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SCEJ 53rd Autumn Meeting (Nagano, 2022)

Program search result : シリコン : 4 programs

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Title (J) field includes “シリコン”; 4 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 1
14:00– 14:20		DJ116[Featured presentation] Boron Doping Method using BCl3 gas for Silicon Minimal CVD
(Yokohama Nat. U.) Kamochi Yuki, *(Reg)Habuka Hitoshi, (Minimal Fab./AIST) Ikeda Shin-ichi, Ishida Yuuki, Hara Shiro
Minimal Fab
Silicon CVD
Boron Doping
ST-249
Day 2
14:40– 15:00		BB218Life cycle thinking for resource circulation of polycrystalline silicon photovoltaic panels
(UTokyo) *(Reg)Heiho Aya, Suwa Izuru, Dou Yi, (Waseda U.) (Reg)Tokoro Chiharu, (UTokyo) (Reg·APCE)Kikuchi Yasunori
Life cycle assessment
Physical separation
Electric pulsed discharge
SY-82498
Day 3
15:00– 15:20		BB319Water Flow Improved by Side Wall Pinhole Outlets of Silicon Wafer Wet Cleaning Bath
(Yokohama Nat. U.) Tsuchida Toko, Takahashi Toshinori, *(Reg)Habuka Hitoshi, (Pre-Tech) Goto Akihiro
Silicon wafer
Wet cleaning bath
Water flow
SY-767
Day 3
15:00– 15:20		DC319[Featured presentation] Development of digital twin of the bulk single crystal growth of Si by using PINNs (Physics Informed Neural Networks)
(Osaka U.) *(Stu)Takehara Yuto, (Reg)Okano Yasunori
Digital twin
Machine learning
Physics Informed Neural Networks
ST-21396

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SCEJ 53rd Autumn Meeting (Nagano, 2022)

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