SCEJ 53rd Autumn Meeting (Nagano, 2022)
Program search result : Shimogaki Yukihiro : 5 programs
The preprints can be viewed by clicking the Paper IDs.
Yellow-back sessions on Technical sessions will be On-site/online Hybrid sessions, others are Online sessions.
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Yellow-back sessions on Technical sessions will be On-site/online Hybrid sessions, others are Online sessions.
Please check notices on menu page.
Authors field exact matches “Shimogaki Yukihiro”; 5 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | DJ106 | Investigation of fast filling conditions using high concentration hydrogen supply in SiC-CVI process | SiC CVI CVD | ST-24 | 450 |
| Day 1 | DJ108 | Density Function Theory Study of Cu Acetylacetonate Dissociative Adsorption on Cu (111) surface | Atomic Layer Depositon Density Function Theory Surface Adsorption | ST-24 | 599 |
| Day 1 | DJ115 | Examination of Co-ALD process using CCTBA | ALD cobalt CCTBA | ST-24 | 617 |
| Day 1 | DJ117 | Study of estimating vapor pressure of metal complex with COSMO-SAC method | vapor pressure metal complex COSMO-SAC | ST-24 | 686 |
| Day 2 | CB206 | Investigation of solubility and diffusivity of Cu(tmhd)2 in scCO2 to design optimal Cu-SCFD process for high aspect ratio structure | supercritical fluid deposition solubility diffusivity | SY-73 | 399 |
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SCEJ 53rd Autumn Meeting (Nagano, 2022)
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