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SCEJ 86th Annual Meeting (2021)
Program search result : SiC : 3 programs
The preprints(abstracts) are now open (Mar. 8th). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.
Keywords field exact matches “SiC”; 3 programs are found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | PA128 | Development of chlorine-free SiC-CVI process to achieve uniform infiltration without particle generation | SiC CVI CVD | 5-h | 506 |
| Day 1 | N123 | ClF3 gas distributor design for SiC wafer etching | SiC Wafer etching CLF3 gas | 11-c | 43 |
| Day 3 | K317 | Conformal growth of SiC onto trenches by CVI from MTS/H2 with using quasi-0th-order reaction and sacrificial layer | SiC CVD CVI | 5-h | 383 |
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SCEJ 86th Annual Meeting (2021)
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