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SCEJ 53rd Autumn Meeting (Nagano, 2022)

Program search result : Ishida Yuuki : 1 program

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Authors field exact matches “Ishida Yuuki”; 1 program is found.
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TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 1
14:00– 14:20		DJ116[Featured presentation] Boron Doping Method using BCl3 gas for Silicon Minimal CVD
(Yokohama Nat. U.) Kamochi Yuki, *(Reg)Habuka Hitoshi, (Minimal Fab./AIST) Ikeda Shin-ichi, Ishida Yuuki, Hara Shiro
Minimal Fab
Silicon CVD
Boron Doping
ST-249

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SCEJ 53rd Autumn Meeting (Nagano, 2022)

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