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SCEJ 53rd Autumn Meeting (Nagano, 2022)

Program search result : supercritical fluid deposition : 1 program

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Keywords field exact matches “supercritical fluid deposition”; 1 program is found.
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TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 2
10:40– 11:00		CB206Investigation of solubility and diffusivity of Cu(tmhd)2 in scCO2 to design optimal Cu-SCFD process for high aspect ratio structure
(U. Tokyo) *(Stu)Moroi K., Huang Y. Y., Deura M., (Tokyo Tech) (Reg)Shimoyama Y., (U. Tokyo) (Reg)Shimogaki Yukihiro, (Reg)Momose T.
supercritical fluid deposition
solubility
diffusivity
SY-73399

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SCEJ 53rd Autumn Meeting (Nagano, 2022)

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