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SCEJ 53rd Autumn Meeting (Nagano, 2022)

Program search result : ALD : 2 programs

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Keywords field exact matches “ALD”; 2 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 1
13:00– 13:40		DJ113[Review lecture] Improvement of prediction accuracy of W-ALD deposition rate by machine learning
(TTS) *Aita Michitaka, Yamasaki Hideaki, Hotta Takanobu, Kawaguchi Takuya, Narushima Kensaku, Kubo Atsushi, Mochizuki Seiichiro, Takagi Toshio
Machine Learning
ALD
Simulation
ST-24221
Day 1
13:40– 14:00		DJ115Examination of Co-ALD process using CCTBA
(U. Tokyo) *(Stu)Yamaguchi Jun, (Reg)Sato Noboru, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
ALD
cobalt
CCTBA
ST-24617

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SCEJ 53rd Autumn Meeting (Nagano, 2022)

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