagano, 2022)
Program search result : 師井 滉平 : 1 program
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Authors and Chairs (J) field exact matches “師井 滉平”; 1 program is found.
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Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
Day 2 10:40– 11:00 | CB206 | Investigation of solubility and diffusivity of Cu(tmhd)2 in scCO2 to design optimal Cu-SCFD process for high aspect ratio structure
(U. Tokyo) *(Stu)Moroi K., Huang Y. Y., Deura M., (Tokyo Tech) (Reg)Shimoyama Y., (U. Tokyo) (Reg)Shimogaki Yukihiro, (Reg)Momose T. | supercritical fluid deposition solubility diffusivity
| SY-73 | 399 |
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SCEJ 53rd Autumn Meeting (Nagano, 2022)
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