Deura Momoko - Program search result - SCEJ 53rd Autumn Meeting (Nagano, 2022)

`SCEJ 53rd Autumn Meeting (Nagano, 2022)`

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Program search result : Deura Momoko : 5 programs

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Authors field exact matches “Deura Momoko”; 5 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Day 1 10:40– 11:00	DJ106	Investigation of fast filling conditions using high concentration hydrogen supply in SiC-CVI process (U. Tokyo) *(Stu)Kimura Shunsuke, (Stu)Otaka Yuhei, (Reg)Sato Noboru, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	SiC CVI CVD	ST-24	450
Day 1 11:20– 11:40	DJ108	Density Function Theory Study of Cu Acetylacetonate Dissociative Adsorption on Cu (111) surface (U. Tokyo) *(Stu)Wu Yuxuan, (Reg)Sato Noboru, (Stu)Yamaguchi Jun, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	Atomic Layer Depositon Density Function Theory Surface Adsorption	ST-24	599
Day 1 13:40– 14:00	DJ115	Examination of Co-ALD process using CCTBA (U. Tokyo) *(Stu)Yamaguchi Jun, (Reg)Sato Noboru, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	ALD cobalt CCTBA	ST-24	617
Day 1 14:20– 14:40	DJ117	Study of estimating vapor pressure of metal complex with COSMO-SAC method (U. Tokyo) *(Reg)Sato Noboru, (Stu)Yamaguchi Jun, (Stu)Wu Yuxuan, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	vapor pressure metal complex COSMO-SAC	ST-24	686
Day 2 10:40– 11:00	CB206	Investigation of solubility and diffusivity of Cu(tmhd)2 in scCO2 to design optimal Cu-SCFD process for high aspect ratio structure (U. Tokyo) *(Stu)Moroi K., Huang Y. Y., Deura M., (Tokyo Tech) (Reg)Shimoyama Y., (U. Tokyo) (Reg)Shimogaki Yukihiro, (Reg)Momose T.	supercritical fluid deposition solubility diffusivity	SY-73	399

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SCEJ 53rd Autumn Meeting (Nagano, 2022)

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