EBARA - Program search result - SCEJ 53rd Autumn Meeting (Nagano, 2022)

`SCEJ 53rd Autumn Meeting (Nagano, 2022)`

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Program search result : EBARA : 2 programs

The preprints can be viewed by clicking the Paper IDs.
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Affillations field begins with “EBARA”; 2 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Day 3 13:00– 13:40	BB313	[Review lecture] Equipment and technology of CMP for semiconductor device wafers (EBARA) (Cor)Hiyama Hirokuni	CMP Semiconductor device Equipment	SY-76	65
Day 3 14:20– 14:40	CA317	Pyrolysis behavior of plastics in circulating fluidized bed pyrolizer (Gunma U.) *(Int)Cai Wanxuan, (Reg)Noda Reiji, (Ebara Environmental Plant) (Cor)Ihara Takayuki, (Cor)Fujiwara Takashi, (Cor)Watanabe Toshiki	Pyrolysis CFB Plastics	SY-74	679

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SCEJ 53rd Autumn Meeting (Nagano, 2022)

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